10/18/2011	1:20:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	1:20:24 PM	Recipe started at 1:20 PM
10/18/2011	1:20:24 PM	Helium valve closed
10/18/2011	1:20:24 PM	H2 valve closed
10/18/2011	1:20:24 PM	BCl3 valve closed
10/18/2011	1:20:24 PM	PH3 valve closed
10/18/2011	1:20:24 PM	SiCl4 pre valve closed
10/18/2011	1:20:24 PM	SiCl4 post valve closed
10/18/2011	1:20:24 PM	Main Vac valve closed
10/18/2011	1:20:24 PM	Bypass valve closed
10/18/2011	1:20:24 PM	Bubbler valve closed
10/18/2011	1:20:24 PM	Helium MFC set to  0.000000
10/18/2011	1:20:24 PM	H2 MFC set to  0.000000
10/18/2011	1:20:24 PM	BCl3 MFC set to  0.000000
10/18/2011	1:20:24 PM	PHl3 MFC set to  0.000000
10/18/2011	1:20:24 PM	SiCl4 MFC set to  0.000000
10/18/2011	1:20:24 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	1:20:24 PM	Tube furnace set to 0
10/18/2011	1:20:27 PM	H2 valve closed
10/18/2011	1:20:27 PM	BCl3 valve closed
10/18/2011	1:20:27 PM	PH3 valve closed
10/18/2011	1:20:27 PM	SiCl4 pre valve closed
10/18/2011	1:20:27 PM	SiCl4 post valve closed
10/18/2011	1:20:27 PM	Main Vac valve closed
10/18/2011	1:20:27 PM	Bypass valve closed
10/18/2011	1:20:27 PM	Bubbler valve closed
10/18/2011	1:20:27 PM	Helium valve opened
10/18/2011	1:20:27 PM	Helium MFC set to  500.000000
10/18/2011	1:20:27 PM	H2 MFC set to  0.000000
10/18/2011	1:20:27 PM	BCl3 MFC set to  0.000000
10/18/2011	1:20:27 PM	PHl3 MFC set to  0.000000
10/18/2011	1:20:27 PM	SiCl4 MFC set to  0.000000
10/18/2011	1:20:27 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	1:20:28 PM	Tube furnace set to 0
10/18/2011	1:21:33 PM	Helium valve closed
10/18/2011	1:21:33 PM	H2 valve closed
10/18/2011	1:21:33 PM	BCl3 valve closed
10/18/2011	1:21:33 PM	PH3 valve closed
10/18/2011	1:21:33 PM	SiCl4 pre valve closed
10/18/2011	1:21:33 PM	SiCl4 post valve closed
10/18/2011	1:21:33 PM	Main Vac valve closed
10/18/2011	1:21:33 PM	Bypass valve closed
10/18/2011	1:21:33 PM	Bubbler valve closed
10/18/2011	1:21:33 PM	Helium MFC set to  0.000000
10/18/2011	1:21:33 PM	H2 MFC set to  0.000000
10/18/2011	1:21:33 PM	BCl3 MFC set to  0.000000
10/18/2011	1:21:33 PM	PHl3 MFC set to  0.000000
10/18/2011	1:21:33 PM	SiCl4 MFC set to  0.000000
10/18/2011	1:21:33 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	1:21:33 PM	Tube furnace set to 0
10/18/2011	1:21:34 PM	Run finished at 1:21 PM
10/18/2011	1:21:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	1:58:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	1:58:53 PM	Recipe started at 1:58 PM
10/18/2011	1:58:53 PM	Helium valve closed
10/18/2011	1:58:53 PM	H2 valve closed
10/18/2011	1:58:53 PM	BCl3 valve closed
10/18/2011	1:58:53 PM	PH3 valve closed
10/18/2011	1:58:53 PM	SiCl4 pre valve closed
10/18/2011	1:58:53 PM	SiCl4 post valve closed
10/18/2011	1:58:53 PM	Main Vac valve closed
10/18/2011	1:58:53 PM	Bubbler valve closed
10/18/2011	1:58:53 PM	Bypass valve opened
10/18/2011	1:58:53 PM	Helium MFC set to  0.000000
10/18/2011	1:58:53 PM	H2 MFC set to  0.000000
10/18/2011	1:58:53 PM	BCl3 MFC set to  0.000000
10/18/2011	1:58:53 PM	PHl3 MFC set to  0.000000
10/18/2011	1:58:53 PM	SiCl4 MFC set to  0.000000
10/18/2011	1:58:53 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	1:58:53 PM	Tube furnace set to 0
10/18/2011	2:00:04 PM	Helium valve closed
10/18/2011	2:00:04 PM	H2 valve closed
10/18/2011	2:00:04 PM	BCl3 valve closed
10/18/2011	2:00:04 PM	PH3 valve closed
10/18/2011	2:00:04 PM	SiCl4 pre valve closed
10/18/2011	2:00:04 PM	SiCl4 post valve closed
10/18/2011	2:00:04 PM	Main Vac valve closed
10/18/2011	2:00:04 PM	Bubbler valve closed
10/18/2011	2:00:04 PM	Bypass valve opened
10/18/2011	2:00:04 PM	Helium MFC set to  0.000000
10/18/2011	2:00:04 PM	H2 MFC set to  0.000000
10/18/2011	2:00:04 PM	BCl3 MFC set to  0.000000
10/18/2011	2:00:04 PM	PHl3 MFC set to  0.000000
10/18/2011	2:00:04 PM	SiCl4 MFC set to  0.000000
10/18/2011	2:00:04 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	2:00:04 PM	Tube furnace set to 0
10/18/2011	2:01:04 PM	Helium valve closed
10/18/2011	2:01:04 PM	H2 valve closed
10/18/2011	2:01:04 PM	BCl3 valve closed
10/18/2011	2:01:04 PM	PH3 valve closed
10/18/2011	2:01:04 PM	SiCl4 pre valve closed
10/18/2011	2:01:04 PM	SiCl4 post valve closed
10/18/2011	2:01:04 PM	Bypass valve closed
10/18/2011	2:01:04 PM	Bubbler valve closed
10/18/2011	2:01:04 PM	Main Vac valve opened
10/18/2011	2:01:04 PM	Helium MFC set to  0.000000
10/18/2011	2:01:04 PM	H2 MFC set to  0.000000
10/18/2011	2:01:04 PM	BCl3 MFC set to  0.000000
10/18/2011	2:01:04 PM	PHl3 MFC set to  0.000000
10/18/2011	2:01:04 PM	SiCl4 MFC set to  0.000000
10/18/2011	2:01:04 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	2:01:04 PM	Tube furnace set to 0
10/18/2011	2:01:05 PM	Run finished at 2:01 PM
10/18/2011	2:01:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	3:56:09 PM	Main Vac valve closed
10/18/2011	3:56:22 PM	Main Vac valve opened
10/18/2011	3:57:45 PM	Recipe started at 3:57 PM
10/18/2011	3:57:45 PM	Helium valve closed
10/18/2011	3:57:45 PM	H2 valve closed
10/18/2011	3:57:45 PM	BCl3 valve closed
10/18/2011	3:57:45 PM	PH3 valve closed
10/18/2011	3:57:45 PM	SiCl4 pre valve closed
10/18/2011	3:57:45 PM	SiCl4 post valve closed
10/18/2011	3:57:45 PM	Bypass valve closed
10/18/2011	3:57:45 PM	Bubbler valve closed
10/18/2011	3:57:45 PM	Main Vac valve opened
10/18/2011	3:57:45 PM	Helium MFC set to  0.000000
10/18/2011	3:57:45 PM	H2 MFC set to  0.000000
10/18/2011	3:57:45 PM	BCl3 MFC set to  0.000000
10/18/2011	3:57:45 PM	PHl3 MFC set to  0.000000
10/18/2011	3:57:45 PM	SiCl4 MFC set to  0.000000
10/18/2011	3:57:45 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	3:57:45 PM	Tube furnace set to 150
10/18/2011	3:58:15 PM	H2 valve closed
10/18/2011	3:58:15 PM	BCl3 valve closed
10/18/2011	3:58:15 PM	PH3 valve closed
10/18/2011	3:58:15 PM	SiCl4 pre valve closed
10/18/2011	3:58:15 PM	SiCl4 post valve closed
10/18/2011	3:58:15 PM	Bypass valve closed
10/18/2011	3:58:15 PM	Bubbler valve closed
10/18/2011	3:58:15 PM	Helium valve opened
10/18/2011	3:58:15 PM	Main Vac valve opened
10/18/2011	3:58:15 PM	Helium MFC set to  20.000000
10/18/2011	3:58:15 PM	H2 MFC set to  0.000000
10/18/2011	3:58:15 PM	BCl3 MFC set to  0.000000
10/18/2011	3:58:15 PM	PHl3 MFC set to  0.000000
10/18/2011	3:58:15 PM	SiCl4 MFC set to  0.000000
10/18/2011	3:58:15 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	3:58:16 PM	Tube furnace set to 150
10/18/2011	3:58:46 PM	Helium valve closed
10/18/2011	3:58:46 PM	H2 valve closed
10/18/2011	3:58:46 PM	BCl3 valve closed
10/18/2011	3:58:46 PM	PH3 valve closed
10/18/2011	3:58:46 PM	SiCl4 pre valve closed
10/18/2011	3:58:46 PM	SiCl4 post valve closed
10/18/2011	3:58:46 PM	Bypass valve closed
10/18/2011	3:58:46 PM	Bubbler valve closed
10/18/2011	3:58:46 PM	Main Vac valve opened
10/18/2011	3:58:46 PM	Helium MFC set to  0.000000
10/18/2011	3:58:46 PM	H2 MFC set to  0.000000
10/18/2011	3:58:46 PM	BCl3 MFC set to  0.000000
10/18/2011	3:58:46 PM	PHl3 MFC set to  0.000000
10/18/2011	3:58:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	3:58:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	3:58:46 PM	Tube furnace set to 150
10/18/2011	3:59:16 PM	H2 valve closed
10/18/2011	3:59:16 PM	BCl3 valve closed
10/18/2011	3:59:16 PM	PH3 valve closed
10/18/2011	3:59:16 PM	SiCl4 pre valve closed
10/18/2011	3:59:16 PM	SiCl4 post valve closed
10/18/2011	3:59:16 PM	Bypass valve closed
10/18/2011	3:59:16 PM	Bubbler valve closed
10/18/2011	3:59:16 PM	Helium valve opened
10/18/2011	3:59:16 PM	Main Vac valve opened
10/18/2011	3:59:16 PM	Helium MFC set to  20.000000
10/18/2011	3:59:16 PM	H2 MFC set to  0.000000
10/18/2011	3:59:16 PM	BCl3 MFC set to  0.000000
10/18/2011	3:59:16 PM	PHl3 MFC set to  0.000000
10/18/2011	3:59:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	3:59:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	3:59:16 PM	Tube furnace set to 150
10/18/2011	3:59:46 PM	Helium valve closed
10/18/2011	3:59:46 PM	H2 valve closed
10/18/2011	3:59:46 PM	BCl3 valve closed
10/18/2011	3:59:46 PM	PH3 valve closed
10/18/2011	3:59:46 PM	SiCl4 pre valve closed
10/18/2011	3:59:46 PM	SiCl4 post valve closed
10/18/2011	3:59:46 PM	Bypass valve closed
10/18/2011	3:59:46 PM	Bubbler valve closed
10/18/2011	3:59:46 PM	Main Vac valve opened
10/18/2011	3:59:46 PM	Helium MFC set to  0.000000
10/18/2011	3:59:46 PM	H2 MFC set to  0.000000
10/18/2011	3:59:46 PM	BCl3 MFC set to  0.000000
10/18/2011	3:59:46 PM	PHl3 MFC set to  0.000000
10/18/2011	3:59:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	3:59:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	3:59:46 PM	Tube furnace set to 150
10/18/2011	4:00:16 PM	H2 valve closed
10/18/2011	4:00:16 PM	BCl3 valve closed
10/18/2011	4:00:16 PM	PH3 valve closed
10/18/2011	4:00:16 PM	SiCl4 pre valve closed
10/18/2011	4:00:16 PM	SiCl4 post valve closed
10/18/2011	4:00:16 PM	Bypass valve closed
10/18/2011	4:00:16 PM	Bubbler valve closed
10/18/2011	4:00:16 PM	Helium valve opened
10/18/2011	4:00:16 PM	Main Vac valve opened
10/18/2011	4:00:16 PM	Helium MFC set to  20.000000
10/18/2011	4:00:16 PM	H2 MFC set to  0.000000
10/18/2011	4:00:16 PM	BCl3 MFC set to  0.000000
10/18/2011	4:00:16 PM	PHl3 MFC set to  0.000000
10/18/2011	4:00:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:00:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:00:16 PM	Tube furnace set to 150
10/18/2011	4:00:46 PM	Helium valve closed
10/18/2011	4:00:46 PM	H2 valve closed
10/18/2011	4:00:46 PM	BCl3 valve closed
10/18/2011	4:00:46 PM	PH3 valve closed
10/18/2011	4:00:46 PM	SiCl4 pre valve closed
10/18/2011	4:00:46 PM	SiCl4 post valve closed
10/18/2011	4:00:46 PM	Bypass valve closed
10/18/2011	4:00:46 PM	Bubbler valve closed
10/18/2011	4:00:46 PM	Main Vac valve opened
10/18/2011	4:00:46 PM	Helium MFC set to  0.000000
10/18/2011	4:00:46 PM	H2 MFC set to  0.000000
10/18/2011	4:00:46 PM	BCl3 MFC set to  0.000000
10/18/2011	4:00:46 PM	PHl3 MFC set to  0.000000
10/18/2011	4:00:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:00:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:00:47 PM	Tube furnace set to 150
10/18/2011	4:01:17 PM	H2 valve closed
10/18/2011	4:01:17 PM	BCl3 valve closed
10/18/2011	4:01:17 PM	PH3 valve closed
10/18/2011	4:01:17 PM	SiCl4 pre valve closed
10/18/2011	4:01:17 PM	SiCl4 post valve closed
10/18/2011	4:01:17 PM	Bypass valve closed
10/18/2011	4:01:17 PM	Bubbler valve closed
10/18/2011	4:01:17 PM	Helium valve opened
10/18/2011	4:01:17 PM	Main Vac valve opened
10/18/2011	4:01:17 PM	Helium MFC set to  20.000000
10/18/2011	4:01:17 PM	H2 MFC set to  0.000000
10/18/2011	4:01:17 PM	BCl3 MFC set to  0.000000
10/18/2011	4:01:17 PM	PHl3 MFC set to  0.000000
10/18/2011	4:01:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:01:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:01:17 PM	Tube furnace set to 150
10/18/2011	4:01:47 PM	Helium valve closed
10/18/2011	4:01:47 PM	H2 valve closed
10/18/2011	4:01:47 PM	BCl3 valve closed
10/18/2011	4:01:47 PM	PH3 valve closed
10/18/2011	4:01:47 PM	SiCl4 pre valve closed
10/18/2011	4:01:47 PM	SiCl4 post valve closed
10/18/2011	4:01:47 PM	Bypass valve closed
10/18/2011	4:01:47 PM	Bubbler valve closed
10/18/2011	4:01:47 PM	Main Vac valve opened
10/18/2011	4:01:47 PM	Helium MFC set to  0.000000
10/18/2011	4:01:47 PM	H2 MFC set to  0.000000
10/18/2011	4:01:47 PM	BCl3 MFC set to  0.000000
10/18/2011	4:01:47 PM	PHl3 MFC set to  0.000000
10/18/2011	4:01:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:01:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:01:47 PM	Tube furnace set to 150
10/18/2011	4:02:17 PM	H2 valve closed
10/18/2011	4:02:17 PM	BCl3 valve closed
10/18/2011	4:02:17 PM	PH3 valve closed
10/18/2011	4:02:17 PM	SiCl4 pre valve closed
10/18/2011	4:02:17 PM	SiCl4 post valve closed
10/18/2011	4:02:17 PM	Bypass valve closed
10/18/2011	4:02:17 PM	Bubbler valve closed
10/18/2011	4:02:17 PM	Helium valve opened
10/18/2011	4:02:17 PM	Main Vac valve opened
10/18/2011	4:02:17 PM	Helium MFC set to  20.000000
10/18/2011	4:02:17 PM	H2 MFC set to  0.000000
10/18/2011	4:02:17 PM	BCl3 MFC set to  0.000000
10/18/2011	4:02:17 PM	PHl3 MFC set to  0.000000
10/18/2011	4:02:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:02:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:02:17 PM	Tube furnace set to 150
10/18/2011	4:02:47 PM	Helium valve closed
10/18/2011	4:02:47 PM	H2 valve closed
10/18/2011	4:02:47 PM	BCl3 valve closed
10/18/2011	4:02:47 PM	PH3 valve closed
10/18/2011	4:02:47 PM	SiCl4 pre valve closed
10/18/2011	4:02:47 PM	SiCl4 post valve closed
10/18/2011	4:02:47 PM	Bypass valve closed
10/18/2011	4:02:47 PM	Bubbler valve closed
10/18/2011	4:02:47 PM	Main Vac valve opened
10/18/2011	4:02:47 PM	Helium MFC set to  0.000000
10/18/2011	4:02:47 PM	H2 MFC set to  0.000000
10/18/2011	4:02:47 PM	BCl3 MFC set to  0.000000
10/18/2011	4:02:47 PM	PHl3 MFC set to  0.000000
10/18/2011	4:02:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:02:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:02:47 PM	Tube furnace set to 150
10/18/2011	4:03:17 PM	H2 valve closed
10/18/2011	4:03:17 PM	BCl3 valve closed
10/18/2011	4:03:17 PM	PH3 valve closed
10/18/2011	4:03:17 PM	SiCl4 pre valve closed
10/18/2011	4:03:17 PM	SiCl4 post valve closed
10/18/2011	4:03:17 PM	Bypass valve closed
10/18/2011	4:03:17 PM	Bubbler valve closed
10/18/2011	4:03:17 PM	Helium valve opened
10/18/2011	4:03:17 PM	Main Vac valve opened
10/18/2011	4:03:17 PM	Helium MFC set to  20.000000
10/18/2011	4:03:17 PM	H2 MFC set to  0.000000
10/18/2011	4:03:17 PM	BCl3 MFC set to  0.000000
10/18/2011	4:03:17 PM	PHl3 MFC set to  0.000000
10/18/2011	4:03:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:03:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:03:18 PM	Tube furnace set to 150
10/18/2011	4:03:48 PM	Helium valve closed
10/18/2011	4:03:48 PM	H2 valve closed
10/18/2011	4:03:48 PM	BCl3 valve closed
10/18/2011	4:03:48 PM	PH3 valve closed
10/18/2011	4:03:48 PM	SiCl4 pre valve closed
10/18/2011	4:03:48 PM	SiCl4 post valve closed
10/18/2011	4:03:48 PM	Bypass valve closed
10/18/2011	4:03:48 PM	Bubbler valve closed
10/18/2011	4:03:48 PM	Main Vac valve opened
10/18/2011	4:03:48 PM	Helium MFC set to  0.000000
10/18/2011	4:03:48 PM	H2 MFC set to  0.000000
10/18/2011	4:03:48 PM	BCl3 MFC set to  0.000000
10/18/2011	4:03:48 PM	PHl3 MFC set to  0.000000
10/18/2011	4:03:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:03:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:03:48 PM	Tube furnace set to 150
10/18/2011	4:04:18 PM	H2 valve closed
10/18/2011	4:04:18 PM	BCl3 valve closed
10/18/2011	4:04:18 PM	PH3 valve closed
10/18/2011	4:04:18 PM	SiCl4 pre valve closed
10/18/2011	4:04:18 PM	SiCl4 post valve closed
10/18/2011	4:04:18 PM	Bypass valve closed
10/18/2011	4:04:18 PM	Bubbler valve closed
10/18/2011	4:04:18 PM	Helium valve opened
10/18/2011	4:04:18 PM	Main Vac valve opened
10/18/2011	4:04:18 PM	Helium MFC set to  20.000000
10/18/2011	4:04:18 PM	H2 MFC set to  0.000000
10/18/2011	4:04:18 PM	BCl3 MFC set to  0.000000
10/18/2011	4:04:18 PM	PHl3 MFC set to  0.000000
10/18/2011	4:04:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:04:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:04:18 PM	Tube furnace set to 150
10/18/2011	4:04:48 PM	Helium valve closed
10/18/2011	4:04:48 PM	H2 valve closed
10/18/2011	4:04:48 PM	BCl3 valve closed
10/18/2011	4:04:48 PM	PH3 valve closed
10/18/2011	4:04:48 PM	SiCl4 pre valve closed
10/18/2011	4:04:48 PM	SiCl4 post valve closed
10/18/2011	4:04:48 PM	Bypass valve closed
10/18/2011	4:04:48 PM	Bubbler valve closed
10/18/2011	4:04:48 PM	Main Vac valve opened
10/18/2011	4:04:48 PM	Helium MFC set to  0.000000
10/18/2011	4:04:48 PM	H2 MFC set to  0.000000
10/18/2011	4:04:48 PM	BCl3 MFC set to  0.000000
10/18/2011	4:04:48 PM	PHl3 MFC set to  0.000000
10/18/2011	4:04:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:04:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:04:48 PM	Tube furnace set to 150
10/18/2011	4:05:18 PM	H2 valve closed
10/18/2011	4:05:18 PM	BCl3 valve closed
10/18/2011	4:05:18 PM	PH3 valve closed
10/18/2011	4:05:18 PM	SiCl4 pre valve closed
10/18/2011	4:05:18 PM	SiCl4 post valve closed
10/18/2011	4:05:18 PM	Bypass valve closed
10/18/2011	4:05:18 PM	Bubbler valve closed
10/18/2011	4:05:18 PM	Helium valve opened
10/18/2011	4:05:18 PM	Main Vac valve opened
10/18/2011	4:05:18 PM	Helium MFC set to  20.000000
10/18/2011	4:05:18 PM	H2 MFC set to  0.000000
10/18/2011	4:05:18 PM	BCl3 MFC set to  0.000000
10/18/2011	4:05:18 PM	PHl3 MFC set to  0.000000
10/18/2011	4:05:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:05:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:05:19 PM	Tube furnace set to 150
10/18/2011	4:05:49 PM	Helium valve closed
10/18/2011	4:05:49 PM	H2 valve closed
10/18/2011	4:05:49 PM	BCl3 valve closed
10/18/2011	4:05:49 PM	PH3 valve closed
10/18/2011	4:05:49 PM	SiCl4 pre valve closed
10/18/2011	4:05:49 PM	SiCl4 post valve closed
10/18/2011	4:05:49 PM	Bypass valve closed
10/18/2011	4:05:49 PM	Bubbler valve closed
10/18/2011	4:05:49 PM	Main Vac valve opened
10/18/2011	4:05:49 PM	Helium MFC set to  0.000000
10/18/2011	4:05:49 PM	H2 MFC set to  0.000000
10/18/2011	4:05:49 PM	BCl3 MFC set to  0.000000
10/18/2011	4:05:49 PM	PHl3 MFC set to  0.000000
10/18/2011	4:05:49 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:05:49 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:05:49 PM	Tube furnace set to 150
10/18/2011	4:06:19 PM	H2 valve closed
10/18/2011	4:06:19 PM	BCl3 valve closed
10/18/2011	4:06:19 PM	PH3 valve closed
10/18/2011	4:06:19 PM	SiCl4 pre valve closed
10/18/2011	4:06:19 PM	SiCl4 post valve closed
10/18/2011	4:06:19 PM	Bypass valve closed
10/18/2011	4:06:19 PM	Bubbler valve closed
10/18/2011	4:06:19 PM	Helium valve opened
10/18/2011	4:06:19 PM	Main Vac valve opened
10/18/2011	4:06:19 PM	Helium MFC set to  20.000000
10/18/2011	4:06:19 PM	H2 MFC set to  0.000000
10/18/2011	4:06:19 PM	BCl3 MFC set to  0.000000
10/18/2011	4:06:19 PM	PHl3 MFC set to  0.000000
10/18/2011	4:06:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:06:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:06:19 PM	Tube furnace set to 150
10/18/2011	4:06:49 PM	Helium valve closed
10/18/2011	4:06:49 PM	H2 valve closed
10/18/2011	4:06:49 PM	BCl3 valve closed
10/18/2011	4:06:49 PM	PH3 valve closed
10/18/2011	4:06:49 PM	SiCl4 pre valve closed
10/18/2011	4:06:49 PM	SiCl4 post valve closed
10/18/2011	4:06:49 PM	Bypass valve closed
10/18/2011	4:06:49 PM	Bubbler valve closed
10/18/2011	4:06:49 PM	Main Vac valve opened
10/18/2011	4:06:49 PM	Helium MFC set to  0.000000
10/18/2011	4:06:49 PM	H2 MFC set to  0.000000
10/18/2011	4:06:49 PM	BCl3 MFC set to  0.000000
10/18/2011	4:06:49 PM	PHl3 MFC set to  0.000000
10/18/2011	4:06:49 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:06:49 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:06:49 PM	Tube furnace set to 150
10/18/2011	4:07:19 PM	H2 valve closed
10/18/2011	4:07:19 PM	BCl3 valve closed
10/18/2011	4:07:19 PM	PH3 valve closed
10/18/2011	4:07:19 PM	SiCl4 pre valve closed
10/18/2011	4:07:19 PM	SiCl4 post valve closed
10/18/2011	4:07:19 PM	Bypass valve closed
10/18/2011	4:07:19 PM	Bubbler valve closed
10/18/2011	4:07:19 PM	Helium valve opened
10/18/2011	4:07:19 PM	Main Vac valve opened
10/18/2011	4:07:19 PM	Helium MFC set to  20.000000
10/18/2011	4:07:19 PM	H2 MFC set to  0.000000
10/18/2011	4:07:19 PM	BCl3 MFC set to  0.000000
10/18/2011	4:07:19 PM	PHl3 MFC set to  0.000000
10/18/2011	4:07:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:07:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:07:19 PM	Tube furnace set to 150
10/18/2011	4:07:49 PM	Helium valve closed
10/18/2011	4:07:49 PM	H2 valve closed
10/18/2011	4:07:49 PM	BCl3 valve closed
10/18/2011	4:07:49 PM	PH3 valve closed
10/18/2011	4:07:49 PM	SiCl4 pre valve closed
10/18/2011	4:07:49 PM	SiCl4 post valve closed
10/18/2011	4:07:49 PM	Bypass valve closed
10/18/2011	4:07:49 PM	Bubbler valve closed
10/18/2011	4:07:49 PM	Main Vac valve opened
10/18/2011	4:07:49 PM	Helium MFC set to  0.000000
10/18/2011	4:07:49 PM	H2 MFC set to  0.000000
10/18/2011	4:07:49 PM	BCl3 MFC set to  0.000000
10/18/2011	4:07:49 PM	PHl3 MFC set to  0.000000
10/18/2011	4:07:49 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:07:49 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:07:50 PM	Tube furnace set to 150
10/18/2011	4:07:51 PM	Run finished at 4:07 PM
10/18/2011	4:11:00 PM	Recipe started at 4:10 PM
10/18/2011	4:11:00 PM	Helium valve closed
10/18/2011	4:11:00 PM	H2 valve closed
10/18/2011	4:11:00 PM	BCl3 valve closed
10/18/2011	4:11:00 PM	PH3 valve closed
10/18/2011	4:11:00 PM	SiCl4 pre valve closed
10/18/2011	4:11:00 PM	SiCl4 post valve closed
10/18/2011	4:11:00 PM	Main Vac valve closed
10/18/2011	4:11:00 PM	Bypass valve closed
10/18/2011	4:11:00 PM	Bubbler valve closed
10/18/2011	4:11:00 PM	Helium MFC set to  0.000000
10/18/2011	4:11:00 PM	H2 MFC set to  0.000000
10/18/2011	4:11:00 PM	BCl3 MFC set to  0.000000
10/18/2011	4:11:00 PM	PHl3 MFC set to  0.000000
10/18/2011	4:11:00 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:11:00 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:11:00 PM	Tube furnace set to 0
10/18/2011	4:11:03 PM	Helium valve closed
10/18/2011	4:11:03 PM	BCl3 valve closed
10/18/2011	4:11:03 PM	PH3 valve closed
10/18/2011	4:11:03 PM	SiCl4 pre valve closed
10/18/2011	4:11:03 PM	SiCl4 post valve closed
10/18/2011	4:11:03 PM	Main Vac valve closed
10/18/2011	4:11:03 PM	Bypass valve closed
10/18/2011	4:11:03 PM	Bubbler valve closed
10/18/2011	4:11:03 PM	H2 valve opened
10/18/2011	4:11:03 PM	Helium MFC set to  0.000000
10/18/2011	4:11:03 PM	H2 MFC set to  500.000000
10/18/2011	4:11:03 PM	BCl3 MFC set to  0.000000
10/18/2011	4:11:03 PM	PHl3 MFC set to  0.000000
10/18/2011	4:11:03 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:11:03 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:11:03 PM	Tube furnace set to 0
10/18/2011	4:12:07 PM	Helium valve closed
10/18/2011	4:12:07 PM	BCl3 valve closed
10/18/2011	4:12:07 PM	PH3 valve closed
10/18/2011	4:12:07 PM	SiCl4 pre valve closed
10/18/2011	4:12:07 PM	SiCl4 post valve closed
10/18/2011	4:12:07 PM	Main Vac valve closed
10/18/2011	4:12:07 PM	Bypass valve closed
10/18/2011	4:12:07 PM	H2 valve opened
10/18/2011	4:12:07 PM	Bubbler valve opened
10/18/2011	4:12:07 PM	Helium MFC set to  0.000000
10/18/2011	4:12:07 PM	H2 MFC set to  500.000000
10/18/2011	4:12:07 PM	BCl3 MFC set to  0.000000
10/18/2011	4:12:07 PM	PHl3 MFC set to  0.000000
10/18/2011	4:12:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:12:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:12:07 PM	Tube furnace set to 0
10/18/2011	4:12:08 PM	Helium valve closed
10/18/2011	4:12:08 PM	BCl3 valve closed
10/18/2011	4:12:08 PM	PH3 valve closed
10/18/2011	4:12:08 PM	SiCl4 pre valve closed
10/18/2011	4:12:08 PM	SiCl4 post valve closed
10/18/2011	4:12:08 PM	Main Vac valve closed
10/18/2011	4:12:08 PM	Bypass valve closed
10/18/2011	4:12:08 PM	H2 valve opened
10/18/2011	4:12:08 PM	Bubbler valve opened
10/18/2011	4:12:08 PM	Helium MFC set to  0.000000
10/18/2011	4:12:08 PM	H2 MFC set to  500.000000
10/18/2011	4:12:08 PM	BCl3 MFC set to  0.000000
10/18/2011	4:12:08 PM	PHl3 MFC set to  0.000000
10/18/2011	4:12:08 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:12:08 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:12:08 PM	Tube furnace set to 1000
10/18/2011	4:32:08 PM	Helium valve closed
10/18/2011	4:32:08 PM	BCl3 valve closed
10/18/2011	4:32:08 PM	PH3 valve closed
10/18/2011	4:32:08 PM	Main Vac valve closed
10/18/2011	4:32:08 PM	Bypass valve closed
10/18/2011	4:32:08 PM	H2 valve opened
10/18/2011	4:32:08 PM	SiCl4 pre valve opened
10/18/2011	4:32:08 PM	SiCl4 post valve opened
10/18/2011	4:32:08 PM	Bubbler valve opened
10/18/2011	4:32:08 PM	Helium MFC set to  0.000000
10/18/2011	4:32:08 PM	H2 MFC set to  500.000000
10/18/2011	4:32:08 PM	BCl3 MFC set to  0.000000
10/18/2011	4:32:08 PM	PHl3 MFC set to  0.000000
10/18/2011	4:32:08 PM	SiCl4 MFC set to  50.000000
10/18/2011	4:32:08 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:32:08 PM	Tube furnace set to 1000
10/18/2011	4:43:01 PM	Helium valve closed
10/18/2011	4:43:01 PM	BCl3 valve closed
10/18/2011	4:43:01 PM	PH3 valve closed
10/18/2011	4:43:01 PM	SiCl4 pre valve closed
10/18/2011	4:43:01 PM	SiCl4 post valve closed
10/18/2011	4:43:01 PM	Main Vac valve closed
10/18/2011	4:43:01 PM	Bypass valve closed
10/18/2011	4:43:01 PM	H2 valve opened
10/18/2011	4:43:01 PM	Bubbler valve opened
10/18/2011	4:43:01 PM	Helium MFC set to  0.000000
10/18/2011	4:43:01 PM	H2 MFC set to  500.000000
10/18/2011	4:43:01 PM	BCl3 MFC set to  0.000000
10/18/2011	4:43:01 PM	PHl3 MFC set to  0.000000
10/18/2011	4:43:01 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:43:01 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:43:02 PM	Tube furnace set to 750
10/18/2011	4:48:02 PM	H2 valve closed
10/18/2011	4:48:02 PM	BCl3 valve closed
10/18/2011	4:48:02 PM	PH3 valve closed
10/18/2011	4:48:02 PM	SiCl4 pre valve closed
10/18/2011	4:48:02 PM	SiCl4 post valve closed
10/18/2011	4:48:02 PM	Main Vac valve closed
10/18/2011	4:48:02 PM	Bypass valve closed
10/18/2011	4:48:02 PM	Helium valve opened
10/18/2011	4:48:02 PM	Bubbler valve opened
10/18/2011	4:48:02 PM	Helium MFC set to  500.000000
10/18/2011	4:48:02 PM	H2 MFC set to  0.000000
10/18/2011	4:48:02 PM	BCl3 MFC set to  0.000000
10/18/2011	4:48:02 PM	PHl3 MFC set to  0.000000
10/18/2011	4:48:02 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:48:02 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:48:02 PM	Tube furnace set to 0
10/18/2011	4:53:48 PM	Run aborted at 4:53 PM
10/18/2011	4:53:48 PM	Helium valve closed
10/18/2011	4:53:48 PM	H2 valve closed
10/18/2011	4:53:48 PM	BCl3 valve closed
10/18/2011	4:53:48 PM	PH3 valve closed
10/18/2011	4:53:48 PM	SiCl4 pre valve closed
10/18/2011	4:53:48 PM	SiCl4 post valve closed
10/18/2011	4:53:48 PM	Bypass valve closed
10/18/2011	4:53:48 PM	Main Vac valve closed
10/18/2011	4:53:48 PM	Bubbler valve closed
10/18/2011	4:53:48 PM	Helium MFC set to  0.000000
10/18/2011	4:53:48 PM	H2 MFC set to  0.000000
10/18/2011	4:53:48 PM	BCl3 MFC set to  0.000000
10/18/2011	4:53:48 PM	PHl3 MFC set to  0.000000
10/18/2011	4:53:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:53:48 PM	Tube furnace set to 0
10/18/2011	4:53:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	4:53:52 PM	Recipe started at 4:53 PM
10/18/2011	4:53:52 PM	Helium valve closed
10/18/2011	4:53:52 PM	H2 valve closed
10/18/2011	4:53:52 PM	BCl3 valve closed
10/18/2011	4:53:52 PM	PH3 valve closed
10/18/2011	4:53:52 PM	SiCl4 pre valve closed
10/18/2011	4:53:52 PM	SiCl4 post valve closed
10/18/2011	4:53:52 PM	Main Vac valve closed
10/18/2011	4:53:52 PM	Bypass valve closed
10/18/2011	4:53:52 PM	Bubbler valve closed
10/18/2011	4:53:52 PM	Helium MFC set to  0.000000
10/18/2011	4:53:52 PM	H2 MFC set to  0.000000
10/18/2011	4:53:52 PM	BCl3 MFC set to  0.000000
10/18/2011	4:53:52 PM	PHl3 MFC set to  0.000000
10/18/2011	4:53:52 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:53:52 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:53:52 PM	Tube furnace set to 0
10/18/2011	4:53:55 PM	H2 valve closed
10/18/2011	4:53:55 PM	BCl3 valve closed
10/18/2011	4:53:55 PM	PH3 valve closed
10/18/2011	4:53:55 PM	SiCl4 pre valve closed
10/18/2011	4:53:55 PM	SiCl4 post valve closed
10/18/2011	4:53:55 PM	Main Vac valve closed
10/18/2011	4:53:55 PM	Bypass valve closed
10/18/2011	4:53:55 PM	Bubbler valve closed
10/18/2011	4:53:55 PM	Helium valve opened
10/18/2011	4:53:55 PM	Helium MFC set to  500.000000
10/18/2011	4:53:55 PM	H2 MFC set to  0.000000
10/18/2011	4:53:55 PM	BCl3 MFC set to  0.000000
10/18/2011	4:53:55 PM	PHl3 MFC set to  0.000000
10/18/2011	4:53:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:53:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:53:55 PM	Tube furnace set to 0
10/18/2011	4:53:55 PM	Helium valve closed
10/18/2011	4:53:55 PM	H2 valve closed
10/18/2011	4:53:55 PM	BCl3 valve closed
10/18/2011	4:53:55 PM	PH3 valve closed
10/18/2011	4:53:55 PM	SiCl4 pre valve closed
10/18/2011	4:53:55 PM	SiCl4 post valve closed
10/18/2011	4:53:55 PM	Main Vac valve closed
10/18/2011	4:53:55 PM	Bypass valve closed
10/18/2011	4:53:55 PM	Bubbler valve closed
10/18/2011	4:53:55 PM	Helium MFC set to  0.000000
10/18/2011	4:53:55 PM	H2 MFC set to  0.000000
10/18/2011	4:53:55 PM	BCl3 MFC set to  0.000000
10/18/2011	4:53:55 PM	PHl3 MFC set to  0.000000
10/18/2011	4:53:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	4:53:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	4:53:55 PM	Tube furnace set to 0
10/18/2011	4:53:56 PM	Run finished at 4:53 PM
10/18/2011	4:53:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	5:11:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	5:11:05 PM	Recipe started at 5:11 PM
10/18/2011	5:11:05 PM	Helium valve closed
10/18/2011	5:11:05 PM	H2 valve closed
10/18/2011	5:11:05 PM	BCl3 valve closed
10/18/2011	5:11:05 PM	PH3 valve closed
10/18/2011	5:11:05 PM	SiCl4 pre valve closed
10/18/2011	5:11:05 PM	SiCl4 post valve closed
10/18/2011	5:11:05 PM	Main Vac valve closed
10/18/2011	5:11:05 PM	Bubbler valve closed
10/18/2011	5:11:05 PM	Bypass valve opened
10/18/2011	5:11:05 PM	Helium MFC set to  0.000000
10/18/2011	5:11:05 PM	H2 MFC set to  0.000000
10/18/2011	5:11:05 PM	BCl3 MFC set to  0.000000
10/18/2011	5:11:05 PM	PHl3 MFC set to  0.000000
10/18/2011	5:11:05 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:11:05 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:11:05 PM	Tube furnace set to 0
10/18/2011	5:12:14 PM	Helium valve closed
10/18/2011	5:12:14 PM	H2 valve closed
10/18/2011	5:12:14 PM	BCl3 valve closed
10/18/2011	5:12:14 PM	PH3 valve closed
10/18/2011	5:12:14 PM	SiCl4 pre valve closed
10/18/2011	5:12:14 PM	SiCl4 post valve closed
10/18/2011	5:12:14 PM	Main Vac valve closed
10/18/2011	5:12:14 PM	Bubbler valve closed
10/18/2011	5:12:14 PM	Bypass valve opened
10/18/2011	5:12:14 PM	Helium MFC set to  0.000000
10/18/2011	5:12:14 PM	H2 MFC set to  0.000000
10/18/2011	5:12:14 PM	BCl3 MFC set to  0.000000
10/18/2011	5:12:14 PM	PHl3 MFC set to  0.000000
10/18/2011	5:12:14 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:12:14 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:12:15 PM	Tube furnace set to 0
10/18/2011	5:13:15 PM	Helium valve closed
10/18/2011	5:13:15 PM	H2 valve closed
10/18/2011	5:13:15 PM	BCl3 valve closed
10/18/2011	5:13:15 PM	PH3 valve closed
10/18/2011	5:13:15 PM	SiCl4 pre valve closed
10/18/2011	5:13:15 PM	SiCl4 post valve closed
10/18/2011	5:13:15 PM	Bypass valve closed
10/18/2011	5:13:15 PM	Bubbler valve closed
10/18/2011	5:13:15 PM	Main Vac valve opened
10/18/2011	5:13:15 PM	Helium MFC set to  0.000000
10/18/2011	5:13:15 PM	H2 MFC set to  0.000000
10/18/2011	5:13:15 PM	BCl3 MFC set to  0.000000
10/18/2011	5:13:15 PM	PHl3 MFC set to  0.000000
10/18/2011	5:13:15 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:13:15 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:13:15 PM	Tube furnace set to 0
10/18/2011	5:13:16 PM	Run finished at 5:13 PM
10/18/2011	5:13:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	5:13:46 PM	Recipe started at 5:13 PM
10/18/2011	5:13:46 PM	Helium valve closed
10/18/2011	5:13:46 PM	H2 valve closed
10/18/2011	5:13:46 PM	BCl3 valve closed
10/18/2011	5:13:46 PM	PH3 valve closed
10/18/2011	5:13:46 PM	SiCl4 pre valve closed
10/18/2011	5:13:46 PM	SiCl4 post valve closed
10/18/2011	5:13:46 PM	Bypass valve closed
10/18/2011	5:13:46 PM	Bubbler valve closed
10/18/2011	5:13:46 PM	Main Vac valve opened
10/18/2011	5:13:46 PM	Helium MFC set to  0.000000
10/18/2011	5:13:46 PM	H2 MFC set to  0.000000
10/18/2011	5:13:46 PM	BCl3 MFC set to  0.000000
10/18/2011	5:13:46 PM	PHl3 MFC set to  0.000000
10/18/2011	5:13:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:13:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:13:46 PM	Tube furnace set to 150
10/18/2011	5:14:16 PM	H2 valve closed
10/18/2011	5:14:16 PM	BCl3 valve closed
10/18/2011	5:14:16 PM	PH3 valve closed
10/18/2011	5:14:16 PM	SiCl4 pre valve closed
10/18/2011	5:14:16 PM	SiCl4 post valve closed
10/18/2011	5:14:16 PM	Bypass valve closed
10/18/2011	5:14:16 PM	Bubbler valve closed
10/18/2011	5:14:16 PM	Helium valve opened
10/18/2011	5:14:16 PM	Main Vac valve opened
10/18/2011	5:14:16 PM	Helium MFC set to  20.000000
10/18/2011	5:14:16 PM	H2 MFC set to  0.000000
10/18/2011	5:14:16 PM	BCl3 MFC set to  0.000000
10/18/2011	5:14:16 PM	PHl3 MFC set to  0.000000
10/18/2011	5:14:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:14:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:14:16 PM	Tube furnace set to 150
10/18/2011	5:14:46 PM	Helium valve closed
10/18/2011	5:14:46 PM	H2 valve closed
10/18/2011	5:14:46 PM	BCl3 valve closed
10/18/2011	5:14:46 PM	PH3 valve closed
10/18/2011	5:14:46 PM	SiCl4 pre valve closed
10/18/2011	5:14:46 PM	SiCl4 post valve closed
10/18/2011	5:14:46 PM	Bypass valve closed
10/18/2011	5:14:46 PM	Bubbler valve closed
10/18/2011	5:14:46 PM	Main Vac valve opened
10/18/2011	5:14:46 PM	Helium MFC set to  0.000000
10/18/2011	5:14:46 PM	H2 MFC set to  0.000000
10/18/2011	5:14:46 PM	BCl3 MFC set to  0.000000
10/18/2011	5:14:46 PM	PHl3 MFC set to  0.000000
10/18/2011	5:14:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:14:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:14:46 PM	Tube furnace set to 150
10/18/2011	5:15:16 PM	H2 valve closed
10/18/2011	5:15:16 PM	BCl3 valve closed
10/18/2011	5:15:17 PM	PH3 valve closed
10/18/2011	5:15:17 PM	SiCl4 pre valve closed
10/18/2011	5:15:17 PM	SiCl4 post valve closed
10/18/2011	5:15:17 PM	Bypass valve closed
10/18/2011	5:15:17 PM	Bubbler valve closed
10/18/2011	5:15:17 PM	Helium valve opened
10/18/2011	5:15:17 PM	Main Vac valve opened
10/18/2011	5:15:17 PM	Helium MFC set to  20.000000
10/18/2011	5:15:17 PM	H2 MFC set to  0.000000
10/18/2011	5:15:17 PM	BCl3 MFC set to  0.000000
10/18/2011	5:15:17 PM	PHl3 MFC set to  0.000000
10/18/2011	5:15:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:15:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:15:17 PM	Tube furnace set to 150
10/18/2011	5:15:47 PM	Helium valve closed
10/18/2011	5:15:47 PM	H2 valve closed
10/18/2011	5:15:47 PM	BCl3 valve closed
10/18/2011	5:15:47 PM	PH3 valve closed
10/18/2011	5:15:47 PM	SiCl4 pre valve closed
10/18/2011	5:15:47 PM	SiCl4 post valve closed
10/18/2011	5:15:47 PM	Bypass valve closed
10/18/2011	5:15:47 PM	Bubbler valve closed
10/18/2011	5:15:47 PM	Main Vac valve opened
10/18/2011	5:15:47 PM	Helium MFC set to  0.000000
10/18/2011	5:15:47 PM	H2 MFC set to  0.000000
10/18/2011	5:15:47 PM	BCl3 MFC set to  0.000000
10/18/2011	5:15:47 PM	PHl3 MFC set to  0.000000
10/18/2011	5:15:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:15:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:15:47 PM	Tube furnace set to 150
10/18/2011	5:16:17 PM	H2 valve closed
10/18/2011	5:16:17 PM	BCl3 valve closed
10/18/2011	5:16:17 PM	PH3 valve closed
10/18/2011	5:16:17 PM	SiCl4 pre valve closed
10/18/2011	5:16:17 PM	SiCl4 post valve closed
10/18/2011	5:16:17 PM	Bypass valve closed
10/18/2011	5:16:17 PM	Bubbler valve closed
10/18/2011	5:16:17 PM	Helium valve opened
10/18/2011	5:16:17 PM	Main Vac valve opened
10/18/2011	5:16:17 PM	Helium MFC set to  20.000000
10/18/2011	5:16:17 PM	H2 MFC set to  0.000000
10/18/2011	5:16:17 PM	BCl3 MFC set to  0.000000
10/18/2011	5:16:17 PM	PHl3 MFC set to  0.000000
10/18/2011	5:16:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:16:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:16:17 PM	Tube furnace set to 150
10/18/2011	5:16:47 PM	Helium valve closed
10/18/2011	5:16:47 PM	H2 valve closed
10/18/2011	5:16:47 PM	BCl3 valve closed
10/18/2011	5:16:47 PM	PH3 valve closed
10/18/2011	5:16:47 PM	SiCl4 pre valve closed
10/18/2011	5:16:47 PM	SiCl4 post valve closed
10/18/2011	5:16:47 PM	Bypass valve closed
10/18/2011	5:16:47 PM	Bubbler valve closed
10/18/2011	5:16:47 PM	Main Vac valve opened
10/18/2011	5:16:47 PM	Helium MFC set to  0.000000
10/18/2011	5:16:47 PM	H2 MFC set to  0.000000
10/18/2011	5:16:47 PM	BCl3 MFC set to  0.000000
10/18/2011	5:16:47 PM	PHl3 MFC set to  0.000000
10/18/2011	5:16:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:16:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:16:47 PM	Tube furnace set to 150
10/18/2011	5:17:17 PM	H2 valve closed
10/18/2011	5:17:17 PM	BCl3 valve closed
10/18/2011	5:17:17 PM	PH3 valve closed
10/18/2011	5:17:17 PM	SiCl4 pre valve closed
10/18/2011	5:17:17 PM	SiCl4 post valve closed
10/18/2011	5:17:17 PM	Bypass valve closed
10/18/2011	5:17:17 PM	Bubbler valve closed
10/18/2011	5:17:17 PM	Helium valve opened
10/18/2011	5:17:17 PM	Main Vac valve opened
10/18/2011	5:17:17 PM	Helium MFC set to  20.000000
10/18/2011	5:17:17 PM	H2 MFC set to  0.000000
10/18/2011	5:17:17 PM	BCl3 MFC set to  0.000000
10/18/2011	5:17:17 PM	PHl3 MFC set to  0.000000
10/18/2011	5:17:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:17:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:17:18 PM	Tube furnace set to 150
10/18/2011	5:17:48 PM	Helium valve closed
10/18/2011	5:17:48 PM	H2 valve closed
10/18/2011	5:17:48 PM	BCl3 valve closed
10/18/2011	5:17:48 PM	PH3 valve closed
10/18/2011	5:17:48 PM	SiCl4 pre valve closed
10/18/2011	5:17:48 PM	SiCl4 post valve closed
10/18/2011	5:17:48 PM	Bypass valve closed
10/18/2011	5:17:48 PM	Bubbler valve closed
10/18/2011	5:17:48 PM	Main Vac valve opened
10/18/2011	5:17:48 PM	Helium MFC set to  0.000000
10/18/2011	5:17:48 PM	H2 MFC set to  0.000000
10/18/2011	5:17:48 PM	BCl3 MFC set to  0.000000
10/18/2011	5:17:48 PM	PHl3 MFC set to  0.000000
10/18/2011	5:17:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:17:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:17:48 PM	Tube furnace set to 150
10/18/2011	5:18:18 PM	H2 valve closed
10/18/2011	5:18:18 PM	BCl3 valve closed
10/18/2011	5:18:18 PM	PH3 valve closed
10/18/2011	5:18:18 PM	SiCl4 pre valve closed
10/18/2011	5:18:18 PM	SiCl4 post valve closed
10/18/2011	5:18:18 PM	Bypass valve closed
10/18/2011	5:18:18 PM	Bubbler valve closed
10/18/2011	5:18:18 PM	Helium valve opened
10/18/2011	5:18:18 PM	Main Vac valve opened
10/18/2011	5:18:18 PM	Helium MFC set to  20.000000
10/18/2011	5:18:18 PM	H2 MFC set to  0.000000
10/18/2011	5:18:18 PM	BCl3 MFC set to  0.000000
10/18/2011	5:18:18 PM	PHl3 MFC set to  0.000000
10/18/2011	5:18:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:18:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:18:18 PM	Tube furnace set to 150
10/18/2011	5:18:48 PM	Helium valve closed
10/18/2011	5:18:48 PM	H2 valve closed
10/18/2011	5:18:48 PM	BCl3 valve closed
10/18/2011	5:18:48 PM	PH3 valve closed
10/18/2011	5:18:48 PM	SiCl4 pre valve closed
10/18/2011	5:18:48 PM	SiCl4 post valve closed
10/18/2011	5:18:48 PM	Bypass valve closed
10/18/2011	5:18:48 PM	Bubbler valve closed
10/18/2011	5:18:48 PM	Main Vac valve opened
10/18/2011	5:18:48 PM	Helium MFC set to  0.000000
10/18/2011	5:18:48 PM	H2 MFC set to  0.000000
10/18/2011	5:18:48 PM	BCl3 MFC set to  0.000000
10/18/2011	5:18:48 PM	PHl3 MFC set to  0.000000
10/18/2011	5:18:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:18:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:18:48 PM	Tube furnace set to 150
10/18/2011	5:19:18 PM	H2 valve closed
10/18/2011	5:19:18 PM	BCl3 valve closed
10/18/2011	5:19:18 PM	PH3 valve closed
10/18/2011	5:19:18 PM	SiCl4 pre valve closed
10/18/2011	5:19:18 PM	SiCl4 post valve closed
10/18/2011	5:19:18 PM	Bypass valve closed
10/18/2011	5:19:18 PM	Bubbler valve closed
10/18/2011	5:19:18 PM	Helium valve opened
10/18/2011	5:19:18 PM	Main Vac valve opened
10/18/2011	5:19:18 PM	Helium MFC set to  20.000000
10/18/2011	5:19:18 PM	H2 MFC set to  0.000000
10/18/2011	5:19:18 PM	BCl3 MFC set to  0.000000
10/18/2011	5:19:18 PM	PHl3 MFC set to  0.000000
10/18/2011	5:19:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:19:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:19:18 PM	Tube furnace set to 150
10/18/2011	5:19:48 PM	Helium valve closed
10/18/2011	5:19:48 PM	H2 valve closed
10/18/2011	5:19:48 PM	BCl3 valve closed
10/18/2011	5:19:48 PM	PH3 valve closed
10/18/2011	5:19:48 PM	SiCl4 pre valve closed
10/18/2011	5:19:48 PM	SiCl4 post valve closed
10/18/2011	5:19:48 PM	Bypass valve closed
10/18/2011	5:19:48 PM	Bubbler valve closed
10/18/2011	5:19:48 PM	Main Vac valve opened
10/18/2011	5:19:48 PM	Helium MFC set to  0.000000
10/18/2011	5:19:48 PM	H2 MFC set to  0.000000
10/18/2011	5:19:48 PM	BCl3 MFC set to  0.000000
10/18/2011	5:19:48 PM	PHl3 MFC set to  0.000000
10/18/2011	5:19:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:19:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:19:49 PM	Tube furnace set to 150
10/18/2011	5:20:19 PM	H2 valve closed
10/18/2011	5:20:19 PM	BCl3 valve closed
10/18/2011	5:20:19 PM	PH3 valve closed
10/18/2011	5:20:19 PM	SiCl4 pre valve closed
10/18/2011	5:20:19 PM	SiCl4 post valve closed
10/18/2011	5:20:19 PM	Bypass valve closed
10/18/2011	5:20:19 PM	Bubbler valve closed
10/18/2011	5:20:19 PM	Helium valve opened
10/18/2011	5:20:19 PM	Main Vac valve opened
10/18/2011	5:20:19 PM	Helium MFC set to  20.000000
10/18/2011	5:20:19 PM	H2 MFC set to  0.000000
10/18/2011	5:20:19 PM	BCl3 MFC set to  0.000000
10/18/2011	5:20:19 PM	PHl3 MFC set to  0.000000
10/18/2011	5:20:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:20:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:20:19 PM	Tube furnace set to 150
10/18/2011	5:20:49 PM	Helium valve closed
10/18/2011	5:20:49 PM	H2 valve closed
10/18/2011	5:20:49 PM	BCl3 valve closed
10/18/2011	5:20:49 PM	PH3 valve closed
10/18/2011	5:20:49 PM	SiCl4 pre valve closed
10/18/2011	5:20:49 PM	SiCl4 post valve closed
10/18/2011	5:20:49 PM	Bypass valve closed
10/18/2011	5:20:49 PM	Bubbler valve closed
10/18/2011	5:20:49 PM	Main Vac valve opened
10/18/2011	5:20:49 PM	Helium MFC set to  0.000000
10/18/2011	5:20:49 PM	H2 MFC set to  0.000000
10/18/2011	5:20:49 PM	BCl3 MFC set to  0.000000
10/18/2011	5:20:49 PM	PHl3 MFC set to  0.000000
10/18/2011	5:20:49 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:20:49 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:20:49 PM	Tube furnace set to 150
10/18/2011	5:21:04 PM	Run aborted at 5:21 PM
10/18/2011	5:21:04 PM	Helium valve closed
10/18/2011	5:21:04 PM	H2 valve closed
10/18/2011	5:21:04 PM	BCl3 valve closed
10/18/2011	5:21:04 PM	PH3 valve closed
10/18/2011	5:21:04 PM	SiCl4 pre valve closed
10/18/2011	5:21:04 PM	SiCl4 post valve closed
10/18/2011	5:21:04 PM	Bypass valve closed
10/18/2011	5:21:04 PM	Main Vac valve closed
10/18/2011	5:21:04 PM	Bubbler valve closed
10/18/2011	5:21:04 PM	Helium MFC set to  0.000000
10/18/2011	5:21:04 PM	H2 MFC set to  0.000000
10/18/2011	5:21:04 PM	BCl3 MFC set to  0.000000
10/18/2011	5:21:04 PM	PHl3 MFC set to  0.000000
10/18/2011	5:21:04 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:21:04 PM	Tube furnace set to 0
10/18/2011	5:21:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	5:21:06 PM	Recipe started at 5:21 PM
10/18/2011	5:21:06 PM	Helium valve closed
10/18/2011	5:21:06 PM	H2 valve closed
10/18/2011	5:21:06 PM	BCl3 valve closed
10/18/2011	5:21:06 PM	PH3 valve closed
10/18/2011	5:21:06 PM	SiCl4 pre valve closed
10/18/2011	5:21:06 PM	SiCl4 post valve closed
10/18/2011	5:21:06 PM	Main Vac valve closed
10/18/2011	5:21:06 PM	Bubbler valve closed
10/18/2011	5:21:06 PM	Bypass valve opened
10/18/2011	5:21:06 PM	Helium MFC set to  0.000000
10/18/2011	5:21:06 PM	H2 MFC set to  0.000000
10/18/2011	5:21:06 PM	BCl3 MFC set to  0.000000
10/18/2011	5:21:06 PM	PHl3 MFC set to  0.000000
10/18/2011	5:21:06 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:21:06 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:21:07 PM	Tube furnace set to 0
10/18/2011	5:21:07 PM	Helium valve closed
10/18/2011	5:21:07 PM	H2 valve closed
10/18/2011	5:21:07 PM	BCl3 valve closed
10/18/2011	5:21:07 PM	PH3 valve closed
10/18/2011	5:21:07 PM	SiCl4 pre valve closed
10/18/2011	5:21:07 PM	SiCl4 post valve closed
10/18/2011	5:21:07 PM	Main Vac valve closed
10/18/2011	5:21:07 PM	Bubbler valve closed
10/18/2011	5:21:07 PM	Bypass valve opened
10/18/2011	5:21:07 PM	Helium MFC set to  0.000000
10/18/2011	5:21:07 PM	H2 MFC set to  0.000000
10/18/2011	5:21:07 PM	BCl3 MFC set to  0.000000
10/18/2011	5:21:07 PM	PHl3 MFC set to  0.000000
10/18/2011	5:21:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:21:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:21:07 PM	Tube furnace set to 0
10/18/2011	5:21:10 PM	Helium valve closed
10/18/2011	5:21:10 PM	H2 valve closed
10/18/2011	5:21:10 PM	BCl3 valve closed
10/18/2011	5:21:10 PM	PH3 valve closed
10/18/2011	5:21:10 PM	SiCl4 pre valve closed
10/18/2011	5:21:10 PM	SiCl4 post valve closed
10/18/2011	5:21:10 PM	Bypass valve closed
10/18/2011	5:21:10 PM	Bubbler valve closed
10/18/2011	5:21:10 PM	Main Vac valve opened
10/18/2011	5:21:10 PM	Helium MFC set to  0.000000
10/18/2011	5:21:10 PM	H2 MFC set to  0.000000
10/18/2011	5:21:10 PM	BCl3 MFC set to  0.000000
10/18/2011	5:21:10 PM	PHl3 MFC set to  0.000000
10/18/2011	5:21:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:21:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:21:10 PM	Tube furnace set to 0
10/18/2011	5:21:11 PM	Run finished at 5:21 PM
10/18/2011	5:21:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	5:39:50 PM	Main Vac valve closed
10/18/2011	5:39:58 PM	Main Vac valve opened
10/18/2011	5:40:28 PM	Recipe started at 5:40 PM
10/18/2011	5:40:28 PM	Helium valve closed
10/18/2011	5:40:28 PM	H2 valve closed
10/18/2011	5:40:28 PM	BCl3 valve closed
10/18/2011	5:40:28 PM	PH3 valve closed
10/18/2011	5:40:28 PM	SiCl4 pre valve closed
10/18/2011	5:40:28 PM	SiCl4 post valve closed
10/18/2011	5:40:28 PM	Bypass valve closed
10/18/2011	5:40:28 PM	Bubbler valve closed
10/18/2011	5:40:28 PM	Main Vac valve opened
10/18/2011	5:40:28 PM	Helium MFC set to  0.000000
10/18/2011	5:40:28 PM	H2 MFC set to  0.000000
10/18/2011	5:40:28 PM	BCl3 MFC set to  0.000000
10/18/2011	5:40:28 PM	PHl3 MFC set to  0.000000
10/18/2011	5:40:28 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:40:28 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:40:28 PM	Tube furnace set to 150
10/18/2011	5:40:58 PM	H2 valve closed
10/18/2011	5:40:58 PM	BCl3 valve closed
10/18/2011	5:40:58 PM	PH3 valve closed
10/18/2011	5:40:58 PM	SiCl4 pre valve closed
10/18/2011	5:40:58 PM	SiCl4 post valve closed
10/18/2011	5:40:58 PM	Bypass valve closed
10/18/2011	5:40:58 PM	Bubbler valve closed
10/18/2011	5:40:58 PM	Helium valve opened
10/18/2011	5:40:58 PM	Main Vac valve opened
10/18/2011	5:40:58 PM	Helium MFC set to  20.000000
10/18/2011	5:40:58 PM	H2 MFC set to  0.000000
10/18/2011	5:40:58 PM	BCl3 MFC set to  0.000000
10/18/2011	5:40:58 PM	PHl3 MFC set to  0.000000
10/18/2011	5:40:58 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:40:58 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:40:58 PM	Tube furnace set to 150
10/18/2011	5:41:28 PM	Helium valve closed
10/18/2011	5:41:28 PM	H2 valve closed
10/18/2011	5:41:28 PM	BCl3 valve closed
10/18/2011	5:41:28 PM	PH3 valve closed
10/18/2011	5:41:28 PM	SiCl4 pre valve closed
10/18/2011	5:41:28 PM	SiCl4 post valve closed
10/18/2011	5:41:28 PM	Bypass valve closed
10/18/2011	5:41:28 PM	Bubbler valve closed
10/18/2011	5:41:28 PM	Main Vac valve opened
10/18/2011	5:41:28 PM	Helium MFC set to  0.000000
10/18/2011	5:41:28 PM	H2 MFC set to  0.000000
10/18/2011	5:41:28 PM	BCl3 MFC set to  0.000000
10/18/2011	5:41:28 PM	PHl3 MFC set to  0.000000
10/18/2011	5:41:28 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:41:28 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:41:29 PM	Tube furnace set to 150
10/18/2011	5:41:59 PM	H2 valve closed
10/18/2011	5:41:59 PM	BCl3 valve closed
10/18/2011	5:41:59 PM	PH3 valve closed
10/18/2011	5:41:59 PM	SiCl4 pre valve closed
10/18/2011	5:41:59 PM	SiCl4 post valve closed
10/18/2011	5:41:59 PM	Bypass valve closed
10/18/2011	5:41:59 PM	Bubbler valve closed
10/18/2011	5:41:59 PM	Helium valve opened
10/18/2011	5:41:59 PM	Main Vac valve opened
10/18/2011	5:41:59 PM	Helium MFC set to  20.000000
10/18/2011	5:41:59 PM	H2 MFC set to  0.000000
10/18/2011	5:41:59 PM	BCl3 MFC set to  0.000000
10/18/2011	5:41:59 PM	PHl3 MFC set to  0.000000
10/18/2011	5:41:59 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:41:59 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:41:59 PM	Tube furnace set to 150
10/18/2011	5:42:29 PM	Helium valve closed
10/18/2011	5:42:29 PM	H2 valve closed
10/18/2011	5:42:29 PM	BCl3 valve closed
10/18/2011	5:42:29 PM	PH3 valve closed
10/18/2011	5:42:29 PM	SiCl4 pre valve closed
10/18/2011	5:42:29 PM	SiCl4 post valve closed
10/18/2011	5:42:29 PM	Bypass valve closed
10/18/2011	5:42:29 PM	Bubbler valve closed
10/18/2011	5:42:29 PM	Main Vac valve opened
10/18/2011	5:42:29 PM	Helium MFC set to  0.000000
10/18/2011	5:42:29 PM	H2 MFC set to  0.000000
10/18/2011	5:42:29 PM	BCl3 MFC set to  0.000000
10/18/2011	5:42:29 PM	PHl3 MFC set to  0.000000
10/18/2011	5:42:29 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:42:29 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:42:29 PM	Tube furnace set to 150
10/18/2011	5:42:59 PM	H2 valve closed
10/18/2011	5:42:59 PM	BCl3 valve closed
10/18/2011	5:42:59 PM	PH3 valve closed
10/18/2011	5:42:59 PM	SiCl4 pre valve closed
10/18/2011	5:42:59 PM	SiCl4 post valve closed
10/18/2011	5:42:59 PM	Bypass valve closed
10/18/2011	5:42:59 PM	Bubbler valve closed
10/18/2011	5:42:59 PM	Helium valve opened
10/18/2011	5:42:59 PM	Main Vac valve opened
10/18/2011	5:42:59 PM	Helium MFC set to  20.000000
10/18/2011	5:42:59 PM	H2 MFC set to  0.000000
10/18/2011	5:42:59 PM	BCl3 MFC set to  0.000000
10/18/2011	5:42:59 PM	PHl3 MFC set to  0.000000
10/18/2011	5:42:59 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:42:59 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:42:59 PM	Tube furnace set to 150
10/18/2011	5:43:29 PM	Helium valve closed
10/18/2011	5:43:29 PM	H2 valve closed
10/18/2011	5:43:29 PM	BCl3 valve closed
10/18/2011	5:43:29 PM	PH3 valve closed
10/18/2011	5:43:29 PM	SiCl4 pre valve closed
10/18/2011	5:43:29 PM	SiCl4 post valve closed
10/18/2011	5:43:29 PM	Bypass valve closed
10/18/2011	5:43:29 PM	Bubbler valve closed
10/18/2011	5:43:29 PM	Main Vac valve opened
10/18/2011	5:43:29 PM	Helium MFC set to  0.000000
10/18/2011	5:43:29 PM	H2 MFC set to  0.000000
10/18/2011	5:43:29 PM	BCl3 MFC set to  0.000000
10/18/2011	5:43:29 PM	PHl3 MFC set to  0.000000
10/18/2011	5:43:29 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:43:29 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:43:29 PM	Tube furnace set to 150
10/18/2011	5:43:59 PM	H2 valve closed
10/18/2011	5:43:59 PM	BCl3 valve closed
10/18/2011	5:43:59 PM	PH3 valve closed
10/18/2011	5:43:59 PM	SiCl4 pre valve closed
10/18/2011	5:43:59 PM	SiCl4 post valve closed
10/18/2011	5:43:59 PM	Bypass valve closed
10/18/2011	5:43:59 PM	Bubbler valve closed
10/18/2011	5:43:59 PM	Helium valve opened
10/18/2011	5:43:59 PM	Main Vac valve opened
10/18/2011	5:43:59 PM	Helium MFC set to  20.000000
10/18/2011	5:43:59 PM	H2 MFC set to  0.000000
10/18/2011	5:43:59 PM	BCl3 MFC set to  0.000000
10/18/2011	5:43:59 PM	PHl3 MFC set to  0.000000
10/18/2011	5:43:59 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:43:59 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:44:00 PM	Tube furnace set to 150
10/18/2011	5:44:30 PM	Helium valve closed
10/18/2011	5:44:30 PM	H2 valve closed
10/18/2011	5:44:30 PM	BCl3 valve closed
10/18/2011	5:44:30 PM	PH3 valve closed
10/18/2011	5:44:30 PM	SiCl4 pre valve closed
10/18/2011	5:44:30 PM	SiCl4 post valve closed
10/18/2011	5:44:30 PM	Bypass valve closed
10/18/2011	5:44:30 PM	Bubbler valve closed
10/18/2011	5:44:30 PM	Main Vac valve opened
10/18/2011	5:44:30 PM	Helium MFC set to  0.000000
10/18/2011	5:44:30 PM	H2 MFC set to  0.000000
10/18/2011	5:44:30 PM	BCl3 MFC set to  0.000000
10/18/2011	5:44:30 PM	PHl3 MFC set to  0.000000
10/18/2011	5:44:30 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:44:30 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:44:30 PM	Tube furnace set to 150
10/18/2011	5:45:00 PM	H2 valve closed
10/18/2011	5:45:00 PM	BCl3 valve closed
10/18/2011	5:45:00 PM	PH3 valve closed
10/18/2011	5:45:00 PM	SiCl4 pre valve closed
10/18/2011	5:45:00 PM	SiCl4 post valve closed
10/18/2011	5:45:00 PM	Bypass valve closed
10/18/2011	5:45:00 PM	Bubbler valve closed
10/18/2011	5:45:00 PM	Helium valve opened
10/18/2011	5:45:00 PM	Main Vac valve opened
10/18/2011	5:45:00 PM	Helium MFC set to  20.000000
10/18/2011	5:45:00 PM	H2 MFC set to  0.000000
10/18/2011	5:45:00 PM	BCl3 MFC set to  0.000000
10/18/2011	5:45:00 PM	PHl3 MFC set to  0.000000
10/18/2011	5:45:00 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:45:00 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:45:00 PM	Tube furnace set to 150
10/18/2011	5:45:30 PM	Helium valve closed
10/18/2011	5:45:30 PM	H2 valve closed
10/18/2011	5:45:30 PM	BCl3 valve closed
10/18/2011	5:45:30 PM	PH3 valve closed
10/18/2011	5:45:30 PM	SiCl4 pre valve closed
10/18/2011	5:45:30 PM	SiCl4 post valve closed
10/18/2011	5:45:30 PM	Bypass valve closed
10/18/2011	5:45:30 PM	Bubbler valve closed
10/18/2011	5:45:30 PM	Main Vac valve opened
10/18/2011	5:45:30 PM	Helium MFC set to  0.000000
10/18/2011	5:45:30 PM	H2 MFC set to  0.000000
10/18/2011	5:45:30 PM	BCl3 MFC set to  0.000000
10/18/2011	5:45:30 PM	PHl3 MFC set to  0.000000
10/18/2011	5:45:30 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:45:30 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:45:30 PM	Tube furnace set to 150
10/18/2011	5:46:00 PM	H2 valve closed
10/18/2011	5:46:00 PM	BCl3 valve closed
10/18/2011	5:46:00 PM	PH3 valve closed
10/18/2011	5:46:00 PM	SiCl4 pre valve closed
10/18/2011	5:46:00 PM	SiCl4 post valve closed
10/18/2011	5:46:00 PM	Bypass valve closed
10/18/2011	5:46:00 PM	Bubbler valve closed
10/18/2011	5:46:00 PM	Helium valve opened
10/18/2011	5:46:00 PM	Main Vac valve opened
10/18/2011	5:46:00 PM	Helium MFC set to  20.000000
10/18/2011	5:46:00 PM	H2 MFC set to  0.000000
10/18/2011	5:46:00 PM	BCl3 MFC set to  0.000000
10/18/2011	5:46:00 PM	PHl3 MFC set to  0.000000
10/18/2011	5:46:00 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:46:00 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:46:00 PM	Tube furnace set to 150
10/18/2011	5:46:30 PM	Helium valve closed
10/18/2011	5:46:30 PM	H2 valve closed
10/18/2011	5:46:30 PM	BCl3 valve closed
10/18/2011	5:46:30 PM	PH3 valve closed
10/18/2011	5:46:30 PM	SiCl4 pre valve closed
10/18/2011	5:46:30 PM	SiCl4 post valve closed
10/18/2011	5:46:30 PM	Bypass valve closed
10/18/2011	5:46:30 PM	Bubbler valve closed
10/18/2011	5:46:30 PM	Main Vac valve opened
10/18/2011	5:46:30 PM	Helium MFC set to  0.000000
10/18/2011	5:46:30 PM	H2 MFC set to  0.000000
10/18/2011	5:46:30 PM	BCl3 MFC set to  0.000000
10/18/2011	5:46:30 PM	PHl3 MFC set to  0.000000
10/18/2011	5:46:30 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:46:30 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:46:31 PM	Tube furnace set to 150
10/18/2011	5:47:01 PM	H2 valve closed
10/18/2011	5:47:01 PM	BCl3 valve closed
10/18/2011	5:47:01 PM	PH3 valve closed
10/18/2011	5:47:01 PM	SiCl4 pre valve closed
10/18/2011	5:47:01 PM	SiCl4 post valve closed
10/18/2011	5:47:01 PM	Bypass valve closed
10/18/2011	5:47:01 PM	Bubbler valve closed
10/18/2011	5:47:01 PM	Helium valve opened
10/18/2011	5:47:01 PM	Main Vac valve opened
10/18/2011	5:47:01 PM	Helium MFC set to  20.000000
10/18/2011	5:47:01 PM	H2 MFC set to  0.000000
10/18/2011	5:47:01 PM	BCl3 MFC set to  0.000000
10/18/2011	5:47:01 PM	PHl3 MFC set to  0.000000
10/18/2011	5:47:01 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:47:01 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:47:01 PM	Tube furnace set to 150
10/18/2011	5:47:31 PM	Helium valve closed
10/18/2011	5:47:31 PM	H2 valve closed
10/18/2011	5:47:31 PM	BCl3 valve closed
10/18/2011	5:47:31 PM	PH3 valve closed
10/18/2011	5:47:31 PM	SiCl4 pre valve closed
10/18/2011	5:47:31 PM	SiCl4 post valve closed
10/18/2011	5:47:31 PM	Bypass valve closed
10/18/2011	5:47:31 PM	Bubbler valve closed
10/18/2011	5:47:31 PM	Main Vac valve opened
10/18/2011	5:47:31 PM	Helium MFC set to  0.000000
10/18/2011	5:47:31 PM	H2 MFC set to  0.000000
10/18/2011	5:47:31 PM	BCl3 MFC set to  0.000000
10/18/2011	5:47:31 PM	PHl3 MFC set to  0.000000
10/18/2011	5:47:31 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:47:31 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:47:31 PM	Tube furnace set to 150
10/18/2011	5:48:01 PM	H2 valve closed
10/18/2011	5:48:01 PM	BCl3 valve closed
10/18/2011	5:48:01 PM	PH3 valve closed
10/18/2011	5:48:01 PM	SiCl4 pre valve closed
10/18/2011	5:48:01 PM	SiCl4 post valve closed
10/18/2011	5:48:01 PM	Bypass valve closed
10/18/2011	5:48:01 PM	Bubbler valve closed
10/18/2011	5:48:01 PM	Helium valve opened
10/18/2011	5:48:01 PM	Main Vac valve opened
10/18/2011	5:48:01 PM	Helium MFC set to  20.000000
10/18/2011	5:48:01 PM	H2 MFC set to  0.000000
10/18/2011	5:48:01 PM	BCl3 MFC set to  0.000000
10/18/2011	5:48:01 PM	PHl3 MFC set to  0.000000
10/18/2011	5:48:01 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:48:01 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:48:01 PM	Tube furnace set to 150
10/18/2011	5:48:31 PM	Helium valve closed
10/18/2011	5:48:31 PM	H2 valve closed
10/18/2011	5:48:31 PM	BCl3 valve closed
10/18/2011	5:48:31 PM	PH3 valve closed
10/18/2011	5:48:31 PM	SiCl4 pre valve closed
10/18/2011	5:48:31 PM	SiCl4 post valve closed
10/18/2011	5:48:31 PM	Bypass valve closed
10/18/2011	5:48:31 PM	Bubbler valve closed
10/18/2011	5:48:31 PM	Main Vac valve opened
10/18/2011	5:48:31 PM	Helium MFC set to  0.000000
10/18/2011	5:48:31 PM	H2 MFC set to  0.000000
10/18/2011	5:48:31 PM	BCl3 MFC set to  0.000000
10/18/2011	5:48:31 PM	PHl3 MFC set to  0.000000
10/18/2011	5:48:31 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:48:31 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:48:31 PM	Tube furnace set to 150
10/18/2011	5:49:01 PM	H2 valve closed
10/18/2011	5:49:01 PM	BCl3 valve closed
10/18/2011	5:49:01 PM	PH3 valve closed
10/18/2011	5:49:01 PM	SiCl4 pre valve closed
10/18/2011	5:49:01 PM	SiCl4 post valve closed
10/18/2011	5:49:01 PM	Bypass valve closed
10/18/2011	5:49:01 PM	Bubbler valve closed
10/18/2011	5:49:01 PM	Helium valve opened
10/18/2011	5:49:01 PM	Main Vac valve opened
10/18/2011	5:49:01 PM	Helium MFC set to  20.000000
10/18/2011	5:49:01 PM	H2 MFC set to  0.000000
10/18/2011	5:49:01 PM	BCl3 MFC set to  0.000000
10/18/2011	5:49:01 PM	PHl3 MFC set to  0.000000
10/18/2011	5:49:01 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:49:01 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:49:02 PM	Tube furnace set to 150
10/18/2011	5:49:32 PM	Helium valve closed
10/18/2011	5:49:32 PM	H2 valve closed
10/18/2011	5:49:32 PM	BCl3 valve closed
10/18/2011	5:49:32 PM	PH3 valve closed
10/18/2011	5:49:32 PM	SiCl4 pre valve closed
10/18/2011	5:49:32 PM	SiCl4 post valve closed
10/18/2011	5:49:32 PM	Bypass valve closed
10/18/2011	5:49:32 PM	Bubbler valve closed
10/18/2011	5:49:32 PM	Main Vac valve opened
10/18/2011	5:49:32 PM	Helium MFC set to  0.000000
10/18/2011	5:49:32 PM	H2 MFC set to  0.000000
10/18/2011	5:49:32 PM	BCl3 MFC set to  0.000000
10/18/2011	5:49:32 PM	PHl3 MFC set to  0.000000
10/18/2011	5:49:32 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:49:32 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:49:32 PM	Tube furnace set to 150
10/18/2011	5:50:02 PM	H2 valve closed
10/18/2011	5:50:02 PM	BCl3 valve closed
10/18/2011	5:50:02 PM	PH3 valve closed
10/18/2011	5:50:02 PM	SiCl4 pre valve closed
10/18/2011	5:50:02 PM	SiCl4 post valve closed
10/18/2011	5:50:02 PM	Bypass valve closed
10/18/2011	5:50:02 PM	Bubbler valve closed
10/18/2011	5:50:02 PM	Helium valve opened
10/18/2011	5:50:02 PM	Main Vac valve opened
10/18/2011	5:50:02 PM	Helium MFC set to  20.000000
10/18/2011	5:50:02 PM	H2 MFC set to  0.000000
10/18/2011	5:50:02 PM	BCl3 MFC set to  0.000000
10/18/2011	5:50:02 PM	PHl3 MFC set to  0.000000
10/18/2011	5:50:02 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:50:02 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:50:02 PM	Tube furnace set to 150
10/18/2011	5:50:32 PM	Helium valve closed
10/18/2011	5:50:32 PM	H2 valve closed
10/18/2011	5:50:32 PM	BCl3 valve closed
10/18/2011	5:50:32 PM	PH3 valve closed
10/18/2011	5:50:32 PM	SiCl4 pre valve closed
10/18/2011	5:50:32 PM	SiCl4 post valve closed
10/18/2011	5:50:32 PM	Bypass valve closed
10/18/2011	5:50:32 PM	Bubbler valve closed
10/18/2011	5:50:32 PM	Main Vac valve opened
10/18/2011	5:50:32 PM	Helium MFC set to  0.000000
10/18/2011	5:50:32 PM	H2 MFC set to  0.000000
10/18/2011	5:50:32 PM	BCl3 MFC set to  0.000000
10/18/2011	5:50:32 PM	PHl3 MFC set to  0.000000
10/18/2011	5:50:32 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:50:32 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:50:32 PM	Tube furnace set to 150
10/18/2011	5:50:33 PM	Run finished at 5:50 PM
10/18/2011	5:58:23 PM	Main Vac valve closed
10/18/2011	5:58:29 PM	Main Vac valve opened
10/18/2011	5:59:57 PM	Recipe started at 5:59 PM
10/18/2011	5:59:57 PM	Helium valve closed
10/18/2011	5:59:57 PM	H2 valve closed
10/18/2011	5:59:57 PM	BCl3 valve closed
10/18/2011	5:59:57 PM	PH3 valve closed
10/18/2011	5:59:57 PM	SiCl4 pre valve closed
10/18/2011	5:59:57 PM	SiCl4 post valve closed
10/18/2011	5:59:57 PM	Main Vac valve closed
10/18/2011	5:59:57 PM	Bypass valve closed
10/18/2011	5:59:57 PM	Bubbler valve closed
10/18/2011	5:59:57 PM	Helium MFC set to  0.000000
10/18/2011	5:59:57 PM	H2 MFC set to  0.000000
10/18/2011	5:59:57 PM	BCl3 MFC set to  0.000000
10/18/2011	5:59:57 PM	PHl3 MFC set to  0.000000
10/18/2011	5:59:57 PM	SiCl4 MFC set to  0.000000
10/18/2011	5:59:57 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	5:59:57 PM	Tube furnace set to 0
10/18/2011	6:00:00 PM	Helium valve closed
10/18/2011	6:00:00 PM	BCl3 valve closed
10/18/2011	6:00:00 PM	PH3 valve closed
10/18/2011	6:00:00 PM	SiCl4 pre valve closed
10/18/2011	6:00:00 PM	SiCl4 post valve closed
10/18/2011	6:00:00 PM	Main Vac valve closed
10/18/2011	6:00:00 PM	Bypass valve closed
10/18/2011	6:00:00 PM	Bubbler valve closed
10/18/2011	6:00:00 PM	H2 valve opened
10/18/2011	6:00:00 PM	Helium MFC set to  0.000000
10/18/2011	6:00:00 PM	H2 MFC set to  500.000000
10/18/2011	6:00:00 PM	BCl3 MFC set to  0.000000
10/18/2011	6:00:00 PM	PHl3 MFC set to  0.000000
10/18/2011	6:00:00 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:00:00 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:00:00 PM	Tube furnace set to 0
10/18/2011	6:01:05 PM	Helium valve closed
10/18/2011	6:01:05 PM	BCl3 valve closed
10/18/2011	6:01:05 PM	PH3 valve closed
10/18/2011	6:01:05 PM	SiCl4 pre valve closed
10/18/2011	6:01:05 PM	SiCl4 post valve closed
10/18/2011	6:01:05 PM	Main Vac valve closed
10/18/2011	6:01:05 PM	Bypass valve closed
10/18/2011	6:01:05 PM	H2 valve opened
10/18/2011	6:01:05 PM	Bubbler valve opened
10/18/2011	6:01:05 PM	Helium MFC set to  0.000000
10/18/2011	6:01:05 PM	H2 MFC set to  500.000000
10/18/2011	6:01:05 PM	BCl3 MFC set to  0.000000
10/18/2011	6:01:05 PM	PHl3 MFC set to  0.000000
10/18/2011	6:01:05 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:01:05 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:01:05 PM	Tube furnace set to 0
10/18/2011	6:01:06 PM	Helium valve closed
10/18/2011	6:01:06 PM	BCl3 valve closed
10/18/2011	6:01:06 PM	PH3 valve closed
10/18/2011	6:01:06 PM	SiCl4 pre valve closed
10/18/2011	6:01:06 PM	SiCl4 post valve closed
10/18/2011	6:01:06 PM	Main Vac valve closed
10/18/2011	6:01:06 PM	Bypass valve closed
10/18/2011	6:01:06 PM	H2 valve opened
10/18/2011	6:01:06 PM	Bubbler valve opened
10/18/2011	6:01:06 PM	Helium MFC set to  0.000000
10/18/2011	6:01:06 PM	H2 MFC set to  500.000000
10/18/2011	6:01:06 PM	BCl3 MFC set to  0.000000
10/18/2011	6:01:06 PM	PHl3 MFC set to  0.000000
10/18/2011	6:01:06 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:01:06 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:01:06 PM	Tube furnace set to 1000
10/18/2011	6:21:06 PM	Helium valve closed
10/18/2011	6:21:06 PM	BCl3 valve closed
10/18/2011	6:21:06 PM	PH3 valve closed
10/18/2011	6:21:06 PM	Main Vac valve closed
10/18/2011	6:21:06 PM	Bypass valve closed
10/18/2011	6:21:06 PM	H2 valve opened
10/18/2011	6:21:06 PM	SiCl4 pre valve opened
10/18/2011	6:21:06 PM	SiCl4 post valve opened
10/18/2011	6:21:06 PM	Bubbler valve opened
10/18/2011	6:21:06 PM	Helium MFC set to  0.000000
10/18/2011	6:21:06 PM	H2 MFC set to  500.000000
10/18/2011	6:21:06 PM	BCl3 MFC set to  0.000000
10/18/2011	6:21:06 PM	PHl3 MFC set to  0.000000
10/18/2011	6:21:06 PM	SiCl4 MFC set to  25.000000
10/18/2011	6:21:06 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:21:06 PM	Tube furnace set to 1000
10/18/2011	6:31:06 PM	Helium valve closed
10/18/2011	6:31:06 PM	BCl3 valve closed
10/18/2011	6:31:06 PM	PH3 valve closed
10/18/2011	6:31:06 PM	SiCl4 pre valve closed
10/18/2011	6:31:06 PM	SiCl4 post valve closed
10/18/2011	6:31:06 PM	Main Vac valve closed
10/18/2011	6:31:06 PM	Bypass valve closed
10/18/2011	6:31:06 PM	H2 valve opened
10/18/2011	6:31:06 PM	Bubbler valve opened
10/18/2011	6:31:06 PM	Helium MFC set to  0.000000
10/18/2011	6:31:06 PM	H2 MFC set to  500.000000
10/18/2011	6:31:06 PM	BCl3 MFC set to  0.000000
10/18/2011	6:31:06 PM	PHl3 MFC set to  0.000000
10/18/2011	6:31:06 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:31:06 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:31:07 PM	Tube furnace set to 750
10/18/2011	6:36:07 PM	H2 valve closed
10/18/2011	6:36:07 PM	BCl3 valve closed
10/18/2011	6:36:07 PM	PH3 valve closed
10/18/2011	6:36:07 PM	SiCl4 pre valve closed
10/18/2011	6:36:07 PM	SiCl4 post valve closed
10/18/2011	6:36:07 PM	Main Vac valve closed
10/18/2011	6:36:07 PM	Bypass valve closed
10/18/2011	6:36:07 PM	Helium valve opened
10/18/2011	6:36:07 PM	Bubbler valve opened
10/18/2011	6:36:07 PM	Helium MFC set to  500.000000
10/18/2011	6:36:07 PM	H2 MFC set to  0.000000
10/18/2011	6:36:07 PM	BCl3 MFC set to  0.000000
10/18/2011	6:36:07 PM	PHl3 MFC set to  0.000000
10/18/2011	6:36:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:36:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:36:07 PM	Tube furnace set to 0
10/18/2011	6:56:07 PM	Helium valve closed
10/18/2011	6:56:07 PM	H2 valve closed
10/18/2011	6:56:07 PM	BCl3 valve closed
10/18/2011	6:56:07 PM	PH3 valve closed
10/18/2011	6:56:07 PM	SiCl4 pre valve closed
10/18/2011	6:56:07 PM	SiCl4 post valve closed
10/18/2011	6:56:07 PM	Main Vac valve closed
10/18/2011	6:56:07 PM	Bypass valve closed
10/18/2011	6:56:07 PM	Bubbler valve closed
10/18/2011	6:56:07 PM	Helium MFC set to  0.000000
10/18/2011	6:56:07 PM	H2 MFC set to  0.000000
10/18/2011	6:56:07 PM	BCl3 MFC set to  0.000000
10/18/2011	6:56:07 PM	PHl3 MFC set to  0.000000
10/18/2011	6:56:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	6:56:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	6:56:07 PM	Tube furnace set to 0
10/18/2011	6:56:08 PM	Run finished at 6:56 PM
10/18/2011	7:19:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	7:19:50 PM	Recipe started at 7:19 PM
10/18/2011	7:19:50 PM	Helium valve closed
10/18/2011	7:19:50 PM	H2 valve closed
10/18/2011	7:19:50 PM	BCl3 valve closed
10/18/2011	7:19:50 PM	PH3 valve closed
10/18/2011	7:19:50 PM	SiCl4 pre valve closed
10/18/2011	7:19:50 PM	SiCl4 post valve closed
10/18/2011	7:19:50 PM	Main Vac valve closed
10/18/2011	7:19:50 PM	Bypass valve closed
10/18/2011	7:19:50 PM	Bubbler valve closed
10/18/2011	7:19:50 PM	Helium MFC set to  0.000000
10/18/2011	7:19:50 PM	H2 MFC set to  0.000000
10/18/2011	7:19:50 PM	BCl3 MFC set to  0.000000
10/18/2011	7:19:50 PM	PHl3 MFC set to  0.000000
10/18/2011	7:19:50 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:19:50 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:19:50 PM	Tube furnace set to 0
10/18/2011	7:19:53 PM	H2 valve closed
10/18/2011	7:19:53 PM	BCl3 valve closed
10/18/2011	7:19:53 PM	PH3 valve closed
10/18/2011	7:19:53 PM	SiCl4 pre valve closed
10/18/2011	7:19:53 PM	SiCl4 post valve closed
10/18/2011	7:19:53 PM	Main Vac valve closed
10/18/2011	7:19:53 PM	Bypass valve closed
10/18/2011	7:19:53 PM	Bubbler valve closed
10/18/2011	7:19:53 PM	Helium valve opened
10/18/2011	7:19:53 PM	Helium MFC set to  500.000000
10/18/2011	7:19:53 PM	H2 MFC set to  0.000000
10/18/2011	7:19:53 PM	BCl3 MFC set to  0.000000
10/18/2011	7:19:53 PM	PHl3 MFC set to  0.000000
10/18/2011	7:19:53 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:19:53 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:19:53 PM	Tube furnace set to 0
10/18/2011	7:19:53 PM	Helium valve closed
10/18/2011	7:19:53 PM	H2 valve closed
10/18/2011	7:19:53 PM	BCl3 valve closed
10/18/2011	7:19:53 PM	PH3 valve closed
10/18/2011	7:19:53 PM	SiCl4 pre valve closed
10/18/2011	7:19:53 PM	SiCl4 post valve closed
10/18/2011	7:19:53 PM	Main Vac valve closed
10/18/2011	7:19:53 PM	Bypass valve closed
10/18/2011	7:19:53 PM	Bubbler valve closed
10/18/2011	7:19:53 PM	Helium MFC set to  0.000000
10/18/2011	7:19:53 PM	H2 MFC set to  0.000000
10/18/2011	7:19:53 PM	BCl3 MFC set to  0.000000
10/18/2011	7:19:53 PM	PHl3 MFC set to  0.000000
10/18/2011	7:19:53 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:19:53 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:19:54 PM	Tube furnace set to 0
10/18/2011	7:19:55 PM	Run finished at 7:19 PM
10/18/2011	7:19:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	7:23:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	7:23:21 PM	Recipe started at 7:23 PM
10/18/2011	7:23:21 PM	Helium valve closed
10/18/2011	7:23:21 PM	H2 valve closed
10/18/2011	7:23:21 PM	BCl3 valve closed
10/18/2011	7:23:21 PM	PH3 valve closed
10/18/2011	7:23:21 PM	SiCl4 pre valve closed
10/18/2011	7:23:21 PM	SiCl4 post valve closed
10/18/2011	7:23:21 PM	Main Vac valve closed
10/18/2011	7:23:21 PM	Bubbler valve closed
10/18/2011	7:23:21 PM	Bypass valve opened
10/18/2011	7:23:21 PM	Helium MFC set to  0.000000
10/18/2011	7:23:21 PM	H2 MFC set to  0.000000
10/18/2011	7:23:21 PM	BCl3 MFC set to  0.000000
10/18/2011	7:23:21 PM	PHl3 MFC set to  0.000000
10/18/2011	7:23:21 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:23:21 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:23:21 PM	Tube furnace set to 0
10/18/2011	7:24:27 PM	Helium valve closed
10/18/2011	7:24:27 PM	H2 valve closed
10/18/2011	7:24:27 PM	BCl3 valve closed
10/18/2011	7:24:27 PM	PH3 valve closed
10/18/2011	7:24:27 PM	SiCl4 pre valve closed
10/18/2011	7:24:27 PM	SiCl4 post valve closed
10/18/2011	7:24:27 PM	Main Vac valve closed
10/18/2011	7:24:27 PM	Bubbler valve closed
10/18/2011	7:24:27 PM	Bypass valve opened
10/18/2011	7:24:27 PM	Helium MFC set to  0.000000
10/18/2011	7:24:27 PM	H2 MFC set to  0.000000
10/18/2011	7:24:27 PM	BCl3 MFC set to  0.000000
10/18/2011	7:24:27 PM	PHl3 MFC set to  0.000000
10/18/2011	7:24:27 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:24:27 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:24:27 PM	Tube furnace set to 0
10/18/2011	7:25:27 PM	Helium valve closed
10/18/2011	7:25:27 PM	H2 valve closed
10/18/2011	7:25:27 PM	BCl3 valve closed
10/18/2011	7:25:27 PM	PH3 valve closed
10/18/2011	7:25:27 PM	SiCl4 pre valve closed
10/18/2011	7:25:27 PM	SiCl4 post valve closed
10/18/2011	7:25:27 PM	Bypass valve closed
10/18/2011	7:25:27 PM	Bubbler valve closed
10/18/2011	7:25:27 PM	Main Vac valve opened
10/18/2011	7:25:27 PM	Helium MFC set to  0.000000
10/18/2011	7:25:27 PM	H2 MFC set to  0.000000
10/18/2011	7:25:27 PM	BCl3 MFC set to  0.000000
10/18/2011	7:25:27 PM	PHl3 MFC set to  0.000000
10/18/2011	7:25:27 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:25:27 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:25:27 PM	Tube furnace set to 0
10/18/2011	7:25:28 PM	Run finished at 7:25 PM
10/18/2011	7:25:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	7:26:57 PM	Helium MFC set to  20.000000
10/18/2011	7:27:01 PM	Helium valve opened
10/18/2011	7:31:33 PM	Helium valve closed
10/18/2011	7:31:47 PM	Helium MFC set to  0.000000
10/18/2011	7:51:20 PM	Main Vac valve closed
10/18/2011	7:51:28 PM	Main Vac valve opened
10/18/2011	7:51:39 PM	Recipe started at 7:51 PM
10/18/2011	7:51:39 PM	Helium valve closed
10/18/2011	7:51:39 PM	H2 valve closed
10/18/2011	7:51:40 PM	BCl3 valve closed
10/18/2011	7:51:40 PM	PH3 valve closed
10/18/2011	7:51:40 PM	SiCl4 pre valve closed
10/18/2011	7:51:40 PM	SiCl4 post valve closed
10/18/2011	7:51:40 PM	Bypass valve closed
10/18/2011	7:51:40 PM	Bubbler valve closed
10/18/2011	7:51:40 PM	Main Vac valve opened
10/18/2011	7:51:40 PM	Helium MFC set to  0.000000
10/18/2011	7:51:40 PM	H2 MFC set to  0.000000
10/18/2011	7:51:40 PM	BCl3 MFC set to  0.000000
10/18/2011	7:51:40 PM	PHl3 MFC set to  0.000000
10/18/2011	7:51:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:51:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:51:40 PM	Tube furnace set to 150
10/18/2011	7:52:10 PM	H2 valve closed
10/18/2011	7:52:10 PM	BCl3 valve closed
10/18/2011	7:52:10 PM	PH3 valve closed
10/18/2011	7:52:10 PM	SiCl4 pre valve closed
10/18/2011	7:52:10 PM	SiCl4 post valve closed
10/18/2011	7:52:10 PM	Bypass valve closed
10/18/2011	7:52:10 PM	Bubbler valve closed
10/18/2011	7:52:10 PM	Helium valve opened
10/18/2011	7:52:10 PM	Main Vac valve opened
10/18/2011	7:52:10 PM	Helium MFC set to  20.000000
10/18/2011	7:52:10 PM	H2 MFC set to  0.000000
10/18/2011	7:52:10 PM	BCl3 MFC set to  0.000000
10/18/2011	7:52:10 PM	PHl3 MFC set to  0.000000
10/18/2011	7:52:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:52:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:52:10 PM	Tube furnace set to 150
10/18/2011	7:52:40 PM	Helium valve closed
10/18/2011	7:52:40 PM	H2 valve closed
10/18/2011	7:52:40 PM	BCl3 valve closed
10/18/2011	7:52:40 PM	PH3 valve closed
10/18/2011	7:52:40 PM	SiCl4 pre valve closed
10/18/2011	7:52:40 PM	SiCl4 post valve closed
10/18/2011	7:52:40 PM	Bypass valve closed
10/18/2011	7:52:40 PM	Bubbler valve closed
10/18/2011	7:52:40 PM	Main Vac valve opened
10/18/2011	7:52:40 PM	Helium MFC set to  0.000000
10/18/2011	7:52:40 PM	H2 MFC set to  0.000000
10/18/2011	7:52:40 PM	BCl3 MFC set to  0.000000
10/18/2011	7:52:40 PM	PHl3 MFC set to  0.000000
10/18/2011	7:52:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:52:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:52:40 PM	Tube furnace set to 150
10/18/2011	7:53:10 PM	H2 valve closed
10/18/2011	7:53:10 PM	BCl3 valve closed
10/18/2011	7:53:10 PM	PH3 valve closed
10/18/2011	7:53:10 PM	SiCl4 pre valve closed
10/18/2011	7:53:10 PM	SiCl4 post valve closed
10/18/2011	7:53:10 PM	Bypass valve closed
10/18/2011	7:53:10 PM	Bubbler valve closed
10/18/2011	7:53:10 PM	Helium valve opened
10/18/2011	7:53:10 PM	Main Vac valve opened
10/18/2011	7:53:10 PM	Helium MFC set to  20.000000
10/18/2011	7:53:10 PM	H2 MFC set to  0.000000
10/18/2011	7:53:10 PM	BCl3 MFC set to  0.000000
10/18/2011	7:53:10 PM	PHl3 MFC set to  0.000000
10/18/2011	7:53:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:53:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:53:10 PM	Tube furnace set to 150
10/18/2011	7:53:40 PM	Helium valve closed
10/18/2011	7:53:40 PM	H2 valve closed
10/18/2011	7:53:40 PM	BCl3 valve closed
10/18/2011	7:53:40 PM	PH3 valve closed
10/18/2011	7:53:40 PM	SiCl4 pre valve closed
10/18/2011	7:53:40 PM	SiCl4 post valve closed
10/18/2011	7:53:40 PM	Bypass valve closed
10/18/2011	7:53:40 PM	Bubbler valve closed
10/18/2011	7:53:40 PM	Main Vac valve opened
10/18/2011	7:53:40 PM	Helium MFC set to  0.000000
10/18/2011	7:53:40 PM	H2 MFC set to  0.000000
10/18/2011	7:53:40 PM	BCl3 MFC set to  0.000000
10/18/2011	7:53:40 PM	PHl3 MFC set to  0.000000
10/18/2011	7:53:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:53:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:53:40 PM	Tube furnace set to 150
10/18/2011	7:54:10 PM	H2 valve closed
10/18/2011	7:54:10 PM	BCl3 valve closed
10/18/2011	7:54:10 PM	PH3 valve closed
10/18/2011	7:54:10 PM	SiCl4 pre valve closed
10/18/2011	7:54:10 PM	SiCl4 post valve closed
10/18/2011	7:54:10 PM	Bypass valve closed
10/18/2011	7:54:10 PM	Bubbler valve closed
10/18/2011	7:54:11 PM	Helium valve opened
10/18/2011	7:54:11 PM	Main Vac valve opened
10/18/2011	7:54:11 PM	Helium MFC set to  20.000000
10/18/2011	7:54:11 PM	H2 MFC set to  0.000000
10/18/2011	7:54:11 PM	BCl3 MFC set to  0.000000
10/18/2011	7:54:11 PM	PHl3 MFC set to  0.000000
10/18/2011	7:54:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:54:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:54:11 PM	Tube furnace set to 150
10/18/2011	7:54:41 PM	Helium valve closed
10/18/2011	7:54:41 PM	H2 valve closed
10/18/2011	7:54:41 PM	BCl3 valve closed
10/18/2011	7:54:41 PM	PH3 valve closed
10/18/2011	7:54:41 PM	SiCl4 pre valve closed
10/18/2011	7:54:41 PM	SiCl4 post valve closed
10/18/2011	7:54:41 PM	Bypass valve closed
10/18/2011	7:54:41 PM	Bubbler valve closed
10/18/2011	7:54:41 PM	Main Vac valve opened
10/18/2011	7:54:41 PM	Helium MFC set to  0.000000
10/18/2011	7:54:41 PM	H2 MFC set to  0.000000
10/18/2011	7:54:41 PM	BCl3 MFC set to  0.000000
10/18/2011	7:54:41 PM	PHl3 MFC set to  0.000000
10/18/2011	7:54:41 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:54:41 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:54:41 PM	Tube furnace set to 150
10/18/2011	7:55:11 PM	H2 valve closed
10/18/2011	7:55:11 PM	BCl3 valve closed
10/18/2011	7:55:11 PM	PH3 valve closed
10/18/2011	7:55:11 PM	SiCl4 pre valve closed
10/18/2011	7:55:11 PM	SiCl4 post valve closed
10/18/2011	7:55:11 PM	Bypass valve closed
10/18/2011	7:55:11 PM	Bubbler valve closed
10/18/2011	7:55:11 PM	Helium valve opened
10/18/2011	7:55:11 PM	Main Vac valve opened
10/18/2011	7:55:11 PM	Helium MFC set to  20.000000
10/18/2011	7:55:11 PM	H2 MFC set to  0.000000
10/18/2011	7:55:11 PM	BCl3 MFC set to  0.000000
10/18/2011	7:55:11 PM	PHl3 MFC set to  0.000000
10/18/2011	7:55:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:55:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:55:11 PM	Tube furnace set to 150
10/18/2011	7:55:41 PM	Helium valve closed
10/18/2011	7:55:41 PM	H2 valve closed
10/18/2011	7:55:41 PM	BCl3 valve closed
10/18/2011	7:55:41 PM	PH3 valve closed
10/18/2011	7:55:41 PM	SiCl4 pre valve closed
10/18/2011	7:55:41 PM	SiCl4 post valve closed
10/18/2011	7:55:41 PM	Bypass valve closed
10/18/2011	7:55:41 PM	Bubbler valve closed
10/18/2011	7:55:41 PM	Main Vac valve opened
10/18/2011	7:55:41 PM	Helium MFC set to  0.000000
10/18/2011	7:55:41 PM	H2 MFC set to  0.000000
10/18/2011	7:55:41 PM	BCl3 MFC set to  0.000000
10/18/2011	7:55:41 PM	PHl3 MFC set to  0.000000
10/18/2011	7:55:41 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:55:41 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:55:41 PM	Tube furnace set to 150
10/18/2011	7:56:11 PM	H2 valve closed
10/18/2011	7:56:11 PM	BCl3 valve closed
10/18/2011	7:56:11 PM	PH3 valve closed
10/18/2011	7:56:11 PM	SiCl4 pre valve closed
10/18/2011	7:56:11 PM	SiCl4 post valve closed
10/18/2011	7:56:11 PM	Bypass valve closed
10/18/2011	7:56:11 PM	Bubbler valve closed
10/18/2011	7:56:11 PM	Helium valve opened
10/18/2011	7:56:11 PM	Main Vac valve opened
10/18/2011	7:56:11 PM	Helium MFC set to  20.000000
10/18/2011	7:56:11 PM	H2 MFC set to  0.000000
10/18/2011	7:56:11 PM	BCl3 MFC set to  0.000000
10/18/2011	7:56:11 PM	PHl3 MFC set to  0.000000
10/18/2011	7:56:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:56:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:56:11 PM	Tube furnace set to 150
10/18/2011	7:56:41 PM	Helium valve closed
10/18/2011	7:56:41 PM	H2 valve closed
10/18/2011	7:56:41 PM	BCl3 valve closed
10/18/2011	7:56:41 PM	PH3 valve closed
10/18/2011	7:56:41 PM	SiCl4 pre valve closed
10/18/2011	7:56:41 PM	SiCl4 post valve closed
10/18/2011	7:56:41 PM	Bypass valve closed
10/18/2011	7:56:41 PM	Bubbler valve closed
10/18/2011	7:56:41 PM	Main Vac valve opened
10/18/2011	7:56:41 PM	Helium MFC set to  0.000000
10/18/2011	7:56:41 PM	H2 MFC set to  0.000000
10/18/2011	7:56:41 PM	BCl3 MFC set to  0.000000
10/18/2011	7:56:41 PM	PHl3 MFC set to  0.000000
10/18/2011	7:56:41 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:56:41 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:56:42 PM	Tube furnace set to 150
10/18/2011	7:57:12 PM	H2 valve closed
10/18/2011	7:57:12 PM	BCl3 valve closed
10/18/2011	7:57:12 PM	PH3 valve closed
10/18/2011	7:57:12 PM	SiCl4 pre valve closed
10/18/2011	7:57:12 PM	SiCl4 post valve closed
10/18/2011	7:57:12 PM	Bypass valve closed
10/18/2011	7:57:12 PM	Bubbler valve closed
10/18/2011	7:57:12 PM	Helium valve opened
10/18/2011	7:57:12 PM	Main Vac valve opened
10/18/2011	7:57:12 PM	Helium MFC set to  20.000000
10/18/2011	7:57:12 PM	H2 MFC set to  0.000000
10/18/2011	7:57:12 PM	BCl3 MFC set to  0.000000
10/18/2011	7:57:12 PM	PHl3 MFC set to  0.000000
10/18/2011	7:57:12 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:57:12 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:57:12 PM	Tube furnace set to 150
10/18/2011	7:57:42 PM	Helium valve closed
10/18/2011	7:57:42 PM	H2 valve closed
10/18/2011	7:57:42 PM	BCl3 valve closed
10/18/2011	7:57:42 PM	PH3 valve closed
10/18/2011	7:57:42 PM	SiCl4 pre valve closed
10/18/2011	7:57:42 PM	SiCl4 post valve closed
10/18/2011	7:57:42 PM	Bypass valve closed
10/18/2011	7:57:42 PM	Bubbler valve closed
10/18/2011	7:57:42 PM	Main Vac valve opened
10/18/2011	7:57:42 PM	Helium MFC set to  0.000000
10/18/2011	7:57:42 PM	H2 MFC set to  0.000000
10/18/2011	7:57:42 PM	BCl3 MFC set to  0.000000
10/18/2011	7:57:42 PM	PHl3 MFC set to  0.000000
10/18/2011	7:57:42 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:57:42 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:57:42 PM	Tube furnace set to 150
10/18/2011	7:58:12 PM	H2 valve closed
10/18/2011	7:58:12 PM	BCl3 valve closed
10/18/2011	7:58:12 PM	PH3 valve closed
10/18/2011	7:58:12 PM	SiCl4 pre valve closed
10/18/2011	7:58:12 PM	SiCl4 post valve closed
10/18/2011	7:58:12 PM	Bypass valve closed
10/18/2011	7:58:12 PM	Bubbler valve closed
10/18/2011	7:58:12 PM	Helium valve opened
10/18/2011	7:58:12 PM	Main Vac valve opened
10/18/2011	7:58:12 PM	Helium MFC set to  20.000000
10/18/2011	7:58:12 PM	H2 MFC set to  0.000000
10/18/2011	7:58:12 PM	BCl3 MFC set to  0.000000
10/18/2011	7:58:12 PM	PHl3 MFC set to  0.000000
10/18/2011	7:58:12 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:58:12 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:58:12 PM	Tube furnace set to 150
10/18/2011	7:58:42 PM	Helium valve closed
10/18/2011	7:58:42 PM	H2 valve closed
10/18/2011	7:58:42 PM	BCl3 valve closed
10/18/2011	7:58:42 PM	PH3 valve closed
10/18/2011	7:58:42 PM	SiCl4 pre valve closed
10/18/2011	7:58:42 PM	SiCl4 post valve closed
10/18/2011	7:58:42 PM	Bypass valve closed
10/18/2011	7:58:42 PM	Bubbler valve closed
10/18/2011	7:58:42 PM	Main Vac valve opened
10/18/2011	7:58:42 PM	Helium MFC set to  0.000000
10/18/2011	7:58:42 PM	H2 MFC set to  0.000000
10/18/2011	7:58:42 PM	BCl3 MFC set to  0.000000
10/18/2011	7:58:42 PM	PHl3 MFC set to  0.000000
10/18/2011	7:58:42 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:58:42 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:58:43 PM	Tube furnace set to 150
10/18/2011	7:59:13 PM	H2 valve closed
10/18/2011	7:59:13 PM	BCl3 valve closed
10/18/2011	7:59:13 PM	PH3 valve closed
10/18/2011	7:59:13 PM	SiCl4 pre valve closed
10/18/2011	7:59:13 PM	SiCl4 post valve closed
10/18/2011	7:59:13 PM	Bypass valve closed
10/18/2011	7:59:13 PM	Bubbler valve closed
10/18/2011	7:59:13 PM	Helium valve opened
10/18/2011	7:59:13 PM	Main Vac valve opened
10/18/2011	7:59:13 PM	Helium MFC set to  20.000000
10/18/2011	7:59:13 PM	H2 MFC set to  0.000000
10/18/2011	7:59:13 PM	BCl3 MFC set to  0.000000
10/18/2011	7:59:13 PM	PHl3 MFC set to  0.000000
10/18/2011	7:59:13 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:59:13 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:59:13 PM	Tube furnace set to 150
10/18/2011	7:59:43 PM	Helium valve closed
10/18/2011	7:59:43 PM	H2 valve closed
10/18/2011	7:59:43 PM	BCl3 valve closed
10/18/2011	7:59:43 PM	PH3 valve closed
10/18/2011	7:59:43 PM	SiCl4 pre valve closed
10/18/2011	7:59:43 PM	SiCl4 post valve closed
10/18/2011	7:59:43 PM	Bypass valve closed
10/18/2011	7:59:43 PM	Bubbler valve closed
10/18/2011	7:59:43 PM	Main Vac valve opened
10/18/2011	7:59:43 PM	Helium MFC set to  0.000000
10/18/2011	7:59:43 PM	H2 MFC set to  0.000000
10/18/2011	7:59:43 PM	BCl3 MFC set to  0.000000
10/18/2011	7:59:43 PM	PHl3 MFC set to  0.000000
10/18/2011	7:59:43 PM	SiCl4 MFC set to  0.000000
10/18/2011	7:59:43 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	7:59:43 PM	Tube furnace set to 150
10/18/2011	8:00:13 PM	H2 valve closed
10/18/2011	8:00:13 PM	BCl3 valve closed
10/18/2011	8:00:13 PM	PH3 valve closed
10/18/2011	8:00:13 PM	SiCl4 pre valve closed
10/18/2011	8:00:13 PM	SiCl4 post valve closed
10/18/2011	8:00:13 PM	Bypass valve closed
10/18/2011	8:00:13 PM	Bubbler valve closed
10/18/2011	8:00:13 PM	Helium valve opened
10/18/2011	8:00:13 PM	Main Vac valve opened
10/18/2011	8:00:13 PM	Helium MFC set to  20.000000
10/18/2011	8:00:13 PM	H2 MFC set to  0.000000
10/18/2011	8:00:13 PM	BCl3 MFC set to  0.000000
10/18/2011	8:00:13 PM	PHl3 MFC set to  0.000000
10/18/2011	8:00:13 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:00:13 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:00:13 PM	Tube furnace set to 150
10/18/2011	8:00:43 PM	Helium valve closed
10/18/2011	8:00:43 PM	H2 valve closed
10/18/2011	8:00:43 PM	BCl3 valve closed
10/18/2011	8:00:43 PM	PH3 valve closed
10/18/2011	8:00:43 PM	SiCl4 pre valve closed
10/18/2011	8:00:43 PM	SiCl4 post valve closed
10/18/2011	8:00:43 PM	Bypass valve closed
10/18/2011	8:00:43 PM	Bubbler valve closed
10/18/2011	8:00:43 PM	Main Vac valve opened
10/18/2011	8:00:43 PM	Helium MFC set to  0.000000
10/18/2011	8:00:43 PM	H2 MFC set to  0.000000
10/18/2011	8:00:43 PM	BCl3 MFC set to  0.000000
10/18/2011	8:00:43 PM	PHl3 MFC set to  0.000000
10/18/2011	8:00:43 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:00:43 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:00:43 PM	Tube furnace set to 150
10/18/2011	8:01:13 PM	H2 valve closed
10/18/2011	8:01:13 PM	BCl3 valve closed
10/18/2011	8:01:13 PM	PH3 valve closed
10/18/2011	8:01:13 PM	SiCl4 pre valve closed
10/18/2011	8:01:13 PM	SiCl4 post valve closed
10/18/2011	8:01:13 PM	Bypass valve closed
10/18/2011	8:01:13 PM	Bubbler valve closed
10/18/2011	8:01:13 PM	Helium valve opened
10/18/2011	8:01:13 PM	Main Vac valve opened
10/18/2011	8:01:13 PM	Helium MFC set to  20.000000
10/18/2011	8:01:13 PM	H2 MFC set to  0.000000
10/18/2011	8:01:13 PM	BCl3 MFC set to  0.000000
10/18/2011	8:01:13 PM	PHl3 MFC set to  0.000000
10/18/2011	8:01:13 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:01:13 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:01:14 PM	Tube furnace set to 150
10/18/2011	8:01:44 PM	Helium valve closed
10/18/2011	8:01:44 PM	H2 valve closed
10/18/2011	8:01:44 PM	BCl3 valve closed
10/18/2011	8:01:44 PM	PH3 valve closed
10/18/2011	8:01:44 PM	SiCl4 pre valve closed
10/18/2011	8:01:44 PM	SiCl4 post valve closed
10/18/2011	8:01:44 PM	Bypass valve closed
10/18/2011	8:01:44 PM	Bubbler valve closed
10/18/2011	8:01:44 PM	Main Vac valve opened
10/18/2011	8:01:44 PM	Helium MFC set to  0.000000
10/18/2011	8:01:44 PM	H2 MFC set to  0.000000
10/18/2011	8:01:44 PM	BCl3 MFC set to  0.000000
10/18/2011	8:01:44 PM	PHl3 MFC set to  0.000000
10/18/2011	8:01:44 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:01:44 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:01:44 PM	Tube furnace set to 150
10/18/2011	8:01:45 PM	Run finished at 8:01 PM
10/18/2011	8:15:49 PM	Main Vac valve closed
10/18/2011	8:15:57 PM	Main Vac valve opened
10/18/2011	8:17:48 PM	Recipe started at 8:17 PM
10/18/2011	8:17:48 PM	Helium valve closed
10/18/2011	8:17:48 PM	H2 valve closed
10/18/2011	8:17:48 PM	BCl3 valve closed
10/18/2011	8:17:48 PM	PH3 valve closed
10/18/2011	8:17:48 PM	SiCl4 pre valve closed
10/18/2011	8:17:48 PM	SiCl4 post valve closed
10/18/2011	8:17:48 PM	Main Vac valve closed
10/18/2011	8:17:48 PM	Bypass valve closed
10/18/2011	8:17:48 PM	Bubbler valve closed
10/18/2011	8:17:48 PM	Helium MFC set to  0.000000
10/18/2011	8:17:48 PM	H2 MFC set to  0.000000
10/18/2011	8:17:48 PM	BCl3 MFC set to  0.000000
10/18/2011	8:17:48 PM	PHl3 MFC set to  0.000000
10/18/2011	8:17:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:17:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:17:48 PM	Tube furnace set to 0
10/18/2011	8:17:51 PM	Helium valve closed
10/18/2011	8:17:51 PM	BCl3 valve closed
10/18/2011	8:17:51 PM	PH3 valve closed
10/18/2011	8:17:51 PM	SiCl4 pre valve closed
10/18/2011	8:17:51 PM	SiCl4 post valve closed
10/18/2011	8:17:51 PM	Main Vac valve closed
10/18/2011	8:17:51 PM	Bypass valve closed
10/18/2011	8:17:51 PM	Bubbler valve closed
10/18/2011	8:17:51 PM	H2 valve opened
10/18/2011	8:17:51 PM	Helium MFC set to  0.000000
10/18/2011	8:17:51 PM	H2 MFC set to  500.000000
10/18/2011	8:17:51 PM	BCl3 MFC set to  0.000000
10/18/2011	8:17:51 PM	PHl3 MFC set to  0.000000
10/18/2011	8:17:51 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:17:51 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:17:51 PM	Tube furnace set to 0
10/18/2011	8:18:55 PM	Helium valve closed
10/18/2011	8:18:55 PM	BCl3 valve closed
10/18/2011	8:18:55 PM	PH3 valve closed
10/18/2011	8:18:55 PM	SiCl4 pre valve closed
10/18/2011	8:18:55 PM	SiCl4 post valve closed
10/18/2011	8:18:55 PM	Main Vac valve closed
10/18/2011	8:18:55 PM	Bypass valve closed
10/18/2011	8:18:55 PM	H2 valve opened
10/18/2011	8:18:55 PM	Bubbler valve opened
10/18/2011	8:18:55 PM	Helium MFC set to  0.000000
10/18/2011	8:18:55 PM	H2 MFC set to  500.000000
10/18/2011	8:18:55 PM	BCl3 MFC set to  0.000000
10/18/2011	8:18:55 PM	PHl3 MFC set to  0.000000
10/18/2011	8:18:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:18:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:18:55 PM	Tube furnace set to 0
10/18/2011	8:18:56 PM	Helium valve closed
10/18/2011	8:18:56 PM	BCl3 valve closed
10/18/2011	8:18:56 PM	PH3 valve closed
10/18/2011	8:18:56 PM	SiCl4 pre valve closed
10/18/2011	8:18:56 PM	SiCl4 post valve closed
10/18/2011	8:18:56 PM	Main Vac valve closed
10/18/2011	8:18:56 PM	Bypass valve closed
10/18/2011	8:18:56 PM	H2 valve opened
10/18/2011	8:18:56 PM	Bubbler valve opened
10/18/2011	8:18:56 PM	Helium MFC set to  0.000000
10/18/2011	8:18:56 PM	H2 MFC set to  500.000000
10/18/2011	8:18:56 PM	BCl3 MFC set to  0.000000
10/18/2011	8:18:56 PM	PHl3 MFC set to  0.000000
10/18/2011	8:18:56 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:18:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:18:56 PM	Tube furnace set to 1000
10/18/2011	8:38:56 PM	Helium valve closed
10/18/2011	8:38:56 PM	BCl3 valve closed
10/18/2011	8:38:56 PM	PH3 valve closed
10/18/2011	8:38:56 PM	Main Vac valve closed
10/18/2011	8:38:56 PM	Bypass valve closed
10/18/2011	8:38:56 PM	H2 valve opened
10/18/2011	8:38:56 PM	SiCl4 pre valve opened
10/18/2011	8:38:56 PM	SiCl4 post valve opened
10/18/2011	8:38:56 PM	Bubbler valve opened
10/18/2011	8:38:56 PM	Helium MFC set to  0.000000
10/18/2011	8:38:56 PM	H2 MFC set to  500.000000
10/18/2011	8:38:56 PM	BCl3 MFC set to  0.000000
10/18/2011	8:38:56 PM	PHl3 MFC set to  0.000000
10/18/2011	8:38:56 PM	SiCl4 MFC set to  35.000000
10/18/2011	8:38:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:38:56 PM	Tube furnace set to 1000
10/18/2011	8:50:11 PM	Helium valve closed
10/18/2011	8:50:11 PM	BCl3 valve closed
10/18/2011	8:50:11 PM	PH3 valve closed
10/18/2011	8:50:11 PM	SiCl4 pre valve closed
10/18/2011	8:50:11 PM	SiCl4 post valve closed
10/18/2011	8:50:11 PM	Main Vac valve closed
10/18/2011	8:50:11 PM	Bypass valve closed
10/18/2011	8:50:11 PM	H2 valve opened
10/18/2011	8:50:11 PM	Bubbler valve opened
10/18/2011	8:50:11 PM	Helium MFC set to  0.000000
10/18/2011	8:50:11 PM	H2 MFC set to  500.000000
10/18/2011	8:50:11 PM	BCl3 MFC set to  0.000000
10/18/2011	8:50:11 PM	PHl3 MFC set to  0.000000
10/18/2011	8:50:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:50:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:50:11 PM	Tube furnace set to 750
10/18/2011	8:55:11 PM	H2 valve closed
10/18/2011	8:55:11 PM	BCl3 valve closed
10/18/2011	8:55:11 PM	PH3 valve closed
10/18/2011	8:55:11 PM	SiCl4 pre valve closed
10/18/2011	8:55:11 PM	SiCl4 post valve closed
10/18/2011	8:55:11 PM	Main Vac valve closed
10/18/2011	8:55:11 PM	Bypass valve closed
10/18/2011	8:55:11 PM	Helium valve opened
10/18/2011	8:55:11 PM	Bubbler valve opened
10/18/2011	8:55:11 PM	Helium MFC set to  500.000000
10/18/2011	8:55:11 PM	H2 MFC set to  0.000000
10/18/2011	8:55:11 PM	BCl3 MFC set to  0.000000
10/18/2011	8:55:11 PM	PHl3 MFC set to  0.000000
10/18/2011	8:55:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	8:55:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	8:55:11 PM	Tube furnace set to 0
10/18/2011	9:00:52 PM	Run aborted at 9:00 PM
10/18/2011	9:00:52 PM	Helium valve closed
10/18/2011	9:00:52 PM	H2 valve closed
10/18/2011	9:00:52 PM	BCl3 valve closed
10/18/2011	9:00:52 PM	PH3 valve closed
10/18/2011	9:00:52 PM	SiCl4 pre valve closed
10/18/2011	9:00:52 PM	SiCl4 post valve closed
10/18/2011	9:00:52 PM	Bypass valve closed
10/18/2011	9:00:52 PM	Main Vac valve closed
10/18/2011	9:00:52 PM	Bubbler valve closed
10/18/2011	9:00:52 PM	Helium MFC set to  0.000000
10/18/2011	9:00:52 PM	H2 MFC set to  0.000000
10/18/2011	9:00:52 PM	BCl3 MFC set to  0.000000
10/18/2011	9:00:52 PM	PHl3 MFC set to  0.000000
10/18/2011	9:00:52 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:00:52 PM	Tube furnace set to 0
10/18/2011	9:00:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	9:00:55 PM	Recipe started at 9:00 PM
10/18/2011	9:00:55 PM	Helium valve closed
10/18/2011	9:00:55 PM	H2 valve closed
10/18/2011	9:00:55 PM	BCl3 valve closed
10/18/2011	9:00:55 PM	PH3 valve closed
10/18/2011	9:00:55 PM	SiCl4 pre valve closed
10/18/2011	9:00:55 PM	SiCl4 post valve closed
10/18/2011	9:00:55 PM	Main Vac valve closed
10/18/2011	9:00:55 PM	Bypass valve closed
10/18/2011	9:00:55 PM	Bubbler valve closed
10/18/2011	9:00:55 PM	Helium MFC set to  0.000000
10/18/2011	9:00:55 PM	H2 MFC set to  0.000000
10/18/2011	9:00:55 PM	BCl3 MFC set to  0.000000
10/18/2011	9:00:55 PM	PHl3 MFC set to  0.000000
10/18/2011	9:00:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:00:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:00:55 PM	Tube furnace set to 0
10/18/2011	9:00:58 PM	H2 valve closed
10/18/2011	9:00:58 PM	BCl3 valve closed
10/18/2011	9:00:58 PM	PH3 valve closed
10/18/2011	9:00:58 PM	SiCl4 pre valve closed
10/18/2011	9:00:58 PM	SiCl4 post valve closed
10/18/2011	9:00:58 PM	Main Vac valve closed
10/18/2011	9:00:58 PM	Bypass valve closed
10/18/2011	9:00:58 PM	Bubbler valve closed
10/18/2011	9:00:58 PM	Helium valve opened
10/18/2011	9:00:58 PM	Helium MFC set to  500.000000
10/18/2011	9:00:58 PM	H2 MFC set to  0.000000
10/18/2011	9:00:58 PM	BCl3 MFC set to  0.000000
10/18/2011	9:00:58 PM	PHl3 MFC set to  0.000000
10/18/2011	9:00:58 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:00:58 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:00:58 PM	Tube furnace set to 0
10/18/2011	9:00:59 PM	Helium valve closed
10/18/2011	9:00:59 PM	H2 valve closed
10/18/2011	9:00:59 PM	BCl3 valve closed
10/18/2011	9:00:59 PM	PH3 valve closed
10/18/2011	9:00:59 PM	SiCl4 pre valve closed
10/18/2011	9:00:59 PM	SiCl4 post valve closed
10/18/2011	9:00:59 PM	Main Vac valve closed
10/18/2011	9:00:59 PM	Bypass valve closed
10/18/2011	9:00:59 PM	Bubbler valve closed
10/18/2011	9:00:59 PM	Helium MFC set to  0.000000
10/18/2011	9:00:59 PM	H2 MFC set to  0.000000
10/18/2011	9:00:59 PM	BCl3 MFC set to  0.000000
10/18/2011	9:00:59 PM	PHl3 MFC set to  0.000000
10/18/2011	9:00:59 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:00:59 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:00:59 PM	Tube furnace set to 0
10/18/2011	9:01:00 PM	Run finished at 9:01 PM
10/18/2011	9:01:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/18/2011	9:05:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	9:05:25 PM	Recipe started at 9:05 PM
10/18/2011	9:05:25 PM	Helium valve closed
10/18/2011	9:05:25 PM	H2 valve closed
10/18/2011	9:05:25 PM	BCl3 valve closed
10/18/2011	9:05:25 PM	PH3 valve closed
10/18/2011	9:05:25 PM	SiCl4 pre valve closed
10/18/2011	9:05:25 PM	SiCl4 post valve closed
10/18/2011	9:05:25 PM	Main Vac valve closed
10/18/2011	9:05:25 PM	Bubbler valve closed
10/18/2011	9:05:25 PM	Bypass valve opened
10/18/2011	9:05:25 PM	Helium MFC set to  0.000000
10/18/2011	9:05:25 PM	H2 MFC set to  0.000000
10/18/2011	9:05:25 PM	BCl3 MFC set to  0.000000
10/18/2011	9:05:25 PM	PHl3 MFC set to  0.000000
10/18/2011	9:05:25 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:05:25 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:05:25 PM	Tube furnace set to 0
10/18/2011	9:06:24 PM	Helium valve closed
10/18/2011	9:06:24 PM	H2 valve closed
10/18/2011	9:06:24 PM	BCl3 valve closed
10/18/2011	9:06:24 PM	PH3 valve closed
10/18/2011	9:06:24 PM	SiCl4 pre valve closed
10/18/2011	9:06:24 PM	SiCl4 post valve closed
10/18/2011	9:06:24 PM	Main Vac valve closed
10/18/2011	9:06:24 PM	Bubbler valve closed
10/18/2011	9:06:24 PM	Bypass valve opened
10/18/2011	9:06:24 PM	Helium MFC set to  0.000000
10/18/2011	9:06:24 PM	H2 MFC set to  0.000000
10/18/2011	9:06:24 PM	BCl3 MFC set to  0.000000
10/18/2011	9:06:24 PM	PHl3 MFC set to  0.000000
10/18/2011	9:06:24 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:06:24 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:06:24 PM	Tube furnace set to 0
10/18/2011	9:07:24 PM	Helium valve closed
10/18/2011	9:07:24 PM	H2 valve closed
10/18/2011	9:07:24 PM	BCl3 valve closed
10/18/2011	9:07:24 PM	PH3 valve closed
10/18/2011	9:07:24 PM	SiCl4 pre valve closed
10/18/2011	9:07:24 PM	SiCl4 post valve closed
10/18/2011	9:07:24 PM	Bypass valve closed
10/18/2011	9:07:24 PM	Bubbler valve closed
10/18/2011	9:07:24 PM	Main Vac valve opened
10/18/2011	9:07:24 PM	Helium MFC set to  0.000000
10/18/2011	9:07:24 PM	H2 MFC set to  0.000000
10/18/2011	9:07:24 PM	BCl3 MFC set to  0.000000
10/18/2011	9:07:24 PM	PHl3 MFC set to  0.000000
10/18/2011	9:07:24 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:07:24 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:07:25 PM	Tube furnace set to 0
10/18/2011	9:07:26 PM	Run finished at 9:07 PM
10/18/2011	9:07:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	9:20:23 PM	Recipe started at 9:20 PM
10/18/2011	9:20:23 PM	Helium valve closed
10/18/2011	9:20:23 PM	H2 valve closed
10/18/2011	9:20:23 PM	BCl3 valve closed
10/18/2011	9:20:23 PM	PH3 valve closed
10/18/2011	9:20:23 PM	SiCl4 pre valve closed
10/18/2011	9:20:23 PM	SiCl4 post valve closed
10/18/2011	9:20:23 PM	Bypass valve closed
10/18/2011	9:20:23 PM	Bubbler valve closed
10/18/2011	9:20:23 PM	Main Vac valve opened
10/18/2011	9:20:23 PM	Helium MFC set to  0.000000
10/18/2011	9:20:23 PM	H2 MFC set to  0.000000
10/18/2011	9:20:23 PM	BCl3 MFC set to  0.000000
10/18/2011	9:20:23 PM	PHl3 MFC set to  0.000000
10/18/2011	9:20:23 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:20:23 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:20:23 PM	Tube furnace set to 150
10/18/2011	9:20:53 PM	H2 valve closed
10/18/2011	9:20:53 PM	BCl3 valve closed
10/18/2011	9:20:53 PM	PH3 valve closed
10/18/2011	9:20:53 PM	SiCl4 pre valve closed
10/18/2011	9:20:53 PM	SiCl4 post valve closed
10/18/2011	9:20:53 PM	Bypass valve closed
10/18/2011	9:20:53 PM	Bubbler valve closed
10/18/2011	9:20:53 PM	Helium valve opened
10/18/2011	9:20:53 PM	Main Vac valve opened
10/18/2011	9:20:53 PM	Helium MFC set to  20.000000
10/18/2011	9:20:53 PM	H2 MFC set to  0.000000
10/18/2011	9:20:53 PM	BCl3 MFC set to  0.000000
10/18/2011	9:20:53 PM	PHl3 MFC set to  0.000000
10/18/2011	9:20:53 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:20:53 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:20:53 PM	Tube furnace set to 150
10/18/2011	9:21:23 PM	Helium valve closed
10/18/2011	9:21:23 PM	H2 valve closed
10/18/2011	9:21:23 PM	BCl3 valve closed
10/18/2011	9:21:23 PM	PH3 valve closed
10/18/2011	9:21:23 PM	SiCl4 pre valve closed
10/18/2011	9:21:23 PM	SiCl4 post valve closed
10/18/2011	9:21:23 PM	Bypass valve closed
10/18/2011	9:21:23 PM	Bubbler valve closed
10/18/2011	9:21:23 PM	Main Vac valve opened
10/18/2011	9:21:23 PM	Helium MFC set to  0.000000
10/18/2011	9:21:23 PM	H2 MFC set to  0.000000
10/18/2011	9:21:23 PM	BCl3 MFC set to  0.000000
10/18/2011	9:21:23 PM	PHl3 MFC set to  0.000000
10/18/2011	9:21:23 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:21:23 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:21:24 PM	Tube furnace set to 150
10/18/2011	9:21:54 PM	H2 valve closed
10/18/2011	9:21:54 PM	BCl3 valve closed
10/18/2011	9:21:54 PM	PH3 valve closed
10/18/2011	9:21:54 PM	SiCl4 pre valve closed
10/18/2011	9:21:54 PM	SiCl4 post valve closed
10/18/2011	9:21:54 PM	Bypass valve closed
10/18/2011	9:21:54 PM	Bubbler valve closed
10/18/2011	9:21:54 PM	Helium valve opened
10/18/2011	9:21:54 PM	Main Vac valve opened
10/18/2011	9:21:54 PM	Helium MFC set to  20.000000
10/18/2011	9:21:54 PM	H2 MFC set to  0.000000
10/18/2011	9:21:54 PM	BCl3 MFC set to  0.000000
10/18/2011	9:21:54 PM	PHl3 MFC set to  0.000000
10/18/2011	9:21:54 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:21:54 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:21:54 PM	Tube furnace set to 150
10/18/2011	9:22:24 PM	Helium valve closed
10/18/2011	9:22:24 PM	H2 valve closed
10/18/2011	9:22:24 PM	BCl3 valve closed
10/18/2011	9:22:24 PM	PH3 valve closed
10/18/2011	9:22:24 PM	SiCl4 pre valve closed
10/18/2011	9:22:24 PM	SiCl4 post valve closed
10/18/2011	9:22:24 PM	Bypass valve closed
10/18/2011	9:22:24 PM	Bubbler valve closed
10/18/2011	9:22:24 PM	Main Vac valve opened
10/18/2011	9:22:24 PM	Helium MFC set to  0.000000
10/18/2011	9:22:24 PM	H2 MFC set to  0.000000
10/18/2011	9:22:24 PM	BCl3 MFC set to  0.000000
10/18/2011	9:22:24 PM	PHl3 MFC set to  0.000000
10/18/2011	9:22:24 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:22:24 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:22:24 PM	Tube furnace set to 150
10/18/2011	9:22:54 PM	H2 valve closed
10/18/2011	9:22:54 PM	BCl3 valve closed
10/18/2011	9:22:54 PM	PH3 valve closed
10/18/2011	9:22:54 PM	SiCl4 pre valve closed
10/18/2011	9:22:54 PM	SiCl4 post valve closed
10/18/2011	9:22:54 PM	Bypass valve closed
10/18/2011	9:22:54 PM	Bubbler valve closed
10/18/2011	9:22:54 PM	Helium valve opened
10/18/2011	9:22:54 PM	Main Vac valve opened
10/18/2011	9:22:54 PM	Helium MFC set to  20.000000
10/18/2011	9:22:54 PM	H2 MFC set to  0.000000
10/18/2011	9:22:54 PM	BCl3 MFC set to  0.000000
10/18/2011	9:22:54 PM	PHl3 MFC set to  0.000000
10/18/2011	9:22:54 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:22:54 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:22:54 PM	Tube furnace set to 150
10/18/2011	9:23:24 PM	Helium valve closed
10/18/2011	9:23:24 PM	H2 valve closed
10/18/2011	9:23:24 PM	BCl3 valve closed
10/18/2011	9:23:24 PM	PH3 valve closed
10/18/2011	9:23:24 PM	SiCl4 pre valve closed
10/18/2011	9:23:24 PM	SiCl4 post valve closed
10/18/2011	9:23:24 PM	Bypass valve closed
10/18/2011	9:23:24 PM	Bubbler valve closed
10/18/2011	9:23:24 PM	Main Vac valve opened
10/18/2011	9:23:24 PM	Helium MFC set to  0.000000
10/18/2011	9:23:24 PM	H2 MFC set to  0.000000
10/18/2011	9:23:24 PM	BCl3 MFC set to  0.000000
10/18/2011	9:23:24 PM	PHl3 MFC set to  0.000000
10/18/2011	9:23:24 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:23:24 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:23:24 PM	Tube furnace set to 150
10/18/2011	9:23:54 PM	H2 valve closed
10/18/2011	9:23:54 PM	BCl3 valve closed
10/18/2011	9:23:54 PM	PH3 valve closed
10/18/2011	9:23:54 PM	SiCl4 pre valve closed
10/18/2011	9:23:54 PM	SiCl4 post valve closed
10/18/2011	9:23:54 PM	Bypass valve closed
10/18/2011	9:23:54 PM	Bubbler valve closed
10/18/2011	9:23:54 PM	Helium valve opened
10/18/2011	9:23:54 PM	Main Vac valve opened
10/18/2011	9:23:54 PM	Helium MFC set to  20.000000
10/18/2011	9:23:54 PM	H2 MFC set to  0.000000
10/18/2011	9:23:54 PM	BCl3 MFC set to  0.000000
10/18/2011	9:23:54 PM	PHl3 MFC set to  0.000000
10/18/2011	9:23:54 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:23:54 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:23:55 PM	Tube furnace set to 150
10/18/2011	9:24:25 PM	Helium valve closed
10/18/2011	9:24:25 PM	H2 valve closed
10/18/2011	9:24:25 PM	BCl3 valve closed
10/18/2011	9:24:25 PM	PH3 valve closed
10/18/2011	9:24:25 PM	SiCl4 pre valve closed
10/18/2011	9:24:25 PM	SiCl4 post valve closed
10/18/2011	9:24:25 PM	Bypass valve closed
10/18/2011	9:24:25 PM	Bubbler valve closed
10/18/2011	9:24:25 PM	Main Vac valve opened
10/18/2011	9:24:25 PM	Helium MFC set to  0.000000
10/18/2011	9:24:25 PM	H2 MFC set to  0.000000
10/18/2011	9:24:25 PM	BCl3 MFC set to  0.000000
10/18/2011	9:24:25 PM	PHl3 MFC set to  0.000000
10/18/2011	9:24:25 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:24:25 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:24:25 PM	Tube furnace set to 150
10/18/2011	9:24:55 PM	H2 valve closed
10/18/2011	9:24:55 PM	BCl3 valve closed
10/18/2011	9:24:55 PM	PH3 valve closed
10/18/2011	9:24:55 PM	SiCl4 pre valve closed
10/18/2011	9:24:55 PM	SiCl4 post valve closed
10/18/2011	9:24:55 PM	Bypass valve closed
10/18/2011	9:24:55 PM	Bubbler valve closed
10/18/2011	9:24:55 PM	Helium valve opened
10/18/2011	9:24:55 PM	Main Vac valve opened
10/18/2011	9:24:55 PM	Helium MFC set to  20.000000
10/18/2011	9:24:55 PM	H2 MFC set to  0.000000
10/18/2011	9:24:55 PM	BCl3 MFC set to  0.000000
10/18/2011	9:24:55 PM	PHl3 MFC set to  0.000000
10/18/2011	9:24:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:24:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:24:55 PM	Tube furnace set to 150
10/18/2011	9:25:25 PM	Helium valve closed
10/18/2011	9:25:25 PM	H2 valve closed
10/18/2011	9:25:25 PM	BCl3 valve closed
10/18/2011	9:25:25 PM	PH3 valve closed
10/18/2011	9:25:25 PM	SiCl4 pre valve closed
10/18/2011	9:25:25 PM	SiCl4 post valve closed
10/18/2011	9:25:25 PM	Bypass valve closed
10/18/2011	9:25:25 PM	Bubbler valve closed
10/18/2011	9:25:25 PM	Main Vac valve opened
10/18/2011	9:25:25 PM	Helium MFC set to  0.000000
10/18/2011	9:25:25 PM	H2 MFC set to  0.000000
10/18/2011	9:25:25 PM	BCl3 MFC set to  0.000000
10/18/2011	9:25:25 PM	PHl3 MFC set to  0.000000
10/18/2011	9:25:25 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:25:25 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:25:25 PM	Tube furnace set to 150
10/18/2011	9:25:55 PM	H2 valve closed
10/18/2011	9:25:55 PM	BCl3 valve closed
10/18/2011	9:25:55 PM	PH3 valve closed
10/18/2011	9:25:55 PM	SiCl4 pre valve closed
10/18/2011	9:25:55 PM	SiCl4 post valve closed
10/18/2011	9:25:55 PM	Bypass valve closed
10/18/2011	9:25:55 PM	Bubbler valve closed
10/18/2011	9:25:55 PM	Helium valve opened
10/18/2011	9:25:55 PM	Main Vac valve opened
10/18/2011	9:25:55 PM	Helium MFC set to  20.000000
10/18/2011	9:25:55 PM	H2 MFC set to  0.000000
10/18/2011	9:25:55 PM	BCl3 MFC set to  0.000000
10/18/2011	9:25:55 PM	PHl3 MFC set to  0.000000
10/18/2011	9:25:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:25:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:25:55 PM	Tube furnace set to 150
10/18/2011	9:26:25 PM	Helium valve closed
10/18/2011	9:26:25 PM	H2 valve closed
10/18/2011	9:26:25 PM	BCl3 valve closed
10/18/2011	9:26:25 PM	PH3 valve closed
10/18/2011	9:26:25 PM	SiCl4 pre valve closed
10/18/2011	9:26:25 PM	SiCl4 post valve closed
10/18/2011	9:26:25 PM	Bypass valve closed
10/18/2011	9:26:25 PM	Bubbler valve closed
10/18/2011	9:26:25 PM	Main Vac valve opened
10/18/2011	9:26:25 PM	Helium MFC set to  0.000000
10/18/2011	9:26:25 PM	H2 MFC set to  0.000000
10/18/2011	9:26:25 PM	BCl3 MFC set to  0.000000
10/18/2011	9:26:25 PM	PHl3 MFC set to  0.000000
10/18/2011	9:26:25 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:26:25 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:26:26 PM	Tube furnace set to 150
10/18/2011	9:26:56 PM	H2 valve closed
10/18/2011	9:26:56 PM	BCl3 valve closed
10/18/2011	9:26:56 PM	PH3 valve closed
10/18/2011	9:26:56 PM	SiCl4 pre valve closed
10/18/2011	9:26:56 PM	SiCl4 post valve closed
10/18/2011	9:26:56 PM	Bypass valve closed
10/18/2011	9:26:56 PM	Bubbler valve closed
10/18/2011	9:26:56 PM	Helium valve opened
10/18/2011	9:26:56 PM	Main Vac valve opened
10/18/2011	9:26:56 PM	Helium MFC set to  20.000000
10/18/2011	9:26:56 PM	H2 MFC set to  0.000000
10/18/2011	9:26:56 PM	BCl3 MFC set to  0.000000
10/18/2011	9:26:56 PM	PHl3 MFC set to  0.000000
10/18/2011	9:26:56 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:26:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:26:56 PM	Tube furnace set to 150
10/18/2011	9:27:26 PM	Helium valve closed
10/18/2011	9:27:26 PM	H2 valve closed
10/18/2011	9:27:26 PM	BCl3 valve closed
10/18/2011	9:27:26 PM	PH3 valve closed
10/18/2011	9:27:26 PM	SiCl4 pre valve closed
10/18/2011	9:27:26 PM	SiCl4 post valve closed
10/18/2011	9:27:26 PM	Bypass valve closed
10/18/2011	9:27:26 PM	Bubbler valve closed
10/18/2011	9:27:26 PM	Main Vac valve opened
10/18/2011	9:27:26 PM	Helium MFC set to  0.000000
10/18/2011	9:27:26 PM	H2 MFC set to  0.000000
10/18/2011	9:27:26 PM	BCl3 MFC set to  0.000000
10/18/2011	9:27:26 PM	PHl3 MFC set to  0.000000
10/18/2011	9:27:26 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:27:26 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:27:26 PM	Tube furnace set to 150
10/18/2011	9:27:56 PM	H2 valve closed
10/18/2011	9:27:56 PM	BCl3 valve closed
10/18/2011	9:27:56 PM	PH3 valve closed
10/18/2011	9:27:56 PM	SiCl4 pre valve closed
10/18/2011	9:27:56 PM	SiCl4 post valve closed
10/18/2011	9:27:56 PM	Bypass valve closed
10/18/2011	9:27:56 PM	Bubbler valve closed
10/18/2011	9:27:56 PM	Helium valve opened
10/18/2011	9:27:56 PM	Main Vac valve opened
10/18/2011	9:27:56 PM	Helium MFC set to  20.000000
10/18/2011	9:27:56 PM	H2 MFC set to  0.000000
10/18/2011	9:27:56 PM	BCl3 MFC set to  0.000000
10/18/2011	9:27:56 PM	PHl3 MFC set to  0.000000
10/18/2011	9:27:56 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:27:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:27:56 PM	Tube furnace set to 150
10/18/2011	9:28:26 PM	Helium valve closed
10/18/2011	9:28:26 PM	H2 valve closed
10/18/2011	9:28:26 PM	BCl3 valve closed
10/18/2011	9:28:26 PM	PH3 valve closed
10/18/2011	9:28:26 PM	SiCl4 pre valve closed
10/18/2011	9:28:26 PM	SiCl4 post valve closed
10/18/2011	9:28:26 PM	Bypass valve closed
10/18/2011	9:28:26 PM	Bubbler valve closed
10/18/2011	9:28:26 PM	Main Vac valve opened
10/18/2011	9:28:26 PM	Helium MFC set to  0.000000
10/18/2011	9:28:26 PM	H2 MFC set to  0.000000
10/18/2011	9:28:26 PM	BCl3 MFC set to  0.000000
10/18/2011	9:28:26 PM	PHl3 MFC set to  0.000000
10/18/2011	9:28:26 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:28:26 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:28:26 PM	Tube furnace set to 150
10/18/2011	9:28:56 PM	H2 valve closed
10/18/2011	9:28:56 PM	BCl3 valve closed
10/18/2011	9:28:56 PM	PH3 valve closed
10/18/2011	9:28:56 PM	SiCl4 pre valve closed
10/18/2011	9:28:56 PM	SiCl4 post valve closed
10/18/2011	9:28:56 PM	Bypass valve closed
10/18/2011	9:28:56 PM	Bubbler valve closed
10/18/2011	9:28:56 PM	Helium valve opened
10/18/2011	9:28:56 PM	Main Vac valve opened
10/18/2011	9:28:56 PM	Helium MFC set to  20.000000
10/18/2011	9:28:56 PM	H2 MFC set to  0.000000
10/18/2011	9:28:56 PM	BCl3 MFC set to  0.000000
10/18/2011	9:28:56 PM	PHl3 MFC set to  0.000000
10/18/2011	9:28:56 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:28:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:28:57 PM	Tube furnace set to 150
10/18/2011	9:29:27 PM	Helium valve closed
10/18/2011	9:29:27 PM	H2 valve closed
10/18/2011	9:29:27 PM	BCl3 valve closed
10/18/2011	9:29:27 PM	PH3 valve closed
10/18/2011	9:29:27 PM	SiCl4 pre valve closed
10/18/2011	9:29:27 PM	SiCl4 post valve closed
10/18/2011	9:29:27 PM	Bypass valve closed
10/18/2011	9:29:27 PM	Bubbler valve closed
10/18/2011	9:29:27 PM	Main Vac valve opened
10/18/2011	9:29:27 PM	Helium MFC set to  0.000000
10/18/2011	9:29:27 PM	H2 MFC set to  0.000000
10/18/2011	9:29:27 PM	BCl3 MFC set to  0.000000
10/18/2011	9:29:27 PM	PHl3 MFC set to  0.000000
10/18/2011	9:29:27 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:29:27 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:29:27 PM	Tube furnace set to 150
10/18/2011	9:29:57 PM	H2 valve closed
10/18/2011	9:29:57 PM	BCl3 valve closed
10/18/2011	9:29:57 PM	PH3 valve closed
10/18/2011	9:29:57 PM	SiCl4 pre valve closed
10/18/2011	9:29:57 PM	SiCl4 post valve closed
10/18/2011	9:29:57 PM	Bypass valve closed
10/18/2011	9:29:57 PM	Bubbler valve closed
10/18/2011	9:29:57 PM	Helium valve opened
10/18/2011	9:29:57 PM	Main Vac valve opened
10/18/2011	9:29:57 PM	Helium MFC set to  20.000000
10/18/2011	9:29:57 PM	H2 MFC set to  0.000000
10/18/2011	9:29:57 PM	BCl3 MFC set to  0.000000
10/18/2011	9:29:57 PM	PHl3 MFC set to  0.000000
10/18/2011	9:29:57 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:29:57 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:29:57 PM	Tube furnace set to 150
10/18/2011	9:30:27 PM	Helium valve closed
10/18/2011	9:30:27 PM	H2 valve closed
10/18/2011	9:30:27 PM	BCl3 valve closed
10/18/2011	9:30:27 PM	PH3 valve closed
10/18/2011	9:30:27 PM	SiCl4 pre valve closed
10/18/2011	9:30:27 PM	SiCl4 post valve closed
10/18/2011	9:30:27 PM	Bypass valve closed
10/18/2011	9:30:27 PM	Bubbler valve closed
10/18/2011	9:30:27 PM	Main Vac valve opened
10/18/2011	9:30:27 PM	Helium MFC set to  0.000000
10/18/2011	9:30:27 PM	H2 MFC set to  0.000000
10/18/2011	9:30:27 PM	BCl3 MFC set to  0.000000
10/18/2011	9:30:27 PM	PHl3 MFC set to  0.000000
10/18/2011	9:30:27 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:30:27 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:30:27 PM	Tube furnace set to 150
10/18/2011	9:30:28 PM	Run finished at 9:30 PM
10/18/2011	9:31:07 PM	Recipe started at 9:31 PM
10/18/2011	9:31:07 PM	Helium valve closed
10/18/2011	9:31:07 PM	H2 valve closed
10/18/2011	9:31:07 PM	BCl3 valve closed
10/18/2011	9:31:07 PM	PH3 valve closed
10/18/2011	9:31:07 PM	SiCl4 pre valve closed
10/18/2011	9:31:07 PM	SiCl4 post valve closed
10/18/2011	9:31:07 PM	Bypass valve closed
10/18/2011	9:31:07 PM	Bubbler valve closed
10/18/2011	9:31:07 PM	Main Vac valve opened
10/18/2011	9:31:07 PM	Helium MFC set to  0.000000
10/18/2011	9:31:07 PM	H2 MFC set to  0.000000
10/18/2011	9:31:07 PM	BCl3 MFC set to  0.000000
10/18/2011	9:31:07 PM	PHl3 MFC set to  0.000000
10/18/2011	9:31:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:31:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:31:07 PM	Tube furnace set to 150
10/18/2011	9:31:37 PM	H2 valve closed
10/18/2011	9:31:37 PM	BCl3 valve closed
10/18/2011	9:31:37 PM	PH3 valve closed
10/18/2011	9:31:37 PM	SiCl4 pre valve closed
10/18/2011	9:31:37 PM	SiCl4 post valve closed
10/18/2011	9:31:37 PM	Bypass valve closed
10/18/2011	9:31:37 PM	Bubbler valve closed
10/18/2011	9:31:37 PM	Helium valve opened
10/18/2011	9:31:37 PM	Main Vac valve opened
10/18/2011	9:31:37 PM	Helium MFC set to  20.000000
10/18/2011	9:31:37 PM	H2 MFC set to  0.000000
10/18/2011	9:31:37 PM	BCl3 MFC set to  0.000000
10/18/2011	9:31:37 PM	PHl3 MFC set to  0.000000
10/18/2011	9:31:37 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:31:37 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:31:37 PM	Tube furnace set to 150
10/18/2011	9:32:07 PM	Helium valve closed
10/18/2011	9:32:07 PM	H2 valve closed
10/18/2011	9:32:07 PM	BCl3 valve closed
10/18/2011	9:32:07 PM	PH3 valve closed
10/18/2011	9:32:07 PM	SiCl4 pre valve closed
10/18/2011	9:32:07 PM	SiCl4 post valve closed
10/18/2011	9:32:07 PM	Bypass valve closed
10/18/2011	9:32:07 PM	Bubbler valve closed
10/18/2011	9:32:07 PM	Main Vac valve opened
10/18/2011	9:32:07 PM	Helium MFC set to  0.000000
10/18/2011	9:32:07 PM	H2 MFC set to  0.000000
10/18/2011	9:32:07 PM	BCl3 MFC set to  0.000000
10/18/2011	9:32:07 PM	PHl3 MFC set to  0.000000
10/18/2011	9:32:07 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:32:07 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:32:08 PM	Tube furnace set to 150
10/18/2011	9:32:38 PM	H2 valve closed
10/18/2011	9:32:38 PM	BCl3 valve closed
10/18/2011	9:32:38 PM	PH3 valve closed
10/18/2011	9:32:38 PM	SiCl4 pre valve closed
10/18/2011	9:32:38 PM	SiCl4 post valve closed
10/18/2011	9:32:38 PM	Bypass valve closed
10/18/2011	9:32:38 PM	Bubbler valve closed
10/18/2011	9:32:38 PM	Helium valve opened
10/18/2011	9:32:38 PM	Main Vac valve opened
10/18/2011	9:32:38 PM	Helium MFC set to  20.000000
10/18/2011	9:32:38 PM	H2 MFC set to  0.000000
10/18/2011	9:32:38 PM	BCl3 MFC set to  0.000000
10/18/2011	9:32:38 PM	PHl3 MFC set to  0.000000
10/18/2011	9:32:38 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:32:38 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:32:38 PM	Tube furnace set to 150
10/18/2011	9:33:08 PM	Helium valve closed
10/18/2011	9:33:08 PM	H2 valve closed
10/18/2011	9:33:08 PM	BCl3 valve closed
10/18/2011	9:33:08 PM	PH3 valve closed
10/18/2011	9:33:08 PM	SiCl4 pre valve closed
10/18/2011	9:33:08 PM	SiCl4 post valve closed
10/18/2011	9:33:08 PM	Bypass valve closed
10/18/2011	9:33:08 PM	Bubbler valve closed
10/18/2011	9:33:08 PM	Main Vac valve opened
10/18/2011	9:33:08 PM	Helium MFC set to  0.000000
10/18/2011	9:33:08 PM	H2 MFC set to  0.000000
10/18/2011	9:33:08 PM	BCl3 MFC set to  0.000000
10/18/2011	9:33:08 PM	PHl3 MFC set to  0.000000
10/18/2011	9:33:08 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:33:08 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:33:08 PM	Tube furnace set to 150
10/18/2011	9:33:38 PM	H2 valve closed
10/18/2011	9:33:38 PM	BCl3 valve closed
10/18/2011	9:33:38 PM	PH3 valve closed
10/18/2011	9:33:38 PM	SiCl4 pre valve closed
10/18/2011	9:33:38 PM	SiCl4 post valve closed
10/18/2011	9:33:38 PM	Bypass valve closed
10/18/2011	9:33:38 PM	Bubbler valve closed
10/18/2011	9:33:38 PM	Helium valve opened
10/18/2011	9:33:38 PM	Main Vac valve opened
10/18/2011	9:33:38 PM	Helium MFC set to  20.000000
10/18/2011	9:33:38 PM	H2 MFC set to  0.000000
10/18/2011	9:33:38 PM	BCl3 MFC set to  0.000000
10/18/2011	9:33:38 PM	PHl3 MFC set to  0.000000
10/18/2011	9:33:38 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:33:38 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:33:38 PM	Tube furnace set to 150
10/18/2011	9:34:08 PM	Helium valve closed
10/18/2011	9:34:08 PM	H2 valve closed
10/18/2011	9:34:08 PM	BCl3 valve closed
10/18/2011	9:34:08 PM	PH3 valve closed
10/18/2011	9:34:08 PM	SiCl4 pre valve closed
10/18/2011	9:34:08 PM	SiCl4 post valve closed
10/18/2011	9:34:08 PM	Bypass valve closed
10/18/2011	9:34:08 PM	Bubbler valve closed
10/18/2011	9:34:08 PM	Main Vac valve opened
10/18/2011	9:34:08 PM	Helium MFC set to  0.000000
10/18/2011	9:34:08 PM	H2 MFC set to  0.000000
10/18/2011	9:34:08 PM	BCl3 MFC set to  0.000000
10/18/2011	9:34:08 PM	PHl3 MFC set to  0.000000
10/18/2011	9:34:08 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:34:08 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:34:08 PM	Tube furnace set to 150
10/18/2011	9:34:38 PM	H2 valve closed
10/18/2011	9:34:38 PM	BCl3 valve closed
10/18/2011	9:34:38 PM	PH3 valve closed
10/18/2011	9:34:38 PM	SiCl4 pre valve closed
10/18/2011	9:34:38 PM	SiCl4 post valve closed
10/18/2011	9:34:38 PM	Bypass valve closed
10/18/2011	9:34:38 PM	Bubbler valve closed
10/18/2011	9:34:38 PM	Helium valve opened
10/18/2011	9:34:38 PM	Main Vac valve opened
10/18/2011	9:34:38 PM	Helium MFC set to  20.000000
10/18/2011	9:34:38 PM	H2 MFC set to  0.000000
10/18/2011	9:34:38 PM	BCl3 MFC set to  0.000000
10/18/2011	9:34:38 PM	PHl3 MFC set to  0.000000
10/18/2011	9:34:38 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:34:38 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:34:39 PM	Tube furnace set to 150
10/18/2011	9:35:09 PM	Helium valve closed
10/18/2011	9:35:09 PM	H2 valve closed
10/18/2011	9:35:09 PM	BCl3 valve closed
10/18/2011	9:35:09 PM	PH3 valve closed
10/18/2011	9:35:09 PM	SiCl4 pre valve closed
10/18/2011	9:35:09 PM	SiCl4 post valve closed
10/18/2011	9:35:09 PM	Bypass valve closed
10/18/2011	9:35:09 PM	Bubbler valve closed
10/18/2011	9:35:09 PM	Main Vac valve opened
10/18/2011	9:35:09 PM	Helium MFC set to  0.000000
10/18/2011	9:35:09 PM	H2 MFC set to  0.000000
10/18/2011	9:35:09 PM	BCl3 MFC set to  0.000000
10/18/2011	9:35:09 PM	PHl3 MFC set to  0.000000
10/18/2011	9:35:09 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:35:09 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:35:09 PM	Tube furnace set to 150
10/18/2011	9:35:39 PM	H2 valve closed
10/18/2011	9:35:39 PM	BCl3 valve closed
10/18/2011	9:35:39 PM	PH3 valve closed
10/18/2011	9:35:39 PM	SiCl4 pre valve closed
10/18/2011	9:35:39 PM	SiCl4 post valve closed
10/18/2011	9:35:39 PM	Bypass valve closed
10/18/2011	9:35:39 PM	Bubbler valve closed
10/18/2011	9:35:39 PM	Helium valve opened
10/18/2011	9:35:39 PM	Main Vac valve opened
10/18/2011	9:35:39 PM	Helium MFC set to  20.000000
10/18/2011	9:35:39 PM	H2 MFC set to  0.000000
10/18/2011	9:35:39 PM	BCl3 MFC set to  0.000000
10/18/2011	9:35:39 PM	PHl3 MFC set to  0.000000
10/18/2011	9:35:39 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:35:39 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:35:39 PM	Tube furnace set to 150
10/18/2011	9:36:09 PM	Helium valve closed
10/18/2011	9:36:09 PM	H2 valve closed
10/18/2011	9:36:09 PM	BCl3 valve closed
10/18/2011	9:36:09 PM	PH3 valve closed
10/18/2011	9:36:09 PM	SiCl4 pre valve closed
10/18/2011	9:36:09 PM	SiCl4 post valve closed
10/18/2011	9:36:09 PM	Bypass valve closed
10/18/2011	9:36:09 PM	Bubbler valve closed
10/18/2011	9:36:09 PM	Main Vac valve opened
10/18/2011	9:36:09 PM	Helium MFC set to  0.000000
10/18/2011	9:36:09 PM	H2 MFC set to  0.000000
10/18/2011	9:36:09 PM	BCl3 MFC set to  0.000000
10/18/2011	9:36:09 PM	PHl3 MFC set to  0.000000
10/18/2011	9:36:09 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:36:09 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:36:09 PM	Tube furnace set to 150
10/18/2011	9:36:39 PM	H2 valve closed
10/18/2011	9:36:39 PM	BCl3 valve closed
10/18/2011	9:36:39 PM	PH3 valve closed
10/18/2011	9:36:39 PM	SiCl4 pre valve closed
10/18/2011	9:36:39 PM	SiCl4 post valve closed
10/18/2011	9:36:39 PM	Bypass valve closed
10/18/2011	9:36:39 PM	Bubbler valve closed
10/18/2011	9:36:39 PM	Helium valve opened
10/18/2011	9:36:39 PM	Main Vac valve opened
10/18/2011	9:36:39 PM	Helium MFC set to  20.000000
10/18/2011	9:36:39 PM	H2 MFC set to  0.000000
10/18/2011	9:36:39 PM	BCl3 MFC set to  0.000000
10/18/2011	9:36:39 PM	PHl3 MFC set to  0.000000
10/18/2011	9:36:39 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:36:39 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:36:39 PM	Tube furnace set to 150
10/18/2011	9:37:09 PM	Helium valve closed
10/18/2011	9:37:09 PM	H2 valve closed
10/18/2011	9:37:09 PM	BCl3 valve closed
10/18/2011	9:37:09 PM	PH3 valve closed
10/18/2011	9:37:09 PM	SiCl4 pre valve closed
10/18/2011	9:37:09 PM	SiCl4 post valve closed
10/18/2011	9:37:09 PM	Bypass valve closed
10/18/2011	9:37:09 PM	Bubbler valve closed
10/18/2011	9:37:09 PM	Main Vac valve opened
10/18/2011	9:37:09 PM	Helium MFC set to  0.000000
10/18/2011	9:37:09 PM	H2 MFC set to  0.000000
10/18/2011	9:37:09 PM	BCl3 MFC set to  0.000000
10/18/2011	9:37:09 PM	PHl3 MFC set to  0.000000
10/18/2011	9:37:09 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:37:09 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:37:10 PM	Tube furnace set to 150
10/18/2011	9:37:40 PM	H2 valve closed
10/18/2011	9:37:40 PM	BCl3 valve closed
10/18/2011	9:37:40 PM	PH3 valve closed
10/18/2011	9:37:40 PM	SiCl4 pre valve closed
10/18/2011	9:37:40 PM	SiCl4 post valve closed
10/18/2011	9:37:40 PM	Bypass valve closed
10/18/2011	9:37:40 PM	Bubbler valve closed
10/18/2011	9:37:40 PM	Helium valve opened
10/18/2011	9:37:40 PM	Main Vac valve opened
10/18/2011	9:37:40 PM	Helium MFC set to  20.000000
10/18/2011	9:37:40 PM	H2 MFC set to  0.000000
10/18/2011	9:37:40 PM	BCl3 MFC set to  0.000000
10/18/2011	9:37:40 PM	PHl3 MFC set to  0.000000
10/18/2011	9:37:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:37:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:37:40 PM	Tube furnace set to 150
10/18/2011	9:38:10 PM	Helium valve closed
10/18/2011	9:38:10 PM	H2 valve closed
10/18/2011	9:38:10 PM	BCl3 valve closed
10/18/2011	9:38:10 PM	PH3 valve closed
10/18/2011	9:38:10 PM	SiCl4 pre valve closed
10/18/2011	9:38:10 PM	SiCl4 post valve closed
10/18/2011	9:38:10 PM	Bypass valve closed
10/18/2011	9:38:10 PM	Bubbler valve closed
10/18/2011	9:38:10 PM	Main Vac valve opened
10/18/2011	9:38:10 PM	Helium MFC set to  0.000000
10/18/2011	9:38:10 PM	H2 MFC set to  0.000000
10/18/2011	9:38:10 PM	BCl3 MFC set to  0.000000
10/18/2011	9:38:10 PM	PHl3 MFC set to  0.000000
10/18/2011	9:38:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:38:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:38:10 PM	Tube furnace set to 150
10/18/2011	9:38:40 PM	H2 valve closed
10/18/2011	9:38:40 PM	BCl3 valve closed
10/18/2011	9:38:40 PM	PH3 valve closed
10/18/2011	9:38:40 PM	SiCl4 pre valve closed
10/18/2011	9:38:40 PM	SiCl4 post valve closed
10/18/2011	9:38:40 PM	Bypass valve closed
10/18/2011	9:38:40 PM	Bubbler valve closed
10/18/2011	9:38:40 PM	Helium valve opened
10/18/2011	9:38:40 PM	Main Vac valve opened
10/18/2011	9:38:40 PM	Helium MFC set to  20.000000
10/18/2011	9:38:40 PM	H2 MFC set to  0.000000
10/18/2011	9:38:40 PM	BCl3 MFC set to  0.000000
10/18/2011	9:38:40 PM	PHl3 MFC set to  0.000000
10/18/2011	9:38:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:38:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:38:40 PM	Tube furnace set to 150
10/18/2011	9:39:10 PM	Helium valve closed
10/18/2011	9:39:10 PM	H2 valve closed
10/18/2011	9:39:10 PM	BCl3 valve closed
10/18/2011	9:39:10 PM	PH3 valve closed
10/18/2011	9:39:10 PM	SiCl4 pre valve closed
10/18/2011	9:39:10 PM	SiCl4 post valve closed
10/18/2011	9:39:10 PM	Bypass valve closed
10/18/2011	9:39:10 PM	Bubbler valve closed
10/18/2011	9:39:10 PM	Main Vac valve opened
10/18/2011	9:39:10 PM	Helium MFC set to  0.000000
10/18/2011	9:39:10 PM	H2 MFC set to  0.000000
10/18/2011	9:39:10 PM	BCl3 MFC set to  0.000000
10/18/2011	9:39:10 PM	PHl3 MFC set to  0.000000
10/18/2011	9:39:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:39:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:39:10 PM	Tube furnace set to 150
10/18/2011	9:39:40 PM	H2 valve closed
10/18/2011	9:39:40 PM	BCl3 valve closed
10/18/2011	9:39:40 PM	PH3 valve closed
10/18/2011	9:39:40 PM	SiCl4 pre valve closed
10/18/2011	9:39:40 PM	SiCl4 post valve closed
10/18/2011	9:39:40 PM	Bypass valve closed
10/18/2011	9:39:40 PM	Bubbler valve closed
10/18/2011	9:39:40 PM	Helium valve opened
10/18/2011	9:39:40 PM	Main Vac valve opened
10/18/2011	9:39:40 PM	Helium MFC set to  20.000000
10/18/2011	9:39:40 PM	H2 MFC set to  0.000000
10/18/2011	9:39:40 PM	BCl3 MFC set to  0.000000
10/18/2011	9:39:40 PM	PHl3 MFC set to  0.000000
10/18/2011	9:39:40 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:39:40 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:39:41 PM	Tube furnace set to 150
10/18/2011	9:40:11 PM	Helium valve closed
10/18/2011	9:40:11 PM	H2 valve closed
10/18/2011	9:40:11 PM	BCl3 valve closed
10/18/2011	9:40:11 PM	PH3 valve closed
10/18/2011	9:40:11 PM	SiCl4 pre valve closed
10/18/2011	9:40:11 PM	SiCl4 post valve closed
10/18/2011	9:40:11 PM	Bypass valve closed
10/18/2011	9:40:11 PM	Bubbler valve closed
10/18/2011	9:40:11 PM	Main Vac valve opened
10/18/2011	9:40:11 PM	Helium MFC set to  0.000000
10/18/2011	9:40:11 PM	H2 MFC set to  0.000000
10/18/2011	9:40:11 PM	BCl3 MFC set to  0.000000
10/18/2011	9:40:11 PM	PHl3 MFC set to  0.000000
10/18/2011	9:40:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:40:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:40:11 PM	Tube furnace set to 150
10/18/2011	9:40:41 PM	H2 valve closed
10/18/2011	9:40:41 PM	BCl3 valve closed
10/18/2011	9:40:41 PM	PH3 valve closed
10/18/2011	9:40:41 PM	SiCl4 pre valve closed
10/18/2011	9:40:41 PM	SiCl4 post valve closed
10/18/2011	9:40:41 PM	Bypass valve closed
10/18/2011	9:40:41 PM	Bubbler valve closed
10/18/2011	9:40:41 PM	Helium valve opened
10/18/2011	9:40:41 PM	Main Vac valve opened
10/18/2011	9:40:41 PM	Helium MFC set to  20.000000
10/18/2011	9:40:41 PM	H2 MFC set to  0.000000
10/18/2011	9:40:41 PM	BCl3 MFC set to  0.000000
10/18/2011	9:40:41 PM	PHl3 MFC set to  0.000000
10/18/2011	9:40:41 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:40:41 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:40:41 PM	Tube furnace set to 150
10/18/2011	9:41:11 PM	Helium valve closed
10/18/2011	9:41:11 PM	H2 valve closed
10/18/2011	9:41:11 PM	BCl3 valve closed
10/18/2011	9:41:11 PM	PH3 valve closed
10/18/2011	9:41:11 PM	SiCl4 pre valve closed
10/18/2011	9:41:11 PM	SiCl4 post valve closed
10/18/2011	9:41:11 PM	Bypass valve closed
10/18/2011	9:41:11 PM	Bubbler valve closed
10/18/2011	9:41:11 PM	Main Vac valve opened
10/18/2011	9:41:11 PM	Helium MFC set to  0.000000
10/18/2011	9:41:11 PM	H2 MFC set to  0.000000
10/18/2011	9:41:11 PM	BCl3 MFC set to  0.000000
10/18/2011	9:41:11 PM	PHl3 MFC set to  0.000000
10/18/2011	9:41:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:41:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:41:11 PM	Tube furnace set to 150
10/18/2011	9:41:12 PM	Run finished at 9:41 PM
10/18/2011	9:42:36 PM	Main Vac valve closed
10/18/2011	9:42:46 PM	Main Vac valve opened
10/18/2011	9:44:11 PM	Recipe started at 9:44 PM
10/18/2011	9:44:11 PM	Helium valve closed
10/18/2011	9:44:11 PM	H2 valve closed
10/18/2011	9:44:11 PM	BCl3 valve closed
10/18/2011	9:44:11 PM	PH3 valve closed
10/18/2011	9:44:11 PM	SiCl4 pre valve closed
10/18/2011	9:44:11 PM	SiCl4 post valve closed
10/18/2011	9:44:11 PM	Main Vac valve closed
10/18/2011	9:44:11 PM	Bypass valve closed
10/18/2011	9:44:11 PM	Bubbler valve closed
10/18/2011	9:44:11 PM	Helium MFC set to  0.000000
10/18/2011	9:44:11 PM	H2 MFC set to  0.000000
10/18/2011	9:44:11 PM	BCl3 MFC set to  0.000000
10/18/2011	9:44:11 PM	PHl3 MFC set to  0.000000
10/18/2011	9:44:11 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:44:11 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:44:11 PM	Tube furnace set to 0
10/18/2011	9:44:14 PM	Helium valve closed
10/18/2011	9:44:14 PM	BCl3 valve closed
10/18/2011	9:44:14 PM	PH3 valve closed
10/18/2011	9:44:14 PM	SiCl4 pre valve closed
10/18/2011	9:44:14 PM	SiCl4 post valve closed
10/18/2011	9:44:14 PM	Main Vac valve closed
10/18/2011	9:44:14 PM	Bypass valve closed
10/18/2011	9:44:14 PM	Bubbler valve closed
10/18/2011	9:44:14 PM	H2 valve opened
10/18/2011	9:44:14 PM	Helium MFC set to  0.000000
10/18/2011	9:44:14 PM	H2 MFC set to  500.000000
10/18/2011	9:44:14 PM	BCl3 MFC set to  0.000000
10/18/2011	9:44:14 PM	PHl3 MFC set to  0.000000
10/18/2011	9:44:14 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:44:14 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:44:15 PM	Tube furnace set to 0
10/18/2011	9:45:16 PM	Helium valve closed
10/18/2011	9:45:16 PM	BCl3 valve closed
10/18/2011	9:45:16 PM	PH3 valve closed
10/18/2011	9:45:16 PM	SiCl4 pre valve closed
10/18/2011	9:45:16 PM	SiCl4 post valve closed
10/18/2011	9:45:16 PM	Main Vac valve closed
10/18/2011	9:45:16 PM	Bypass valve closed
10/18/2011	9:45:16 PM	H2 valve opened
10/18/2011	9:45:16 PM	Bubbler valve opened
10/18/2011	9:45:16 PM	Helium MFC set to  0.000000
10/18/2011	9:45:16 PM	H2 MFC set to  500.000000
10/18/2011	9:45:16 PM	BCl3 MFC set to  0.000000
10/18/2011	9:45:16 PM	PHl3 MFC set to  0.000000
10/18/2011	9:45:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:45:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:45:17 PM	Tube furnace set to 0
10/18/2011	9:45:18 PM	Helium valve closed
10/18/2011	9:45:18 PM	BCl3 valve closed
10/18/2011	9:45:18 PM	PH3 valve closed
10/18/2011	9:45:18 PM	SiCl4 pre valve closed
10/18/2011	9:45:18 PM	SiCl4 post valve closed
10/18/2011	9:45:18 PM	Main Vac valve closed
10/18/2011	9:45:18 PM	Bypass valve closed
10/18/2011	9:45:18 PM	H2 valve opened
10/18/2011	9:45:18 PM	Bubbler valve opened
10/18/2011	9:45:18 PM	Helium MFC set to  0.000000
10/18/2011	9:45:18 PM	H2 MFC set to  500.000000
10/18/2011	9:45:18 PM	BCl3 MFC set to  0.000000
10/18/2011	9:45:18 PM	PHl3 MFC set to  0.000000
10/18/2011	9:45:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	9:45:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	9:45:18 PM	Tube furnace set to 1000
10/18/2011	10:05:18 PM	Helium valve closed
10/18/2011	10:05:18 PM	BCl3 valve closed
10/18/2011	10:05:18 PM	PH3 valve closed
10/18/2011	10:05:18 PM	Main Vac valve closed
10/18/2011	10:05:18 PM	Bypass valve closed
10/18/2011	10:05:18 PM	H2 valve opened
10/18/2011	10:05:18 PM	SiCl4 pre valve opened
10/18/2011	10:05:18 PM	SiCl4 post valve opened
10/18/2011	10:05:18 PM	Bubbler valve opened
10/18/2011	10:05:18 PM	Helium MFC set to  0.000000
10/18/2011	10:05:18 PM	H2 MFC set to  500.000000
10/18/2011	10:05:18 PM	BCl3 MFC set to  0.000000
10/18/2011	10:05:18 PM	PHl3 MFC set to  0.000000
10/18/2011	10:05:18 PM	SiCl4 MFC set to  50.000000
10/18/2011	10:05:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:05:18 PM	Tube furnace set to 1000
10/18/2011	10:15:18 PM	Helium valve closed
10/18/2011	10:15:18 PM	BCl3 valve closed
10/18/2011	10:15:18 PM	PH3 valve closed
10/18/2011	10:15:18 PM	SiCl4 pre valve closed
10/18/2011	10:15:18 PM	SiCl4 post valve closed
10/18/2011	10:15:18 PM	Main Vac valve closed
10/18/2011	10:15:18 PM	Bypass valve closed
10/18/2011	10:15:18 PM	H2 valve opened
10/18/2011	10:15:18 PM	Bubbler valve opened
10/18/2011	10:15:18 PM	Helium MFC set to  0.000000
10/18/2011	10:15:18 PM	H2 MFC set to  500.000000
10/18/2011	10:15:18 PM	BCl3 MFC set to  0.000000
10/18/2011	10:15:18 PM	PHl3 MFC set to  0.000000
10/18/2011	10:15:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:15:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:15:18 PM	Tube furnace set to 750
10/18/2011	10:20:18 PM	H2 valve closed
10/18/2011	10:20:18 PM	BCl3 valve closed
10/18/2011	10:20:18 PM	PH3 valve closed
10/18/2011	10:20:18 PM	SiCl4 pre valve closed
10/18/2011	10:20:18 PM	SiCl4 post valve closed
10/18/2011	10:20:18 PM	Main Vac valve closed
10/18/2011	10:20:18 PM	Bypass valve closed
10/18/2011	10:20:18 PM	Helium valve opened
10/18/2011	10:20:18 PM	Bubbler valve opened
10/18/2011	10:20:18 PM	Helium MFC set to  500.000000
10/18/2011	10:20:18 PM	H2 MFC set to  0.000000
10/18/2011	10:20:18 PM	BCl3 MFC set to  0.000000
10/18/2011	10:20:18 PM	PHl3 MFC set to  0.000000
10/18/2011	10:20:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:20:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:20:18 PM	Tube furnace set to 0
10/18/2011	10:25:54 PM	Run aborted at 10:25 PM
10/18/2011	10:25:54 PM	Helium valve closed
10/18/2011	10:25:54 PM	H2 valve closed
10/18/2011	10:25:54 PM	BCl3 valve closed
10/18/2011	10:25:54 PM	PH3 valve closed
10/18/2011	10:25:54 PM	SiCl4 pre valve closed
10/18/2011	10:25:54 PM	SiCl4 post valve closed
10/18/2011	10:25:54 PM	Bypass valve closed
10/18/2011	10:25:54 PM	Main Vac valve closed
10/18/2011	10:25:54 PM	Bubbler valve closed
10/18/2011	10:25:54 PM	Helium MFC set to  0.000000
10/18/2011	10:25:54 PM	H2 MFC set to  0.000000
10/18/2011	10:25:54 PM	BCl3 MFC set to  0.000000
10/18/2011	10:25:54 PM	PHl3 MFC set to  0.000000
10/18/2011	10:25:54 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:25:54 PM	Tube furnace set to 0
10/18/2011	10:28:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	10:28:17 PM	Recipe started at 10:28 PM
10/18/2011	10:28:17 PM	Helium valve closed
10/18/2011	10:28:17 PM	H2 valve closed
10/18/2011	10:28:17 PM	BCl3 valve closed
10/18/2011	10:28:17 PM	PH3 valve closed
10/18/2011	10:28:17 PM	SiCl4 pre valve closed
10/18/2011	10:28:17 PM	SiCl4 post valve closed
10/18/2011	10:28:17 PM	Main Vac valve closed
10/18/2011	10:28:17 PM	Bubbler valve closed
10/18/2011	10:28:17 PM	Bypass valve opened
10/18/2011	10:28:17 PM	Helium MFC set to  0.000000
10/18/2011	10:28:17 PM	H2 MFC set to  0.000000
10/18/2011	10:28:17 PM	BCl3 MFC set to  0.000000
10/18/2011	10:28:17 PM	PHl3 MFC set to  0.000000
10/18/2011	10:28:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:28:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:28:17 PM	Tube furnace set to 0
10/18/2011	10:29:18 PM	Helium valve closed
10/18/2011	10:29:18 PM	H2 valve closed
10/18/2011	10:29:19 PM	BCl3 valve closed
10/18/2011	10:29:19 PM	PH3 valve closed
10/18/2011	10:29:19 PM	SiCl4 pre valve closed
10/18/2011	10:29:19 PM	SiCl4 post valve closed
10/18/2011	10:29:19 PM	Main Vac valve closed
10/18/2011	10:29:19 PM	Bubbler valve closed
10/18/2011	10:29:19 PM	Bypass valve opened
10/18/2011	10:29:19 PM	Helium MFC set to  0.000000
10/18/2011	10:29:19 PM	H2 MFC set to  0.000000
10/18/2011	10:29:19 PM	BCl3 MFC set to  0.000000
10/18/2011	10:29:19 PM	PHl3 MFC set to  0.000000
10/18/2011	10:29:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:29:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:29:19 PM	Tube furnace set to 0
10/18/2011	10:30:19 PM	Helium valve closed
10/18/2011	10:30:19 PM	H2 valve closed
10/18/2011	10:30:19 PM	BCl3 valve closed
10/18/2011	10:30:19 PM	PH3 valve closed
10/18/2011	10:30:19 PM	SiCl4 pre valve closed
10/18/2011	10:30:19 PM	SiCl4 post valve closed
10/18/2011	10:30:19 PM	Bypass valve closed
10/18/2011	10:30:19 PM	Bubbler valve closed
10/18/2011	10:30:19 PM	Main Vac valve opened
10/18/2011	10:30:19 PM	Helium MFC set to  0.000000
10/18/2011	10:30:19 PM	H2 MFC set to  0.000000
10/18/2011	10:30:19 PM	BCl3 MFC set to  0.000000
10/18/2011	10:30:19 PM	PHl3 MFC set to  0.000000
10/18/2011	10:30:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	10:30:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	10:30:19 PM	Tube furnace set to 0
10/18/2011	10:30:20 PM	Run finished at 10:30 PM
10/18/2011	10:30:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	10:34:10 PM	Helium MFC set to  20.000000
10/18/2011	10:34:12 PM	Helium valve opened
10/18/2011	10:38:00 PM	Helium valve closed
10/18/2011	10:38:02 PM	Helium MFC set to  0.000000
10/18/2011	11:13:11 PM	Main Vac valve closed
10/18/2011	11:13:21 PM	Main Vac valve opened
10/18/2011	11:13:45 PM	Recipe started at 11:13 PM
10/18/2011	11:13:45 PM	Helium valve closed
10/18/2011	11:13:45 PM	H2 valve closed
10/18/2011	11:13:45 PM	BCl3 valve closed
10/18/2011	11:13:45 PM	PH3 valve closed
10/18/2011	11:13:45 PM	SiCl4 pre valve closed
10/18/2011	11:13:45 PM	SiCl4 post valve closed
10/18/2011	11:13:45 PM	Bypass valve closed
10/18/2011	11:13:45 PM	Bubbler valve closed
10/18/2011	11:13:45 PM	Main Vac valve opened
10/18/2011	11:13:45 PM	Helium MFC set to  0.000000
10/18/2011	11:13:45 PM	H2 MFC set to  0.000000
10/18/2011	11:13:45 PM	BCl3 MFC set to  0.000000
10/18/2011	11:13:45 PM	PHl3 MFC set to  0.000000
10/18/2011	11:13:45 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:13:45 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:13:46 PM	Tube furnace set to 150
10/18/2011	11:14:16 PM	H2 valve closed
10/18/2011	11:14:16 PM	BCl3 valve closed
10/18/2011	11:14:16 PM	PH3 valve closed
10/18/2011	11:14:16 PM	SiCl4 pre valve closed
10/18/2011	11:14:16 PM	SiCl4 post valve closed
10/18/2011	11:14:16 PM	Bypass valve closed
10/18/2011	11:14:16 PM	Bubbler valve closed
10/18/2011	11:14:16 PM	Helium valve opened
10/18/2011	11:14:16 PM	Main Vac valve opened
10/18/2011	11:14:16 PM	Helium MFC set to  20.000000
10/18/2011	11:14:16 PM	H2 MFC set to  0.000000
10/18/2011	11:14:16 PM	BCl3 MFC set to  0.000000
10/18/2011	11:14:16 PM	PHl3 MFC set to  0.000000
10/18/2011	11:14:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:14:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:14:16 PM	Tube furnace set to 150
10/18/2011	11:14:46 PM	Helium valve closed
10/18/2011	11:14:46 PM	H2 valve closed
10/18/2011	11:14:46 PM	BCl3 valve closed
10/18/2011	11:14:46 PM	PH3 valve closed
10/18/2011	11:14:46 PM	SiCl4 pre valve closed
10/18/2011	11:14:46 PM	SiCl4 post valve closed
10/18/2011	11:14:46 PM	Bypass valve closed
10/18/2011	11:14:46 PM	Bubbler valve closed
10/18/2011	11:14:46 PM	Main Vac valve opened
10/18/2011	11:14:46 PM	Helium MFC set to  0.000000
10/18/2011	11:14:46 PM	H2 MFC set to  0.000000
10/18/2011	11:14:46 PM	BCl3 MFC set to  0.000000
10/18/2011	11:14:46 PM	PHl3 MFC set to  0.000000
10/18/2011	11:14:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:14:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:14:46 PM	Tube furnace set to 150
10/18/2011	11:15:16 PM	H2 valve closed
10/18/2011	11:15:16 PM	BCl3 valve closed
10/18/2011	11:15:16 PM	PH3 valve closed
10/18/2011	11:15:16 PM	SiCl4 pre valve closed
10/18/2011	11:15:16 PM	SiCl4 post valve closed
10/18/2011	11:15:16 PM	Bypass valve closed
10/18/2011	11:15:16 PM	Bubbler valve closed
10/18/2011	11:15:16 PM	Helium valve opened
10/18/2011	11:15:16 PM	Main Vac valve opened
10/18/2011	11:15:16 PM	Helium MFC set to  20.000000
10/18/2011	11:15:16 PM	H2 MFC set to  0.000000
10/18/2011	11:15:16 PM	BCl3 MFC set to  0.000000
10/18/2011	11:15:16 PM	PHl3 MFC set to  0.000000
10/18/2011	11:15:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:15:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:15:16 PM	Tube furnace set to 150
10/18/2011	11:15:46 PM	Helium valve closed
10/18/2011	11:15:46 PM	H2 valve closed
10/18/2011	11:15:46 PM	BCl3 valve closed
10/18/2011	11:15:46 PM	PH3 valve closed
10/18/2011	11:15:46 PM	SiCl4 pre valve closed
10/18/2011	11:15:46 PM	SiCl4 post valve closed
10/18/2011	11:15:46 PM	Bypass valve closed
10/18/2011	11:15:46 PM	Bubbler valve closed
10/18/2011	11:15:46 PM	Main Vac valve opened
10/18/2011	11:15:46 PM	Helium MFC set to  0.000000
10/18/2011	11:15:46 PM	H2 MFC set to  0.000000
10/18/2011	11:15:46 PM	BCl3 MFC set to  0.000000
10/18/2011	11:15:46 PM	PHl3 MFC set to  0.000000
10/18/2011	11:15:46 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:15:46 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:15:46 PM	Tube furnace set to 150
10/18/2011	11:16:16 PM	H2 valve closed
10/18/2011	11:16:16 PM	BCl3 valve closed
10/18/2011	11:16:16 PM	PH3 valve closed
10/18/2011	11:16:16 PM	SiCl4 pre valve closed
10/18/2011	11:16:16 PM	SiCl4 post valve closed
10/18/2011	11:16:16 PM	Bypass valve closed
10/18/2011	11:16:16 PM	Bubbler valve closed
10/18/2011	11:16:16 PM	Helium valve opened
10/18/2011	11:16:16 PM	Main Vac valve opened
10/18/2011	11:16:16 PM	Helium MFC set to  20.000000
10/18/2011	11:16:16 PM	H2 MFC set to  0.000000
10/18/2011	11:16:16 PM	BCl3 MFC set to  0.000000
10/18/2011	11:16:16 PM	PHl3 MFC set to  0.000000
10/18/2011	11:16:16 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:16:16 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:16:17 PM	Tube furnace set to 150
10/18/2011	11:16:47 PM	Helium valve closed
10/18/2011	11:16:47 PM	H2 valve closed
10/18/2011	11:16:47 PM	BCl3 valve closed
10/18/2011	11:16:47 PM	PH3 valve closed
10/18/2011	11:16:47 PM	SiCl4 pre valve closed
10/18/2011	11:16:47 PM	SiCl4 post valve closed
10/18/2011	11:16:47 PM	Bypass valve closed
10/18/2011	11:16:47 PM	Bubbler valve closed
10/18/2011	11:16:47 PM	Main Vac valve opened
10/18/2011	11:16:47 PM	Helium MFC set to  0.000000
10/18/2011	11:16:47 PM	H2 MFC set to  0.000000
10/18/2011	11:16:47 PM	BCl3 MFC set to  0.000000
10/18/2011	11:16:47 PM	PHl3 MFC set to  0.000000
10/18/2011	11:16:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:16:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:16:47 PM	Tube furnace set to 150
10/18/2011	11:17:17 PM	H2 valve closed
10/18/2011	11:17:17 PM	BCl3 valve closed
10/18/2011	11:17:17 PM	PH3 valve closed
10/18/2011	11:17:17 PM	SiCl4 pre valve closed
10/18/2011	11:17:17 PM	SiCl4 post valve closed
10/18/2011	11:17:17 PM	Bypass valve closed
10/18/2011	11:17:17 PM	Bubbler valve closed
10/18/2011	11:17:17 PM	Helium valve opened
10/18/2011	11:17:17 PM	Main Vac valve opened
10/18/2011	11:17:17 PM	Helium MFC set to  20.000000
10/18/2011	11:17:17 PM	H2 MFC set to  0.000000
10/18/2011	11:17:17 PM	BCl3 MFC set to  0.000000
10/18/2011	11:17:17 PM	PHl3 MFC set to  0.000000
10/18/2011	11:17:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:17:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:17:17 PM	Tube furnace set to 150
10/18/2011	11:17:47 PM	Helium valve closed
10/18/2011	11:17:47 PM	H2 valve closed
10/18/2011	11:17:47 PM	BCl3 valve closed
10/18/2011	11:17:47 PM	PH3 valve closed
10/18/2011	11:17:47 PM	SiCl4 pre valve closed
10/18/2011	11:17:47 PM	SiCl4 post valve closed
10/18/2011	11:17:47 PM	Bypass valve closed
10/18/2011	11:17:47 PM	Bubbler valve closed
10/18/2011	11:17:47 PM	Main Vac valve opened
10/18/2011	11:17:47 PM	Helium MFC set to  0.000000
10/18/2011	11:17:47 PM	H2 MFC set to  0.000000
10/18/2011	11:17:47 PM	BCl3 MFC set to  0.000000
10/18/2011	11:17:47 PM	PHl3 MFC set to  0.000000
10/18/2011	11:17:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:17:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:17:47 PM	Tube furnace set to 150
10/18/2011	11:18:17 PM	H2 valve closed
10/18/2011	11:18:17 PM	BCl3 valve closed
10/18/2011	11:18:17 PM	PH3 valve closed
10/18/2011	11:18:17 PM	SiCl4 pre valve closed
10/18/2011	11:18:17 PM	SiCl4 post valve closed
10/18/2011	11:18:17 PM	Bypass valve closed
10/18/2011	11:18:17 PM	Bubbler valve closed
10/18/2011	11:18:17 PM	Helium valve opened
10/18/2011	11:18:17 PM	Main Vac valve opened
10/18/2011	11:18:17 PM	Helium MFC set to  20.000000
10/18/2011	11:18:17 PM	H2 MFC set to  0.000000
10/18/2011	11:18:17 PM	BCl3 MFC set to  0.000000
10/18/2011	11:18:17 PM	PHl3 MFC set to  0.000000
10/18/2011	11:18:17 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:18:17 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:18:17 PM	Tube furnace set to 150
10/18/2011	11:18:47 PM	Helium valve closed
10/18/2011	11:18:47 PM	H2 valve closed
10/18/2011	11:18:47 PM	BCl3 valve closed
10/18/2011	11:18:47 PM	PH3 valve closed
10/18/2011	11:18:47 PM	SiCl4 pre valve closed
10/18/2011	11:18:47 PM	SiCl4 post valve closed
10/18/2011	11:18:47 PM	Bypass valve closed
10/18/2011	11:18:47 PM	Bubbler valve closed
10/18/2011	11:18:47 PM	Main Vac valve opened
10/18/2011	11:18:47 PM	Helium MFC set to  0.000000
10/18/2011	11:18:47 PM	H2 MFC set to  0.000000
10/18/2011	11:18:47 PM	BCl3 MFC set to  0.000000
10/18/2011	11:18:47 PM	PHl3 MFC set to  0.000000
10/18/2011	11:18:47 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:18:47 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:18:48 PM	Tube furnace set to 150
10/18/2011	11:19:18 PM	H2 valve closed
10/18/2011	11:19:18 PM	BCl3 valve closed
10/18/2011	11:19:18 PM	PH3 valve closed
10/18/2011	11:19:18 PM	SiCl4 pre valve closed
10/18/2011	11:19:18 PM	SiCl4 post valve closed
10/18/2011	11:19:18 PM	Bypass valve closed
10/18/2011	11:19:18 PM	Bubbler valve closed
10/18/2011	11:19:18 PM	Helium valve opened
10/18/2011	11:19:18 PM	Main Vac valve opened
10/18/2011	11:19:18 PM	Helium MFC set to  20.000000
10/18/2011	11:19:18 PM	H2 MFC set to  0.000000
10/18/2011	11:19:18 PM	BCl3 MFC set to  0.000000
10/18/2011	11:19:18 PM	PHl3 MFC set to  0.000000
10/18/2011	11:19:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:19:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:19:18 PM	Tube furnace set to 150
10/18/2011	11:19:48 PM	Helium valve closed
10/18/2011	11:19:48 PM	H2 valve closed
10/18/2011	11:19:48 PM	BCl3 valve closed
10/18/2011	11:19:48 PM	PH3 valve closed
10/18/2011	11:19:48 PM	SiCl4 pre valve closed
10/18/2011	11:19:48 PM	SiCl4 post valve closed
10/18/2011	11:19:48 PM	Bypass valve closed
10/18/2011	11:19:48 PM	Bubbler valve closed
10/18/2011	11:19:48 PM	Main Vac valve opened
10/18/2011	11:19:48 PM	Helium MFC set to  0.000000
10/18/2011	11:19:48 PM	H2 MFC set to  0.000000
10/18/2011	11:19:48 PM	BCl3 MFC set to  0.000000
10/18/2011	11:19:48 PM	PHl3 MFC set to  0.000000
10/18/2011	11:19:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:19:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:19:48 PM	Tube furnace set to 150
10/18/2011	11:20:18 PM	H2 valve closed
10/18/2011	11:20:18 PM	BCl3 valve closed
10/18/2011	11:20:18 PM	PH3 valve closed
10/18/2011	11:20:18 PM	SiCl4 pre valve closed
10/18/2011	11:20:18 PM	SiCl4 post valve closed
10/18/2011	11:20:18 PM	Bypass valve closed
10/18/2011	11:20:18 PM	Bubbler valve closed
10/18/2011	11:20:18 PM	Helium valve opened
10/18/2011	11:20:18 PM	Main Vac valve opened
10/18/2011	11:20:18 PM	Helium MFC set to  20.000000
10/18/2011	11:20:18 PM	H2 MFC set to  0.000000
10/18/2011	11:20:18 PM	BCl3 MFC set to  0.000000
10/18/2011	11:20:18 PM	PHl3 MFC set to  0.000000
10/18/2011	11:20:18 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:20:18 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:20:18 PM	Tube furnace set to 150
10/18/2011	11:20:48 PM	Helium valve closed
10/18/2011	11:20:48 PM	H2 valve closed
10/18/2011	11:20:48 PM	BCl3 valve closed
10/18/2011	11:20:48 PM	PH3 valve closed
10/18/2011	11:20:48 PM	SiCl4 pre valve closed
10/18/2011	11:20:48 PM	SiCl4 post valve closed
10/18/2011	11:20:48 PM	Bypass valve closed
10/18/2011	11:20:48 PM	Bubbler valve closed
10/18/2011	11:20:48 PM	Main Vac valve opened
10/18/2011	11:20:48 PM	Helium MFC set to  0.000000
10/18/2011	11:20:48 PM	H2 MFC set to  0.000000
10/18/2011	11:20:48 PM	BCl3 MFC set to  0.000000
10/18/2011	11:20:48 PM	PHl3 MFC set to  0.000000
10/18/2011	11:20:48 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:20:48 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:20:49 PM	Tube furnace set to 150
10/18/2011	11:21:19 PM	H2 valve closed
10/18/2011	11:21:19 PM	BCl3 valve closed
10/18/2011	11:21:19 PM	PH3 valve closed
10/18/2011	11:21:19 PM	SiCl4 pre valve closed
10/18/2011	11:21:19 PM	SiCl4 post valve closed
10/18/2011	11:21:19 PM	Bypass valve closed
10/18/2011	11:21:19 PM	Bubbler valve closed
10/18/2011	11:21:19 PM	Helium valve opened
10/18/2011	11:21:19 PM	Main Vac valve opened
10/18/2011	11:21:19 PM	Helium MFC set to  20.000000
10/18/2011	11:21:19 PM	H2 MFC set to  0.000000
10/18/2011	11:21:19 PM	BCl3 MFC set to  0.000000
10/18/2011	11:21:19 PM	PHl3 MFC set to  0.000000
10/18/2011	11:21:19 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:21:19 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:21:19 PM	Tube furnace set to 150
10/18/2011	11:21:49 PM	Helium valve closed
10/18/2011	11:21:49 PM	H2 valve closed
10/18/2011	11:21:49 PM	BCl3 valve closed
10/18/2011	11:21:49 PM	PH3 valve closed
10/18/2011	11:21:49 PM	SiCl4 pre valve closed
10/18/2011	11:21:49 PM	SiCl4 post valve closed
10/18/2011	11:21:49 PM	Bypass valve closed
10/18/2011	11:21:49 PM	Bubbler valve closed
10/18/2011	11:21:49 PM	Main Vac valve opened
10/18/2011	11:21:49 PM	Helium MFC set to  0.000000
10/18/2011	11:21:49 PM	H2 MFC set to  0.000000
10/18/2011	11:21:49 PM	BCl3 MFC set to  0.000000
10/18/2011	11:21:49 PM	PHl3 MFC set to  0.000000
10/18/2011	11:21:49 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:21:49 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:21:49 PM	Tube furnace set to 150
10/18/2011	11:22:09 PM	Run aborted at 11:22 PM
10/18/2011	11:22:09 PM	Helium valve closed
10/18/2011	11:22:09 PM	H2 valve closed
10/18/2011	11:22:09 PM	BCl3 valve closed
10/18/2011	11:22:09 PM	PH3 valve closed
10/18/2011	11:22:09 PM	SiCl4 pre valve closed
10/18/2011	11:22:09 PM	SiCl4 post valve closed
10/18/2011	11:22:09 PM	Bypass valve closed
10/18/2011	11:22:09 PM	Main Vac valve closed
10/18/2011	11:22:09 PM	Bubbler valve closed
10/18/2011	11:22:09 PM	Helium MFC set to  0.000000
10/18/2011	11:22:09 PM	H2 MFC set to  0.000000
10/18/2011	11:22:09 PM	BCl3 MFC set to  0.000000
10/18/2011	11:22:09 PM	PHl3 MFC set to  0.000000
10/18/2011	11:22:09 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:22:09 PM	Tube furnace set to 0
10/18/2011	11:22:18 PM	Main Vac valve opened
10/18/2011	11:22:55 PM	Recipe started at 11:22 PM
10/18/2011	11:22:55 PM	Helium valve closed
10/18/2011	11:22:55 PM	H2 valve closed
10/18/2011	11:22:55 PM	BCl3 valve closed
10/18/2011	11:22:55 PM	PH3 valve closed
10/18/2011	11:22:55 PM	SiCl4 pre valve closed
10/18/2011	11:22:55 PM	SiCl4 post valve closed
10/18/2011	11:22:55 PM	Main Vac valve closed
10/18/2011	11:22:55 PM	Bypass valve closed
10/18/2011	11:22:55 PM	Bubbler valve closed
10/18/2011	11:22:55 PM	Helium MFC set to  0.000000
10/18/2011	11:22:55 PM	H2 MFC set to  0.000000
10/18/2011	11:22:55 PM	BCl3 MFC set to  0.000000
10/18/2011	11:22:55 PM	PHl3 MFC set to  0.000000
10/18/2011	11:22:55 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:22:55 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:22:55 PM	Tube furnace set to 0
10/18/2011	11:22:58 PM	Helium valve closed
10/18/2011	11:22:58 PM	BCl3 valve closed
10/18/2011	11:22:58 PM	PH3 valve closed
10/18/2011	11:22:58 PM	SiCl4 pre valve closed
10/18/2011	11:22:58 PM	SiCl4 post valve closed
10/18/2011	11:22:59 PM	Main Vac valve closed
10/18/2011	11:22:59 PM	Bypass valve closed
10/18/2011	11:22:59 PM	Bubbler valve closed
10/18/2011	11:22:59 PM	H2 valve opened
10/18/2011	11:22:59 PM	Helium MFC set to  0.000000
10/18/2011	11:22:59 PM	H2 MFC set to  500.000000
10/18/2011	11:22:59 PM	BCl3 MFC set to  0.000000
10/18/2011	11:22:59 PM	PHl3 MFC set to  0.000000
10/18/2011	11:22:59 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:22:59 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:22:59 PM	Tube furnace set to 0
10/18/2011	11:24:01 PM	Helium valve closed
10/18/2011	11:24:01 PM	BCl3 valve closed
10/18/2011	11:24:01 PM	PH3 valve closed
10/18/2011	11:24:01 PM	SiCl4 pre valve closed
10/18/2011	11:24:01 PM	SiCl4 post valve closed
10/18/2011	11:24:01 PM	Main Vac valve closed
10/18/2011	11:24:01 PM	Bypass valve closed
10/18/2011	11:24:01 PM	H2 valve opened
10/18/2011	11:24:01 PM	Bubbler valve opened
10/18/2011	11:24:01 PM	Helium MFC set to  0.000000
10/18/2011	11:24:01 PM	H2 MFC set to  500.000000
10/18/2011	11:24:01 PM	BCl3 MFC set to  0.000000
10/18/2011	11:24:01 PM	PHl3 MFC set to  0.000000
10/18/2011	11:24:01 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:24:01 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:24:01 PM	Tube furnace set to 0
10/18/2011	11:24:02 PM	Helium valve closed
10/18/2011	11:24:02 PM	BCl3 valve closed
10/18/2011	11:24:02 PM	PH3 valve closed
10/18/2011	11:24:02 PM	SiCl4 pre valve closed
10/18/2011	11:24:02 PM	SiCl4 post valve closed
10/18/2011	11:24:02 PM	Main Vac valve closed
10/18/2011	11:24:02 PM	Bypass valve closed
10/18/2011	11:24:02 PM	H2 valve opened
10/18/2011	11:24:02 PM	Bubbler valve opened
10/18/2011	11:24:02 PM	Helium MFC set to  0.000000
10/18/2011	11:24:02 PM	H2 MFC set to  500.000000
10/18/2011	11:24:02 PM	BCl3 MFC set to  0.000000
10/18/2011	11:24:02 PM	PHl3 MFC set to  0.000000
10/18/2011	11:24:02 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:24:02 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:24:02 PM	Tube furnace set to 1000
10/18/2011	11:25:34 PM	Run aborted at 11:25 PM
10/18/2011	11:25:34 PM	Helium valve closed
10/18/2011	11:25:34 PM	H2 valve closed
10/18/2011	11:25:34 PM	BCl3 valve closed
10/18/2011	11:25:34 PM	PH3 valve closed
10/18/2011	11:25:34 PM	SiCl4 pre valve closed
10/18/2011	11:25:34 PM	SiCl4 post valve closed
10/18/2011	11:25:34 PM	Bypass valve closed
10/18/2011	11:25:34 PM	Main Vac valve closed
10/18/2011	11:25:34 PM	Bubbler valve closed
10/18/2011	11:25:34 PM	Helium MFC set to  0.000000
10/18/2011	11:25:34 PM	H2 MFC set to  0.000000
10/18/2011	11:25:34 PM	BCl3 MFC set to  0.000000
10/18/2011	11:25:34 PM	PHl3 MFC set to  0.000000
10/18/2011	11:25:34 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:25:34 PM	Tube furnace set to 0
10/18/2011	11:25:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	11:25:37 PM	Recipe started at 11:25 PM
10/18/2011	11:25:37 PM	Helium valve closed
10/18/2011	11:25:37 PM	H2 valve closed
10/18/2011	11:25:37 PM	BCl3 valve closed
10/18/2011	11:25:37 PM	PH3 valve closed
10/18/2011	11:25:37 PM	SiCl4 pre valve closed
10/18/2011	11:25:37 PM	SiCl4 post valve closed
10/18/2011	11:25:37 PM	Main Vac valve closed
10/18/2011	11:25:37 PM	Bubbler valve closed
10/18/2011	11:25:37 PM	Bypass valve opened
10/18/2011	11:25:37 PM	Helium MFC set to  0.000000
10/18/2011	11:25:37 PM	H2 MFC set to  0.000000
10/18/2011	11:25:37 PM	BCl3 MFC set to  0.000000
10/18/2011	11:25:37 PM	PHl3 MFC set to  0.000000
10/18/2011	11:25:37 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:25:37 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:25:37 PM	Tube furnace set to 0
10/18/2011	11:26:10 PM	Helium valve closed
10/18/2011	11:26:10 PM	H2 valve closed
10/18/2011	11:26:10 PM	BCl3 valve closed
10/18/2011	11:26:10 PM	PH3 valve closed
10/18/2011	11:26:10 PM	SiCl4 pre valve closed
10/18/2011	11:26:10 PM	SiCl4 post valve closed
10/18/2011	11:26:10 PM	Main Vac valve closed
10/18/2011	11:26:10 PM	Bubbler valve closed
10/18/2011	11:26:10 PM	Bypass valve opened
10/18/2011	11:26:10 PM	Helium MFC set to  0.000000
10/18/2011	11:26:10 PM	H2 MFC set to  0.000000
10/18/2011	11:26:10 PM	BCl3 MFC set to  0.000000
10/18/2011	11:26:10 PM	PHl3 MFC set to  0.000000
10/18/2011	11:26:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:26:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:26:10 PM	Tube furnace set to 0
10/18/2011	11:27:10 PM	Helium valve closed
10/18/2011	11:27:10 PM	H2 valve closed
10/18/2011	11:27:10 PM	BCl3 valve closed
10/18/2011	11:27:10 PM	PH3 valve closed
10/18/2011	11:27:10 PM	SiCl4 pre valve closed
10/18/2011	11:27:10 PM	SiCl4 post valve closed
10/18/2011	11:27:10 PM	Bypass valve closed
10/18/2011	11:27:10 PM	Bubbler valve closed
10/18/2011	11:27:10 PM	Main Vac valve opened
10/18/2011	11:27:10 PM	Helium MFC set to  0.000000
10/18/2011	11:27:10 PM	H2 MFC set to  0.000000
10/18/2011	11:27:10 PM	BCl3 MFC set to  0.000000
10/18/2011	11:27:10 PM	PHl3 MFC set to  0.000000
10/18/2011	11:27:10 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:27:10 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:27:10 PM	Tube furnace set to 0
10/18/2011	11:27:11 PM	Run finished at 11:27 PM
10/18/2011	11:27:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/18/2011	11:40:50 PM	Main Vac valve closed
10/18/2011	11:40:56 PM	Main Vac valve opened
10/18/2011	11:41:51 PM	Recipe started at 11:41 PM
10/18/2011	11:41:51 PM	Helium valve closed
10/18/2011	11:41:51 PM	H2 valve closed
10/18/2011	11:41:51 PM	BCl3 valve closed
10/18/2011	11:41:51 PM	PH3 valve closed
10/18/2011	11:41:51 PM	SiCl4 pre valve closed
10/18/2011	11:41:51 PM	SiCl4 post valve closed
10/18/2011	11:41:51 PM	Main Vac valve closed
10/18/2011	11:41:51 PM	Bypass valve closed
10/18/2011	11:41:51 PM	Bubbler valve closed
10/18/2011	11:41:51 PM	Helium MFC set to  0.000000
10/18/2011	11:41:51 PM	H2 MFC set to  0.000000
10/18/2011	11:41:51 PM	BCl3 MFC set to  0.000000
10/18/2011	11:41:51 PM	PHl3 MFC set to  0.000000
10/18/2011	11:41:51 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:41:51 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:41:51 PM	Tube furnace set to 0
10/18/2011	11:41:54 PM	Helium valve closed
10/18/2011	11:41:54 PM	BCl3 valve closed
10/18/2011	11:41:54 PM	PH3 valve closed
10/18/2011	11:41:54 PM	SiCl4 pre valve closed
10/18/2011	11:41:54 PM	SiCl4 post valve closed
10/18/2011	11:41:54 PM	Main Vac valve closed
10/18/2011	11:41:54 PM	Bypass valve closed
10/18/2011	11:41:54 PM	Bubbler valve closed
10/18/2011	11:41:54 PM	H2 valve opened
10/18/2011	11:41:54 PM	Helium MFC set to  0.000000
10/18/2011	11:41:54 PM	H2 MFC set to  500.000000
10/18/2011	11:41:54 PM	BCl3 MFC set to  0.000000
10/18/2011	11:41:54 PM	PHl3 MFC set to  0.000000
10/18/2011	11:41:54 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:41:54 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:41:55 PM	Tube furnace set to 0
10/18/2011	11:42:56 PM	Helium valve closed
10/18/2011	11:42:56 PM	BCl3 valve closed
10/18/2011	11:42:56 PM	PH3 valve closed
10/18/2011	11:42:56 PM	SiCl4 pre valve closed
10/18/2011	11:42:56 PM	SiCl4 post valve closed
10/18/2011	11:42:56 PM	Main Vac valve closed
10/18/2011	11:42:56 PM	Bypass valve closed
10/18/2011	11:42:56 PM	H2 valve opened
10/18/2011	11:42:56 PM	Bubbler valve opened
10/18/2011	11:42:56 PM	Helium MFC set to  0.000000
10/18/2011	11:42:56 PM	H2 MFC set to  500.000000
10/18/2011	11:42:56 PM	BCl3 MFC set to  0.000000
10/18/2011	11:42:56 PM	PHl3 MFC set to  0.000000
10/18/2011	11:42:56 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:42:56 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:42:56 PM	Tube furnace set to 0
10/18/2011	11:42:57 PM	Helium valve closed
10/18/2011	11:42:57 PM	BCl3 valve closed
10/18/2011	11:42:57 PM	PH3 valve closed
10/18/2011	11:42:57 PM	SiCl4 pre valve closed
10/18/2011	11:42:57 PM	SiCl4 post valve closed
10/18/2011	11:42:57 PM	Main Vac valve closed
10/18/2011	11:42:57 PM	Bypass valve closed
10/18/2011	11:42:57 PM	H2 valve opened
10/18/2011	11:42:57 PM	Bubbler valve opened
10/18/2011	11:42:57 PM	Helium MFC set to  0.000000
10/18/2011	11:42:57 PM	H2 MFC set to  500.000000
10/18/2011	11:42:57 PM	BCl3 MFC set to  0.000000
10/18/2011	11:42:57 PM	PHl3 MFC set to  0.000000
10/18/2011	11:42:57 PM	SiCl4 MFC set to  0.000000
10/18/2011	11:42:57 PM	Bypass solenoid MFC set to  0.000000
10/18/2011	11:42:58 PM	Tube furnace set to 1050
